Method of making transparent articles utilizing protective layers for optical coatings
First Claim
1. A method of making a transparent article, the method comprisingforming a protective coating including a layer consisting essentially of carbon on an optical coating on a substrate;
- heating the protective coating in a reactive atmosphere;
reacting the layer consisting essentially of carbon with the reactive atmosphere to form a carbon containing gas; and
removing the layer consisting essentially of carbon from the optical coating to form the transparent article.
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Abstract
A method is provided for making transparent articles utilizing protective layers for optical coatings. An optical coating on a transparent substrate is provided with a temporary layer of carbon as protection during manufacturing against scratches and corrosive environments. When the optical coating and/or substrate are tempered in an atmosphere reactive to carbon, such as air, the layer of carbon is removed as a carbon-containing gas. For an optical coating with a brittle, glassy, outermost layer furthest from the substrate, additional protection is provided by a scratch propagation blocker layer between the outermost layer and the carbon protective layer.
71 Citations
34 Claims
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1. A method of making a transparent article, the method comprising
forming a protective coating including a layer consisting essentially of carbon on an optical coating on a substrate; -
heating the protective coating in a reactive atmosphere;
reacting the layer consisting essentially of carbon with the reactive atmosphere to form a carbon containing gas; and
removing the layer consisting essentially of carbon from the optical coating to form the transparent article. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
the protective coating further includes a scratch propagation blocker layer between the layer consisting essentially of carbon and the outermost layer; - and
the scratch propagation blocker layer is a homogeneous layer comprising a material selected from the group consisting of Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta and W;
oxides of Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta and W;
nitrides of Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta and W; and
mixtures thereof.
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20. The method according to claim 19, wherein the scratch propagation blocker layer consists of unavoidable impurities and a material selected from the group consisting of
Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta and W; -
oxides of Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta and W;
nitrides of Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta and W; and
mixtures thereof.
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21. The method according to claim 19, wherein the scratch propagation blocker layer has a thickness of from 2 to 8 nm.
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22. A method of making a transparent article, the method comprising
providing a substrate having an optical coating including furthest from the substrate a homogeneous outermost layer comprising silicon nitride; - and
forming a scratch propagation blocker layer on the outermost layer, wherein the scratch propagation blocker layer is a homogeneous layer comprising a material selected from the group consisting of Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta and W;
oxides of Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta and W;
nitrides of Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta and W; and
mixtures thereof. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
the scratch propagation blocker layer comprises a material selected from the group consisting of TiO2, SiO2, ZnO, SnO2, In2O3, ZrO2, Al2O3, Cr2O3, Nb2O5, MoO3, HfO2, Ta2O5, WO3 and mixtures thereof; - and
the forming comprises depositing on the outermost layer a metal, a metal suboxide or a metal subnitride diffusion barrier layer comprising at least one element selected from the group consisting of Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta and W;
heating the diffusion barrier layer in an atmosphere containing oxygen; and
reacting the diffusion barrier layer with the oxygen to form the scratch propagation blocker layer.
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26. The method according to claim 25, wherein the diffusion barrier layer has a thickness of from 2 nm to 8 nm.
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27. The method according to claim 25, wherein the atmosphere containing oxygen is air.
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28. The method according to claim 25, wherein the heating comprises raising a temperature of the optical coating to at least 400°
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29. The method according to claim 25, wherein the heating tempers the optical coating.
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30. The method according to claim 25, wherein the heating tempers the substrate.
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31. The method according to claim 25, further comprising
depositing a layer consisting essentially of carbon on the diffusion barrier layer before heating the diffusion barrier layer; - and
reacting the layer consisting essentially of carbon with the oxygen to form a carbon containing gas.
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32. The method according to claim 31, wherein the carbon containing gas comprises at least one compound selected from the group consisting of carbon monoxide and carbon dioxide.
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33. The method according to claim 22, wherein the substrate comprises a glass.
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34. The method according to claim 33, wherein the glass is transparent to visible light.
Specification