High throughput thin film deposition and substrate handling method and apparatus for optical disk processing
First Claim
1. An apparatus for depositing at least one thin film on a substrate useful in electronic applications, the apparatus comprising:
- (a) an in-line continuously moving web for simultaneously transporting a number of substrates to which a thin film of material is to be applied, wherein said moving web is a roll-to-roll moving disposable web consisting essentially of a polymeric material and wherein said substrates are held to said web by friction against or electrostatic attraction to a web surface;
(b) a central processing chamber which is maintained under vacuum and through which at least a portion of said continuously moving web travels;
(c) at least one deposition device which is located within said central processing chamber, where at least a portion of said continuously moving web is exposed to material deposited from said deposition device;
(d) a first moving platform which moves in an x direction and a y direction, which transfers a substrate onto said continuously moving web; and
(e) a second moving platform which moves in an x direction and a y direction, which transfers a substrate from said continuously moving web.
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Abstract
The disclosure herein relates to a high throughput system for thin film deposition on substrates which can be used in applications such as optical disks, and in particular DVD disks, chip-scale packaging, and plastic based display, for example. An apparatus useful in the production of products of the kind described above includes: (a) a continuously moving web for simultaneously transporting a number of substrates to which a thin film of material is to be applied, wherein the moving web is a roll-to-roll moving web; (b) a central processing chamber which is maintained under vacuum and through which at least a portion of said continuously moving web travels; and, (c) at least one deposition device which is located within said central processing chamber, where at least a portion of said continuously moving web is exposed to material deposited from said deposition device. Typically the deposition device is a magnetron sputtering device. In addition, the apparatus typically also includes (d) a first moving platform which transfers a substrate onto said continuously moving web, and (e) a second moving platform which receives processed substrates from said continuously moving web.
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Citations
15 Claims
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1. An apparatus for depositing at least one thin film on a substrate useful in electronic applications, the apparatus comprising:
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(a) an in-line continuously moving web for simultaneously transporting a number of substrates to which a thin film of material is to be applied, wherein said moving web is a roll-to-roll moving disposable web consisting essentially of a polymeric material and wherein said substrates are held to said web by friction against or electrostatic attraction to a web surface;
(b) a central processing chamber which is maintained under vacuum and through which at least a portion of said continuously moving web travels;
(c) at least one deposition device which is located within said central processing chamber, where at least a portion of said continuously moving web is exposed to material deposited from said deposition device;
(d) a first moving platform which moves in an x direction and a y direction, which transfers a substrate onto said continuously moving web; and
(e) a second moving platform which moves in an x direction and a y direction, which transfers a substrate from said continuously moving web. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification