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System and method for qualifying multiple device under test (DUT) test head

  • US 6,764,866 B1
  • Filed: 02/21/2003
  • Issued: 07/20/2004
  • Est. Priority Date: 02/21/2003
  • Status: Expired due to Fees
First Claim
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1. A method for qualifying a multiple die under test head comprising:

  • providing a test apparatus comprising a multiple die under test head;

    providing a calibration standard substrate having a plurality of die arrays which may be tested while employing the multiple die under test head;

    classifying the plurality of die arrays with respect to;

    position within the calibration standard substrate; and

    defective die and non-defective die within a series of die locations within each of the plurality of die arrays;

    selecting from the plurality of die arrays a sub-set of die arrays which;

    do not overlap in position within the calibration standard substrate; and

    have in an aggregate no greater than one defective die within each of the series of die locations; and

    qualifying the multiple die under test head through measurement of the sub-set of die arrays.

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