Transferable device-containing layer for silicon-on-insulator applications

• US 6,774,010 B2
• Filed: 01/25/2001
• Issued: 08/10/2004
• Est. Priority Date: 01/25/2001
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: International Business Machines Corporation
• Inventors: Saenger, Katherine L., Herman, Dean A. Jr., Chu, Jack Oon, Grill, Alfred
• Primary Examiner(s): WOJCIECHOWICZ, EDWARD JOSEPH
• Application Number:
  US09/769,170
• Publication Number:
  US 20020096717A1
• Time in Patent Office: 1,293 Days
• Field of Search: 438/455, 438/458, 438/459, 257/317, 257/318, 257/319, 257/360, 257/347, 257/348, 257/349
• US Class Current: 438/458
• CPC Class Codes: H01L 21/76259 with separation/delamination along a porous layer
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688

Abstract

A method for forming an integrated circuit on an insulating substrate is described comprising the steps of forming a semiconductor layer on a seed wafer substrate containing an at least partially crystalline porous release layer, processing the semiconductor layer to form a “transferable” device layer containing at least one semiconductor device, and bonding said transferable device layer to a final, insulating substrate before or after separating said device layer from the seed wafer substrate. A second method, for separating a semiconductor layer from a seed wafer substrate, is described wherein an at least partially crystalline porous layer initially connecting the semiconductor layer and seed wafer substrate is split or broken apart by the steps of (i) introducing a fluid including water into the pores of said porous layer, and (ii) expanding said fluid by solidifying or freezing to break apart the porous layer. The at least partially crystalline porous layer may incorporate at least one porous silicon germanium alloy layer alone or in combination with at least one porous Si layer. Also described is an integrated circuit comprising the transfered device layer described above.

Claims

1. A method for forming an integrated circuit on a final substrate comprising the steps of:

selecting a first substrate including a base substrate and an at least partially crystalline porous release layer;

forming a semiconductor layer on said porous release layer on said first substrate, said semiconductor layer having a bottom surface in contact with said porous release layer and an upper surface;

forming at least one semiconductor device in said upper surface of said semiconductor layer;

bonding said upper surface of said semiconductor layer to a temporary auxiliary substrate;

detaching said semiconductor layer from said first substrate by breaking apart said porous release layer;

bonding said bottom surface of said semiconductor layer to a final substrate; and

detaching said semiconductor layer from said temporary auxiliary substrate.

2. The method of claim 1 wherein said step of bonding to said temporary auxiliary substrate includes the step of forming an adhesive layer.

3. The method of claim 1 wherein said step of bonding to said final substrate includes the step of forming an adhesive layer.

4. The method of claim 1 wherein said at least one semiconductor device is selected from the group consisting of n-type metal-oxide-semiconductor devices (NMOS), p-type MOS (PMOS) devices, complementary MOS (CMOS) devices, bipolar transistors, bipolar and CMOS (BiCMOS) devices.

5. The method of claim 1 wherein said step of forming at least one semiconductor device further includes the step of forming insulating regions extending through said semiconductor layer.

6. The method of claim 1 wherein said semiconductor layer containing at least one semiconductor device further includes additional layers containing interconnection circuitry.

7. The method of claim 1 wherein said semiconducting layer is selected from the group consisting of silicon, silicon-germanium alloys, silicon-carbon alloys, silicon-germanium alloys containing carbon;

the aforementioned materials doped with any element;

the aforementioned materials in layered or graded composition combinations;

the aforementioned materials in single crystal, polycrystalline, or nanocrystalline form.

8. The method of claim 1 wherein said semiconductor layer has a thickness in the range from 20 to 1000 nm.

9. The method of claim 1 wherein said final substrate further includes the step of forming one of passive cooling and active cooling.

10. The method of claim 1 wherein said final substrate is selected from the group consisting of single crystal silicon, diamond, quartz, crystalline oxides, crystalline or amorphous nitrides, amorphous or glassy oxides, plastics, and organic-inorganic composites.

11. The method of claim 1 wherein said final substrate comprises a base substrate with one or more overlayers selected from the group consisting of highly insulating (>

1 kΩ

-cm) single-crystal Si, highly insulating (>

1 kΩ

-cm) single-crystal silicon germanium, highly insulating (>

1 kΩ

-cm) polycrystalline Si or highly insulating (>

1 kΩ

-cm) polycrystalline silicon germanium, single crystal diamond, polycrystalline diamond;

silicon oxide;

aluminum oxide, other metal oxides, aluminum nitride, other crystalline or amorphous nitrides, and mixtures thereof.

12. The method of claim 11 wherein said base substrate is selected from the group consisting of single crystal silicon, diamond, crystalline oxides, crystalline or amorphous nitrides, amorphous or glassy oxides, plastics, and organic-inorganic composites.

13. The method of claim 1 wherein said at least partially crystalline porous layer is selected from the group consisting of at least one porous silicon germanium alloy layer (Si_1-xGe_x, where 0<

x<

1 and x may be constant or spatially variable) and at least one porous silicon germanium alloy layer in combination with porous Si.

17. The method of claim 1 wherein said step of forming at least one semiconductor device further includes the step of forming insulating regions extending through said semiconductor layer.

14. A method for forming an integrated circuit on a final substrate comprising the steps of:

forming a semiconductor layer on a first substrate, said first substrate comprising a base substrate and an at least partially crystalline porous release layer;

processing said semiconductor layer to form at least one semiconductor device;

bonding said semiconductor layer to a final substrate; and

detaching said semiconductor layer from said first substrate by breaking apart said porous release layer.

15. The method of claim 14 wherein said step of bonding to said final substrate includes the step of forming an adhesive layer.

16. The method of claim 14 wherein said at least one semiconductor device is selected from the group consisting of n-type metal-oxide-semiconductor devices (NMOS), p-type MOS (PMOS) devices, complementary MOS (CMOS) devices, bipolar transistors, bipolar and CMOS (BiCMOS) devices.

18. The method of claim 14 wherein said semiconductor layer containing at least one semiconductor device further includes additional layers containing interconnection circuitry.

19. The method of claim 14 wherein said semiconducting layer is selected from the group consisting of silicon, silicon-germanium alloys, silicon-carbon alloys, silicon-germanium alloys containing carbon;

the aforementioned materials doped with any element;

the aforementioned materials in layered or graded composition combinations;

the aforementioned materials in single crystal, polycrystalline, or nanocrystalline form.

20. The method of claim 14 wherein said semiconductor layer has a thickness in the range from 20 to 1000 nm.

21. The method of claim 14 wherein said final substrate further includes the step of forming one of passive cooling and active cooling.

22. The method of claim 14 wherein said final substrate is selected from the group consisting of single crystal silicon, diamond, quartz, crystalline oxides, crystalline or amorphous nitrides, amorphous or glassy oxides, plastics, and organic-inorganic composites.

23. The method of claim 14 wherein said final substrate comprises a base substrate with one or more overlayers selected from the group consisting of highly insulating (>

1 kΩ

-cm) single-crystal Si, highly insulating (>

1 kΩ

-cm) single-crystal silicon germanium, highly insulating (>

1 kΩ

-cm) polycrystalline Si or highly insulating (>

1 kΩ

-cm) polycrystalline silicon germanium, single crystal diamond, polycrystalline diamond;

silicon oxide;

aluminum oxide, other metal oxides, aluminum nitride, other crystalline or amorphous nitrides, and mixtures thereof.

24. The method of claim 23 wherein said base substrate is selected from the group consisting of single crystal silicon, diamond, crystalline oxides, aluminum nitride, other crystalline or amorphous nitrides, amorphous or glassy oxides, plastics, and organic-inorganic composites.

25. The method of claim 14 wherein said at least partially crystalline porous layer is selected from the group consisting of at least one porous silicon germanium alloy layer (Si_1-xGe_x, where 0<

x<

1 and x may be constant or spatially variable) and at least one porous silicon germanium alloy layer in combination with porous Si.

26. A method for forming and detaching a semiconductor device layer comprising the steps of:

forming a semiconductor layer on a first substrate, wherein said first substrate includes a base substrate and an at least partially crystalline porous release layer, and said at least partially crystalline porous release layer includes at least one porous silicon germanium alloy layer (Si_1-xGe_x, where 0<

x<

1 and x may be constant or spatially variable) alone or in combination with at least one porous Si layer; and

detaching said semiconductor layer from said first substrate by breaking apart said porous release layer.

27. A method for detaching a layer from a semiconductor substrate, said layer initially attached to said semiconductor substrate by a porous layer which is broken apart by the steps of:

introducing a fluid including water into the pores of said porous layer; and

freezing said fluid whereby said fluid expands to break apart said porous layer.

28. The method of claim 27 wherein said steps are repeated in one or more freeze-thaw cycles.

29. The method of claim 27 wherein said semiconductor substrate is a crystalline semiconductor substrate, and said porous release layer is at least partially crystalline and formed by the steps of anodic etching of said crystalline semiconductor substrate.

30. The method of claim 27 wherein said semiconductor substrate is a crystalline semiconductor substrate, and said porous release layer is at least partially crystalline and formed by the steps of through a patterned mask.