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Orientation stabilization for MEMS devices

  • US 6,768,571 B2
  • Filed: 09/30/2002
  • Issued: 07/27/2004
  • Est. Priority Date: 09/30/2002
  • Status: Expired due to Term
First Claim
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1. Apparatus, comprising:

  • a MEMS device; and

    a controller adapted to;

    receive, from a position sensor corresponding to the MEMS device, a sensor signal indicative of a current position of a movable part of the MEMS device with respect to a stationary part of the MEMS device; and

    generate a control signal as a function of the sensor signal, wherein an actuator of the MEMS device is adapted to achieve a desired position of the movable part with respect to the stationary part based on the control signal, wherein the control signal has a voltage profile, wherein a first portion of the voltage profile has voltage having an absolute value greater than a snap-down voltage for the MEMS device.

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