Electrostatic chuck member and method of producing the same

• US 6,771,483 B2
• Filed: 07/19/2002
• Issued: 08/03/2004
• Est. Priority Date: 01/21/2000
• Status: Expired due to Term

• Current Assignee: TOCALO Co., Ltd., Tokyo Electron Limited
• Original Assignee: TOCALO Co., Ltd.
• Inventors: Takeuchi, Junichi, Harada, Yoshio, Togoe, Kenichiro
• Primary Examiner(s): LEJA, RONALD W
• Application Number:
  US10/169,755
• Publication Number:
  US 20030007308A1
• Time in Patent Office: 746 Days
• Field of Search: 361/233, 361/234, 279/128, 427/446, 427/447, 427/452, 427/453
• US Class Current: 361/234
• CPC Class Codes: B23Q 3/154 Stationary devices
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks

Abstract

It is to provide an electrostatic chuck member having a strong adsorption force and an excellent responsibility (release property) in the stop of voltage application and is an electrostatic chuck member comprising a substrate, an undercoat of a metallic layer formed on at least one surface thereof, a lower insulating layer of Al₂O₃ ceramic formed on the undercoat, a metallic electrode layer formed on the lower insulating layer and an upper insulating layer of Al₂O₃ ceramic formed on the electrode layer as a topcoat.

Claims

1. An electrostatic chuck member comprising a substrate, an undercoat of a metallic sprayed layer formed on at least one surface thereof and having a thickness of 30-300 μ

m, a lower insulating layer of Al₂O₃ ceramic sprayed layer formed by spraying Al₂O₃ having a purity of not less than 98 wt % on the undercoat and having a thickness of 100-500 μ

m and a porosity of 1-8%, an electrode layer of a metallic sprayed layer formed by spraying a metal spraying material having a particle size smaller than a particle size of an insulation spraying material on the lower insulating layer and having an oxygen content of not more than 2.0 wt %, a thickness of 5-100 μ

m and a porosity of 1-7%, and an upper insulating layer of Al₂O₃ ceramic sprayed layer formed by spraying Al₂O₃ having a purity of not less than 98 wt % on the electrode layer and having a thickness of 100-500 μ

m and a porosity of 1-8% and finishing a surface of the upper insulating layer to a surface roughness Ra of about 0.1-2.0 μ

m as a topcoat.

2. An electrostatic chuck member according to claim 1, wherein the undercoat is a metallic layer formed by spraying one or more of Ni, Al, Cr, Co, Mo and an alloy containing one or more of these metal elements.

3. An electrostatic chuck member according to claim 1, wherein at least one surface of each of the lower insulating layer and the upper insulating layer is sealed with an organic or inorganic silicon compound and has a volume resistivity within a range of 1×

10¹³-1×

10¹⁵ Ω

·

cm.

4. An electrostatic chuck member according to claim 1, wherein the metallic electrode layer is a layer formed by spraying one or more of W, Al, Cu, Nb, Ta, Mo, Ni and an alloy containing one or more of these metal elements.

5. An electrostatic chuck member according to claim 1, characterized by having a sealed layer obtained by applying a liquid organic or inorganic silicon compound to at least one surface of the lower and upper insulating layers or mechanically polished surface and heating at 120-350°

C. for 1-5 hours.

6. A method of producing an electrostatic chuck member which comprises subjecting at least one surface of a substrate to a blast treatment, spraying a metal or an alloy onto a roughened surface of the substrate to form an undercoat of a metallic layer having a thickness of 30-300 μ

m, forming a lower insulating layer made of Al₂O₃ ceramic sprayed layer having a thickness of 100-500 μ

m, a porosity of 1-8% and a purity of not less than 98 wt % on the undercoat, spraying a metallic spraying material having a particle size smaller than a particle size of spraying material for insulating layer on the lower insulating layer to form a metallic electrode layer having a thickness of 5-100 μ

m, an oxygen content of not more than 2.0 wt % and a porosity of 1-7%, forming an upper insulating layer made of Al₂O₃ ceramic sprayed layer having a thickness of 100-500 μ

m, a porosity of 1-8% and a purity of not less than 98 wt % on the metallic electrode layer, subjecting a surface of the upper insulating layer to a mechanical polishing to finish to a surface roughness Ra of about 0.1-2.0 μ

m, and laminating these layers in this order.

7. A method of producing an electrostatic chuck member according to claim 6, wherein the undercoat is formed by spraying one or more of Ni, Al, Cr, Co, Mo and an alloy containing one or more of these metal elements.

8. A method of producing an electrostatic chuck member according to claim 6, wherein at least one surface of each of the lower insulating layer and the upper insulating layer is sealed with an organic or inorganic silicon compound and has a volume resistivity within a range of 1×

10¹³-1×

10¹⁵ Ω

·

cm.

9. A method of producing an electrostatic chuck member according to claim 6, wherein the metallic electrode layer is a layer formed by spraying one or more of W, Al, Cu, Nb, Ta, Mo, Ni and an alloy containing one or more of these metal elements.

10. A method of producing an electrostatic chuck member according to claim 6, wherein a sealed layer is formed by applying a liquid organic or inorganic silicon compound to a surface of upper insulating layer and/or the lower insulating layer and heating at 120-350°

C. for 1-5 hours.