Method for making a three-dimensional memory array incorporating serial chain diode stack
First Claim
1. A method for fabricating a multi-level memory array comprising, for each of at least two adjacent levels, the steps of:
- depositing at least one metal layer;
forming at least one layer of a first conductivity type organic polymer for both even-numbered levels and odd-numbered levels;
masking and etching the polymer and metal layers to define a plurality of parallel, spaced-apart rail-stacks running in a first direction for even-numbered levels and running in a second direction for odd-numbered levels;
filling space between the rail-stacks with a dielectric material;
planarizing the polymer layer and the dielectric material to form a planarized surface, and forming another polymer layer having a variable resistance on the planarized surface.
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Abstract
A three-dimensional memory array includes a plurality of rail-stacks on each of several levels forming alternating levels of X-lines and Y-lines for the array. Memory cells are formed at the intersection of each X-line and Y-line. The memory cells of each memory plane are all oriented in the same direction relative to the substrate, forming a serial chain diode stack. In certain embodiments, row and column circuits for the array are arranged to interchange function depending upon the directionality of memory cells in the selected memory plane. High-voltage drivers for the X-lines and Y-lines are each capable of passing a write current in either direction depending on the direction of the selected memory cell. A preferred bias arrangement reverse biases only unselected memory cells within the selected memory plane, totaling approximately N2 memory cells, rather than approximately 3N2 memory cells as with prior arrays.
97 Citations
20 Claims
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1. A method for fabricating a multi-level memory array comprising, for each of at least two adjacent levels, the steps of:
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depositing at least one metal layer;
forming at least one layer of a first conductivity type organic polymer for both even-numbered levels and odd-numbered levels;
masking and etching the polymer and metal layers to define a plurality of parallel, spaced-apart rail-stacks running in a first direction for even-numbered levels and running in a second direction for odd-numbered levels;
filling space between the rail-stacks with a dielectric material;
planarizing the polymer layer and the dielectric material to form a planarized surface, and forming another polymer layer having a variable resistance on the planarized surface.
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2. A method for fabricating a multi-level memory array comprising, for each of at least two adjacent levels, the steps of:
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depositing at least one metal layer;
forming at least one layer of silicon on the metal layer where the silicon is doped with a first conductivity type dopant for both even-numbered levels and odd-numbered levels;
masking and etching the silicon and metal layers to define a plurality of parallel, spaced-apart rail-stacks running in a first direction for even-numbered levels and running in a second direction for odd-numbered levels;
filling space between the rail-stacks with a dielectric material;
planarizing the silicon layer and the dielectric material to form a planarized surface, and forming a layer of material for an antifuse on the planarized surface. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9)
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10. A method for fabricating a multi-level memory array comprising, for each of at least two adjacent levels, the steps of:
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forming a metal layer;
forming a first silicon layer heavily doped with a first conductivity type dopant on the metal layer, for both even-numbered levels and odd-numbered levels;
forming a second silicon layer on the first silicon layer, the second silicon layer being more lightly doped than the first silicon layer with the first conductivity type dopant, for both even-numbered levels and odd-numbered levels;
forming a layer of an antifuse material on the second silicon layer;
forming a third silicon layer on the layer of antifuse material heavily doped with a second conductivity type dopant, for both even-numbered levels and odd-numbered levels;
defining spaced-apart rail-stacks from the conductive layer, first and second silicon layers, the layer of antifuse material and third silicon layer, said rail-stacks running in a first direction for even-numbered levels and running in a second direction for odd-numbered levels;
filling space between the rail-stacks with a dielectric, and planarizing an upper surface of the dielectric fill and the third silicon layer. - View Dependent Claims (11, 12)
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13. A method for fabricating a multi-level memory array comprising, for each of at least two adjacent levels, the steps of;
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forming a first silicon layer lightly doped with a first conductivity type dopant, for both even-numbered levels and odd-numbered levels;
forming a second silicon layer on the first silicon layer, the second silicon layer being more heavily doped than the first silicon layer with the first conductivity type dopant, for both even-numbered levels and odd-numbered levels;
depositing a conductive layer on the second silicon layer;
forming a third silicon layer heavily doped with a second conductivity type dopant on the conductive layer, for both even-numbered levels and odd-numbered levels;
defining parallel spaced-apart rail-stacks from the first and second silicon layers, the conductive layer, and the third silicon layer, said rail-stacks running in a first direction for even-numbered levels and running in a second direction for odd-numbered levels;
filling space between the rail-stacks with a dielectric, and planarizing an upper surface of the dielectric fill and the third silicon layer; and
forming a layer of an antifuse material on the planarized surface. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification