Gas injector adapted for ALD process

• US 6,769,629 B2
• Filed: 12/20/2002
• Issued: 08/03/2004
• Est. Priority Date: 12/26/2001
• Status: Expired due to Fees

• Current Assignee: Jusung Engineering Company Limited
• Original Assignee: Jusung Engineering Company Limited
• Inventors: Park, Jong Man, Hwang, Chul Ju
• Primary Examiner(s): DOERRLER, WILLIAM CHARLES
• Application Number:
  US10/326,745
• Publication Number:
  US 20030116652A1
• Time in Patent Office: 592 Days
• Field of Search: 239/222.13, 239/244, 239/436, 239/437, 239/451, 239/457, 239/533.14, 239/596, 239/67, 239/69, 239/70, 118/715
• US Class Current: 239/224
• CPC Class Codes: C23C 16/45544 characterized by the apparatus
• CPC Class Codes: C23C 16/45589 Movable means, e.g. fans
• CPC Class Codes: F23D 14/48 Nozzles
• CPC Class Codes: F23D 91/02 for use in particular heating operations

Abstract

A gas injector includes a body, a motor and a chopper. The body is mounted on a reaction chamber in a vertically extending cylinder shape and has a plurality of gas injection tubes and a central hollow portion. The plurality of gas injection tubes pass through a bottom face of the body and the central hollow portion passes through each center of the bottom and top faces of the body. The motor has a rotary shaft inserted into the central hollow portion. The chopper is formed in a circular-plate shape and has a notch on a predetermined portion. The chopper is coupled with an end of the rotary shaft and rotated by a rotation of the rotary shaft in a state that the bottom face of the body is closely attached to the chopper through a magnetic sealing.

Claims

1. A gas injector comprising:

a body mounted on a reaction chamber in a vertically extending cylinder shape, and having a plurality of gas injection tubes penetrating bottom face thereof and a central tube penetrating each center of the bottom and top faces of the body;

a motor having a rotary shaft inserted into the central tube; and

a circular-plate shaped chopper connected to an end of the rotary shaft and having a predetermined cut portion, the chopper being magnetically sealed with the bottom face of the body and rotating by the rotation of the rotary shaft in a sealed state.

2. The gas injector of claim 1, wherein the plurality of gas injection tubes are circularly arranged along a circumference of the bottom face of the body.

3. The gas injector of claim 1, wherein at least one of the gas injection tubes is different in size from the others.

4. The gas injector of claim 1, wherein the chopper is formed in a folding-fan shape.