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Method and apparatus for monitoring solid precursor delivery

  • US 6,772,072 B2
  • Filed: 07/22/2002
  • Issued: 08/03/2004
  • Est. Priority Date: 07/22/2002
  • Status: Expired due to Term
First Claim
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1. An apparatus for monitoring delivery of a solid precursor from a vessel to a process chamber via a process gas, comprising:

  • a gas analyzing means to generate a first signal indicative of a density of the precursor in the process gas; and

    a controller to receive the first signal and a second signal indicative of a volume flow rate of the process gas or a carrier gas flowing into the vessel to produce the process gas, wherein the controller is configured to calculate an amount of precursor remaining in the vessel based, at least in part, on the first and second signals.

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