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Barrier coatings produced by atmospheric glow discharge

  • US 6,774,018 B2
  • Filed: 08/26/2002
  • Issued: 08/10/2004
  • Est. Priority Date: 02/01/1999
  • Status: Expired due to Term
First Claim
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1. A method for manufacturing a coated substrate by a process of vapor deposition and concurrent glow-discharge plasma treatment at substantially atmospheric pressure, comprising the following steps:

  • providing a first electrode and a second electrode separated by a dielectric material and facing a process space;

    applying a voltage across the electrodes;

    mixing a vaporized precursor with a plasma gas;

    diffusing the vaporized precursor and plasma gas through a porous material into the process space at substantially atmospheric pressure; and

    depositing the vaporized precursor over said substrate.

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