System and software for data distribution in semiconductor manufacturing and method thereof

• US 6,772,034 B1
• Filed: 07/12/2001
• Issued: 08/03/2004
• Est. Priority Date: 07/12/2001
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Likes, Donald Craig, Brown, Russell Clinton, Shi, Yurong
• Primary Examiner(s): Picard, Leo
• Assistant Examiner(s): FRANK, ELLIOT L
• Application Number:
  US09/905,226
• Time in Patent Office: 1,118 Days
• Field of Search: 700/51, 700/96, 700/108, 700/121, 702/179
• US Class Current: 700/121
• CPC Class Codes: G05B 19/4188 characterised by CIM planning or realisation
• CPC Class Codes: G05B 2219/31395 Process management, specification, process and production data, middle level
• CPC Class Codes: G05B 2219/32191 Real time statistical process monitoring
• CPC Class Codes: G05B 2219/33149 Publisher subscriber, publisher, master broadcasts data to slaves, subscriber
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method is presented wherein an engineering data collection (EDC) subsystem of a process control system as embodied is responsible for configuring data collection, distributing collected data, and storing collected data, and is supported through underlying interfaces in a transaction and performance monitoring system. In an embodiment, an engineering data collection (EDC) broker accepts data from equipment interfaces or a tap subsystem, then distributes the data to all subscribers such as data history, the engineering data analysis (EDA) system interface, and the statistical process control (SPC) subsystem as disclosed herein. Engineering data analysis system interface is responsible for transmitting raw data and process control system data to engineering data analysis system. Data history subscribes to all data and stores it in the transaction and performance monitoring system'"'"'s online transaction processing (OLTP) database. User input to engineering data collection subsystem is accomplished via web interface or a keyboard data entry client.

Claims

1. A method comprising the steps of:

receiving data from an equipment interface, the data including data associated with a semiconductor manufacturing process;

distributing the data to a statistical process control subscriber after receiving the data without being queried by the statistical process control subscriber; and

distributing the data to an engineering data analysis subscriber after receiving the data without being queried by the statistical process control subscriber.

2. The method as in claim 1, wherein receiving includes receiving the data through an intermediate device.

3. The method as in claim 2, wherein the intermediate device is a system console.

4. The method as in claim 1, further including distributing the data to a data history subscriber.

5. The method as in claim 4, wherein distributing the data to a data history subscriber includes providing the data to an online transaction processing database.

6. The method as in claim 1, wherein distributing the data to an engineering data analysis subscriber includes providing the data to an online analytical processing database.

7. The method as in claim 1, wherein the data includes metrology data.

8. The method as in claim 1, wherein the data includes operating information associated with semiconductor processing equipment.

9. The method as in claim 1, wherein distributing the data to a statistical process control subscriber and distributing the data to an engineering data analysis subscriber are controlled by a data broker prior to the data being stored in a database for access by the statistical process control subscriber and the engineering data subscriber.

31. The method of claim 1, wherein receiving includes receiving the data at a data broker, wherein the data broker is not a data base for storing the data.

10. A data distribution system comprising:

an equipment interface to obtain data from a manufacturing apparatus, the data associated with a semiconductor manufacturing process; and

a data broker to;

receive the data from the equipment interface; and

to distribute the data to a plurality of subscribers without being queried by the plurality of subscribers after receiving the data.

11. The data distribution system as in claim 10, wherein said plurality of subscribers includes an engineering data analysis system.

12. The data distribution system as in claim 10, wherein said plurality of subscribers includes a statistical process control system.

13. The data distribution system as in claim 10, wherein said plurality of subscribers includes a data history subscriber.

14. The data distribution system as in claim 10, wherein at least one of said plurality of subscribers includes a database.

15. The data distribution system as in claim 10, wherein said manufacturing apparatus includes semiconductor metrology equipment.

16. The data distribution system as in claim 10, wherein said manufacturing apparatus includes semiconductor processing equipment.

17. A method comprising:

receiving data associated with a semiconductor process; and

distributing the data to a plurality of subscribers using a data broker, wherein the data broker is for distributing data without being queried by a subscriber of the plurality of subscribers after receiving the data and not for storing the data for subsequent access.

18. The method as in claim 17, wherein distributing is performed in real-time response to the data being received.

19. The method as in claim 17, wherein the plurality of subscribers includes an engineering data analysis system.

20. The method as in claim 17, wherein the plurality of subscribers includes a statistical process control system.

21. The method as in claim 17, wherein the plurality of subscribers includes a data history subscriber.

22. The method as in claim 17, wherein the data associated with a semiconductor process includes data from metrology equipment.

23. The method as in claim 17, wherein the data associated with a semiconductor process includes data from semiconductor processing equipment.

24. A computer readable medium tangibly embodying a program of instructions, said program of instructions including instructions to:

receive data associated with a semiconductor process; and

distribute the data to a plurality of subscribers using a data broker, wherein the data broker is for distributing data without being queried by a subscriber of the plurality of subscribers after receiving the data and not for storing the data for subsequent access.

25. The computer readable medium as in claim 24, wherein the instructions to distribute are performed in real-time response to the data being received.

26. The computer readable medium as in claim 24, wherein the plurality of subscribers includes an engineering data analysis system.

27. The computer readable medium as in claim 24, wherein the plurality of subscribers includes a statistical process control system.

28. The computer readable medium as in claim 24, wherein the plurality of subscribers includes a data history subscriber.

29. The computer readable medium as in claim 24, wherein the data associated with a semiconductor process includes data from metrology equipment.

30. The computer readable medium as in claim 24, wherein the data associated with a semiconductor process includes data from semiconductor processing equipment.

32. A method comprising:

receiving at a data broker a first request from a first system to be a first subscriber for a data;

receiving at the data broker a second request from a second system to be a second subscriber for the data;

receiving a first portion of the data at the data broker; and

providing the first portion of the data to each subscriber in response to receiving the first portion of the data without being queried by individual data subscribers, wherein each subscriber includes the first subscriber and the second subscriber.

33. The method of claim 32 further comprising:

receiving at the data broker a third request from the first system to no longer be the data subscriber for the data;

receiving a second portion of the data at the data broker;

providing the second portion of the data to each subscriber in response to receiving the second portion of the data without being queried by individual data subscribers, wherein the first system is no longer a subscriber.