System and method for analyzing error information from a semiconductor fabrication process

• US 6,768,961 B2
• Filed: 09/14/2001
• Issued: 07/27/2004
• Est. Priority Date: 09/14/2001
• Status: Active Grant

• Current Assignee: Onto Innovation Inc.
• Original Assignee: Yield Dynamics Incorporated (MKS Instruments Incorporated)
• Inventors: Buckheit, Jonathan B., Wang, Weidong
• Primary Examiner(s): Hoff, Marc S.
• Assistant Examiner(s): SUAREZ, FELIX E
• Application Number:
  US09/952,848
• Publication Number:
  US 20030055592A1
• Time in Patent Office: 1,047 Days
• Field of Search: 702/119-122, 702/83, 702/86, 702/117, 702/118, 702/128, 702/155, 702/175, 702/179, 702/180, 702/181, 702/183, 702/188, 702/189, 702/198, 235/454, 324/753, 700/83, 348/8-10, 438/141, 438/142
• US Class Current: 702/120
• CPC Class Codes: G01R 31/2894 Aspects of quality control [QC] G01R31/31718 takes precedence; program control for QC G05B19/41875
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A system and method for analyzing error information from a semiconductor fabrication process. The system receives wafer map data describing a plurality of failing chips on a particular semiconductor wafer. The system utilizes the wafer map data to classify each of the failing chips into one of several error categories, such systematic errors, repeated or reticle errors, and random errors. The system further partitions the systematic errors into spatial clusters, which may be compared against a known library of spatial error patterns for identifying the origins of the systematic errors.

Claims

1. A system for analyzing error information describing a plurality of failing chips on a semiconductor wafer, comprising:

a controller which is adapted to receive said error information in the form of a wafer map and to classify each of said plurality of failing chips in a unique one of a plurality of error categories, based on said wafer map.

2. The system of claim 1 wherein said plurality of error categories comprises a systematic error category.

3. The system of claim 2 wherein said plurality of error categories further comprises a repeated error category.

4. The system of claim 3 wherein said plurality of error components further comprises a random error category.

5. The system of claim 4 further comprising:

a display unit which is communicatively coupled to said controller and which is adapted to provide a graphical presentation of each of said plurality of error categories superimposed over a wafer map image.

6. The system of claim 5 further comprising:

an input assembly which is communicatively coupled to said controller and which is adapted to allow a user to enter said error information into said controller.

7. The system of claim 2 wherein said controller implements a test for spatial randomness to determine whether each of said failing chips is classified in the systematic error category, said test for spatial randomness employing a test statistic of the form:

$W=\underset{i,j}{\sum <br><br>}<br><br>{w_{i,j}<br><br>\left(x_i-x_j\right)}^2$

where the summation is over all chips on said wafer map, x_i=0 if chip i is a passing chip, x_i=1 if chip i is a failing chip, x_j=0 if chip j is a passing chip, x_j=1 if chip j is a failing chip, and w_ij is 1 if chip i is adjacent to chip j, and w_ij is 0 otherwise.

8. The system of claim 4 wherein said controller implements a chi-square test of independence to determine whether each of said failing chips is classified in the category of repeated failures, said chi-square test of independence being of the form:

${\mathrm{\chi <br><br>}}^2=\underset{i=1}{\overset{r}{\sum <br><br>}}<br><br>\frac{{\left(O_i-E_i\right)}^2}{E_i}$

where there are r chips in each reticle used on said wafer, O_i is the number of failing chips observed in each reticle zone i, and

9. A system for analyzing error information describing a plurality of failing chips on a semiconductor wafer, comprising:

an input assembly which is adapted to accept and communicate said error information in the form of a wafer map; and

a controller which is communicatively coupled to said input assembly and which receives said wafer map from said input assembly, said controller being adapted to classify each of said failing chips in a unique one of the group of categories including systematic failures, repeated failures and random failures, based upon said wafer map.

10. The system of claim 9 wherein said controller is further adapted to partition failing chips in the category of systematic failures into a plurality of spatial clusters.

11. The system of claim 9 wherein said controller implements a test for spatial randomness to determine whether each of said failing chips is classified in the category of systematic failures.

12. The system of claim 11 wherein said test for spatial randomness employs a test statistic of the form:

$W=\underset{i,j}{\sum <br><br>}<br><br>{w_{i,j}<br><br>\left(x_i-x_j\right)}^2$

where the summation is over all chips on said wafer map, x_i=0 if chip i is a passing chip, x_i=1 if chip i is a failing chip, x_j=0 if chip j is a passing chip, x_j=1 if chip j is a failing chip, and w_ij is 1 if chip i is adjacent to chip j, and w_ij is 0 otherwise.

13. The system of claim 12 wherein said controller implements a chi-square test of independence to determine whether each of said failing chips is classified in the category of repeated failures.

14. The system of claim 13 wherein said chi-square test of independence is of the form:

${\mathrm{\chi <br><br>}}^2=\underset{i=1}{\overset{r}{\sum <br><br>}}<br><br>\frac{{\left(O_i-E_i\right)}^2}{E_i}$

where there are r chips in each reticle used on said wafer, O_i is the number of failing chips observed in each reticle zone i, and

15. A computerized method for analyzing error information from a semiconductor manufacturing process, comprising:

receiving wafer map data identifying a plurality of failing chips on a semiconductor wafer; and

automatically classifying each of said failing chips in a unique one of the group of categories including systematic errors, repeated errors, and random errors, based upon said wafer map data.

16. The method of claim 15 further comprising:

partitioning failing chips in the category of systematic errors into a plurality of spatial clusters.

17. The method of claim 15 wherein said failing chips are classified in the category of systematic errors by use of a test for spatial randomness.

18. The method of claim 17 wherein said test for spatial randomness employs a test statistic of the form:

$W=\underset{i,j}{\sum <br><br>}<br><br>{w_{i,j}<br><br>\left(x_i-x_j\right)}^2$

where the summation is over all chips on said wafer map, x_i=0 if chip i is a passing chip, x_i=1 if chip i is a failing chip, x_j=0 if chip j is a passing chip, x_j=1 if chip j is a failing chip, and w_ij is 1 if chip i is adjacent to chip j, and w_ij is 0 otherwise.

19. The method of claim 15 wherein said failing chips are classified in the categories of repeated failures and random failures by use of a chi-square test of independence.

20. The method of claim 19 wherein said chi-square test of independence is of the form:

${\mathrm{\chi <br><br>}}^2=\underset{i=1}{\overset{r}{\sum <br><br>}}<br><br>\frac{{\left(O_i-E_i\right)}^2}{E_i}$

where there are r chips in each reticle used on said wafer, O_i is the number of failing chips observed in each reticle zone i, and