Distributed bragg reflector using AIGaN/GaN

• US 6,775,314 B1
• Filed: 11/29/2001
• Issued: 08/10/2004
• Est. Priority Date: 11/29/2001
• Status: Expired due to Term

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Lee, Stephen R., Han, Jung, Waldrip, Karen E.
• Primary Examiner(s): Wong, Don
• Assistant Examiner(s): Nguyen, Tuan N.
• Application Number:
  US09/998,114
• Time in Patent Office: 985 Days
• Field of Search: 372/45, 372/50, 372/54, 372/75, 372/6, 372/39, 372/40, 372/43, 372/96, 372/9, 372/99
• US Class Current: 372/96
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: H01S 2301/173 The laser chip comprising special buffer layers, e.g. dislocation prevention or reduction
• CPC Class Codes: H01S 5/0213 Sapphire, quartz or diamond based substrates
• CPC Class Codes: H01S 5/18361 Structure of the reflectors, e.g. hybrid mirrors
• CPC Class Codes: H01S 5/3201 incorporating bulkstrain effects, e.g. strain compensation, strain related to polarisation
• CPC Class Codes: H01S 5/32341 blue laser based on GaN or GaP

Abstract

A supported distributed Bragg reflector or superlattice structure formed from a substrate, a nucleation layer deposited on the substrate, and an interlayer deposited on the nucleation layer, followed by deposition of (Al,Ga,B)N layers or multiple pairs of (Al,Ga,B)N/(Al,Ga,B)N layers, where the interlayer is a material selected from AlN, Al_xGa_1-xN, and AlBN with a thickness of approximately 20 to 1000 angstroms. The interlayer functions to reduce or eliminate the initial tensile growth stress, thereby reducing cracking in the structure. Multiple interlayers utilized in an AlGaN/GaN DBR structure can eliminate cracking and produce a structure with a reflectivity value greater than 0.99.

Claims

1. A supported distributed Bragg reflector, comprising:

a substrate;

a nucleation layer deposited on said substrate, said nucleation layer being of sufficient thickness to promote contiguous growth of subsequent deposited layers;

an interlayer deposited on said nucleation layer, said interlayer controlling mismatch-induced stress and suppressing formation of cracks and said interlayer comprising a material selected from AlN, Al_yGa_1-yN, and Al_yB_1-yN, where 0<

y<

1; and

multiple pairs of (Al_wGa_xB_1-w-xN/Al_w′

Ga_x′

B<sub>1-w′

-x′</sub>

N layers, where 0≦

w≦

1,0≦

x≦

1,0≦

w′

≦

1,0≦

x′

≦

1, deposited on said interlayer, thereby forming a supported distributed Bragg reflector.

2. The supported distributed Bragg reflector of claim 1 further comprising an interlayer deposited between two of said multiple pairs of (Al_wGa_xB_1-w-xN/Al_w′

Ga_x′

B<sub>1-w′

-x′</sub>

N) layers.

3. The supported distributed Bragg reflector of claim 1 wherein said substrate comprises a material selected from sapphire, silicon, silicon carbide, lithium gallate, lithium aluminate, and lithium nitrate.

4. The supported distributed Bragg reflector of claim 1 wherein said nucleation layer comprises a GaN material.

5. The supported distributed Bragg reflector of claim 4 wherein said nucleation layer has a thickness greater than approximately 0.5 microns.

6. The supported distributed Bragg reflector of claim 1 wherein said interlayer has a thickness greater than approximately 20 Angstroms and less than approximately 1000 Angstroms.

7. The supported distributed Bragg reflector of claim 1 wherein said pairs of (Al_wGa_xB_1-w-xN/Al_w′

Ga_x′

B<sub>1-w′

-x′</sub>

N) layers comprise layers each with a Al_wGa_xB_1-w-xN layer with a thickness of greater than approximately 20 Angstroms and less than approximately 1000 Angstroms and a Al_w′

Ga_x′

B<sub>1-w′

-x′</sub>

N layer of greater than approximately 20 Angstroms and less than approximately 1000 Angstroms.

8. The supported distributed Bragg reflector of claim 1 wherein said interlayer material further comprises a dopant, said dopant selected from less than approximately 1% by weight of calcium, zinc, silicon, magnesium, carbon, bismuth, oxygen, antimony, and indium.

9. The supported distributed Bragg reflector of claim 1 wherein said pairs of (Al_wGa_xB_1-w-xN/Al_w′

Ga_x′

B<sub>1-w′

-x′</sub>

N) layers comprise Al_yGa_1-yN/GaN layers, where 0<

y<

1.

10. The supported distributed Bragg reflector of claim 9 wherein said multiple pairs of Al_yGa_1-yN/GaN layers number more than 50 pairs and less than 70 pairs, wherein at least one additional interlayer is interspersed between said multiple pairs of Al_yGa_1-yN/GaN layers.

11.The supported distributed Bragg reflector of claim 10 wherein the distributed Bragg reflector has a reflectivity value greater than 0.99.

11. The supported distributed Bragg reflector of claim 1 wherein said interlayer results in an Initial compressive growth stress.

12. A supported distributed Bragg reflector, comprising:

a substrate;

a GaN nucleation layer deposited on said substrate, said GaN nucleation layer having a thickness greater than approximately 0.5 microns;

a first interlayer deposited on said nucleation layer, said first interlayer controlling mismatch-induced stress and suppressing formation of cracks and comprising a material selected from, AlN, Al_xGa_1-xN, and Al_xB_1-xN, where 0<

x<

1;

at least five pairs of Al_yGa_1-yN/GaN layers, where 0<

y<

1, deposited on said interlayer;

a second Interlayer deposited on said Al_yGa_1-yN/GaN layers, said second interlayer controlling mismatch-induced stress and suppressing formation of cracks and composing a material selected from AlN, Al_xGa_1-xN, and Al_xB_1-xN, where 0<

x<

1; and

multiple pairs of (Al_wGa_xB_1-w-xN/Al_w′

Ga_x′

B<sub>1-w′

-x′</sub>

N) layers, where 0≦

w≦

1,0≦

x≦

1,0≦

w′

≦

1,0≦

x′

≦

1, deposited on said interlayer, thereby forming a supported distributed Bragg reflector.

13. A supported semiconductor lattice structure, comprising:

a substrate, said substrate comprising a material selected from sapphire, silicon, silicon carbide, lithium gallate, lithium aluminate, and lithium nitrate;

a nucleation layer deposited on said substrate, said nucleation layer being of sufficient thickness to promote continuous growth of subsequent deposited layers;

an interlayer deposited on said nucleation layer, said interlayer controlling mismatch-induced stress and suppress formation of cracks and comprising a material selected from an Al_wGa_xB_1-w-xN material, where 0≦

w≦

1,0≦

x≦

1, said interlayer having a thickness greater than approximately 20 Angstroms and less than approximately 1000 Angstroms; and

a layer of Al_w′

Ga_x′

B<sub>1-w′

-x′</sub>

N, where 0≦

w′

≦

1,0≦

x≦

x′

≦

1, material deposited on said interlayer.