Omnidirectional microscale impact switch

• US 6,765,160 B1
• Filed: 08/21/2002
• Issued: 07/20/2004
• Est. Priority Date: 08/21/2002
• Status: Expired due to Fees

• Current Assignee: U.S. Government
• Original Assignee: The United States of America As Represented By The Secretary of Agriculture
• Inventors: Robinson, Charles H.
• Primary Examiner(s): Donovan, Lincoln
• Assistant Examiner(s): LEE, KYUNG S
• Application Number:
  US10/064,828
• Time in Patent Office: 699 Days
• Field of Search: 200/61.45 R, 200/61.48, 200/61.49, 200/61.51, 200/61.52, 200/181, 735/141.6, 735/142.9, 735/143.5, 735/143.6, 735/143.7, 735/143.8
• US Class Current: 200/61.45R
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 35/14 Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch wherein the liquid constitutes a contact of the switch H01H29/002

Abstract

The invention is a normally-open, momentary, non-latching, inertial thresholding switch 30, fabricated on a substrate 1 in a planar configuration, using no cylindrical tilt mass, with low mass 16 and small switch gap 36, 37, 38, 39 to allow fast switch action and rapid reset. Of ultra-miniature, rugged construction, its high mechanical frequency limits sensitivity to vibration inputs.

Claims

1. An omnidirectional inertial switch, comprising:

a substrate die including a centrally located pedestal, a trough area surrounding the pedestal, a perimeter land area surrounding the trough area,

a bottom ring electrode disposed in the trough area and a contact lead connected to the bottom ring electrode;

a bottom switch assembly disposed on the substrate die, the bottom switch assembly including a conductive device layer and a conductive link, the device layer including a centrally located anchor, at least one spring, a proof mass connected to the anchor by the at least one spring and located opposite the bottom ring electrode, at least one contact electrode disposed radially outward from the proof mass and a contact lead connected to the at least one contact electrode, the conductive link being disposed on the anchor; and

a cover plate assembly disposed on the bottom switch assembly, the cover plate assembly including a top plate, a non-conductive spacer disposed between the top plate and the bottom switch assembly, a center electrode that contacts the conductive link and a top ring electrode located opposite the proof mass;

wherein an x-axis gap and a y-axis gap are defined between the proof mass and the at least one contact electrode, a bottom z-axis gap is defined between the bottom ring electrode and the proof mass and a top z-axis gap is defined between the top ring electrode and the proof mass.

2. The switch of claim 1 wherein the conductive link comprises a solder ball.

3. The switch of claim 1 wherein a thickness of the pedestal and a thickness of the perimeter land area are the same.

4. The switch of claim 1 wherein the at least one spring comprises four springs.

5. The switch of claim 1 wherein the at least one contact electrode is a single contact electrode and wherein the single contact electrode surrounds the proof mass.

6. The switch of claim 1 wherein the proof mass has a shape of an annular square.

7. The switch of claim 6 wherein the at least one contact electrode comprises four separate contact electrodes, each of the four contact electrodes connected to a respective contact lead, and wherein the four contact electrodes are located at respective comers of the proof mass.

8. The switch of claim 1 wherein the top and bottom z-axis gaps are the same.

9. The switch of claim 1 wherein the top and bottom z-axis gaps are different.

10. The switch of claim 1 wherein the x, y and z-axis gaps are in a range of 0.0001 inches to about 0.01 inches.

11. The switch of claim 1 wherein the switch is normally open.

12. The switch of claim 1 wherein a size of the switch is in a range of one cubic mm to about five cubic mm.