Fabry-Perot filter apparatus with enhanced optical discrimination

• US 6,768,555 B2
• Filed: 03/21/2002
• Issued: 07/27/2004
• Est. Priority Date: 03/21/2002
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Lin, Ran-Jin, Chen, Li-Jui
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): Lyons, Michael A.
• Application Number:
  US10/103,619
• Publication Number:
  US 20030179383A1
• Time in Patent Office: 859 Days
• Field of Search: 356/454, 356/480, 356/519, 356/337.2, 356/337.22, 356/577, 356/589, 372/32
• US Class Current: 356/519
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Abstract

Within a Fabry-Perot filter apparatus, a method for fabricating the Fabry-Perot filter apparatus and a method for operating the Fabry-Perot filter apparatus, there is employed a Fabry-Perot filter and at least one color filter layer, both assembled over a substrate and covering at least two optical transducer elements which are formed within the substrate. Within the foregoing apparatus and methods, the at least one color filter layer comprises at least two color filter elements of separate color, each registered with a separate optical transducer element within the at least two optical transducer elements. The apparatus and methods provide for enhanced optical discrimination properties.

Claims

1. A Fabry-Perot filter apparatus comprising:

a substrate having formed therein at least two optical transducer elements;

a Fabry-Perot filter assembled over the substrate and covering the at least two optical transducer elements, the Fabry-Perot filter comprising a pair of partially reflective layers separated by a transparent material; and

at least one color filter layer also assembled over the substrate and covering the at least two optical transducer elements, the at least one color filter layer comprising at least two color filter elements of separate color, each registered with a separate optical transducer element within the at least two optical transducer elements.

2. The apparatus of claim 1 wherein the optical transducer element is an optical emitter element.

3. The apparatus of claim 1 wherein the optical transducer element is an optical sensor element.

4. The apparatus of claim 1 wherein the substrate is a semiconductor substrate and the optical transducer element is a semiconductor optical sensor element.

5. The apparatus of claim 1 wherein the pair of partially reflective layers is separated by a fixed distance.

6. The apparatus of claim 1 wherein the pair of partially reflective layers is separated by a variable distance.

7. The apparatus of claim 1 wherein each color filter element is separated from a corresponding optical transducer element by a single actual separation distance.

8. The apparatus of claim 1 wherein the color filter layer is formed employing a series of separately colored patterned photoresist layers.

9. A method for fabricating a Fabry-Perot filter apparatus comprising:

providing a substrate having formed therein at least two optical transducer elements;

assembling over the substrate and covering the at least two optical transducer elements a Fabry-Perot filter, the Fabry-Perot filter comprising a pair of partially reflective layers separated by a transparent material; and

assembling also over the substrate and covering the at least two optical transducer elements at least one color filter layer, the at least one color filter layer comprising at least two color filter elements of separate color, each registered with a separate optical transducer element within the at least two optical transducer elements.

10. The method of claim 9 wherein the optical transducer element is an optical emitter element.

11. The method of claim 9 wherein the optical transducer element is an optical sensor element.

12. The method of claim 9 wherein the substrate is a semiconductor substrate and the optical transducer element is a semiconductor optical sensor element.

13. The method of claim 9 wherein the pair of partially reflective layers is separated by a fixed distance.

14. The method of claim 9 wherein the pair of partially reflective layers is separated by a variable distance.

15. The method of claim 9 wherein each color filter element is separated from a corresponding optical transducer element by a single actual separation distance.

16. The method of claim 9 wherein the color filter layer is formed employing a series of separately colored patterned photoresist layers.

17. A method for operating a Fabry-Perot filter apparatus comprising:

providing a Fabry-Perot filter apparatus comprising;

a substrate having formed therein at least two optical sensor transducer elements;

a Fabry-Perot filter assembled over the substrate and covering the at least two optical sensor transducer elements, the Fabry-Perot filter comprising a pair of partially reflective layers separated by a transparent material;

at least one color filter layer also assembled over the substrate and covering the at least two optical sensor transducer elements, the at least one color filter layer comprising at least two color filter elements of separate color, each registered with a separate optical sensor transducer element within the at least two optical sensor transducer elements;

a sample chamber assembled over the Fabry-Perot filter and the at least one color filter layer; and

a radiation source located such as to illuminate a sample within the sample chamber;

introducing the sample into the sample chamber and illuminating the sample within the sample chamber; and

analyzing the sample incident to a comparison of a photoelectric effect difference between the at least two optical sensor transducer elements.

18. The method of claim 17 wherein the substrate is a semiconductor substrate and the optical sensor transducer element is a semiconductor optical sensor transducer element.

19. The method of claim 17 wherein the pair of partially reflective layers is separated by a fixed distance.

20. The method of claim 17 wherein the pair of partially reflective layers is separated by a variable distance.

21. The method of claim 17 wherein each color filter element is separated from a corresponding optical transducer element by a single actual separation distance.

22. The method of claim 17 wherein the color filter layer is formed employing a series of separately colored patterned photoresist layers.