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Thin film bulk acoustic resonator filters with a piezoelectric layer of lead scandium tantalum oxide

  • US 6,774,746 B2
  • Filed: 04/02/2002
  • Issued: 08/10/2004
  • Est. Priority Date: 05/24/2000
  • Status: Expired due to Term
First Claim
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1. An electric filter comprising a plurality of thin film bulk acoustic resonators (FBARs) linked in a series/parallel arrangement wherein:

  • each resonator is made up of a thin piezoelectric layer made of a piezoelectric material and sandwiched between two metal electrodes, and other layers of materials;

    the thicknesses of the non-piezoelectric layers in the FBARs in the filter are varied one-from another;

    the filter has two close-in rejections, at least one of which is deeper as compared with a case where the thicknesses of respective layers in the FBARs are the same among all the FBARs; and

    the piezoelectric material is substantially lead scandium tantalum oxide.

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