Software system and method for graphically building customized recipe flowcharts

• US 6,775,819 B1
• Filed: 09/10/1999
• Issued: 08/10/2004
• Est. Priority Date: 10/27/1997
• Status: Expired due to Fees

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Kulkarni, Ashok, Zhou, Steve, Hardikar, Manoj, Shiflett, Richard
• Primary Examiner(s): Sough, Hyung
• Assistant Examiner(s): CHARLES, DEBRA F
• Application Number:
  US09/394,388
• Time in Patent Office: 1,796 Days
• Field of Search: 30/36, 30/72, 73/310.6, 73/310.5, 760/777, 382/155, 382/160, 382/156, 714/1, 714/47, 714/48, 702/81, 702/82, 702/83, 702/84, 702/181, 717/105
• US Class Current: 717/105
• CPC Class Codes: G06F 40/56 Natural language generation
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling

Abstract

A software system and method is disclosed for creating analytical graphics such as bar charts and the like with greater flexibility in an object-oriented Window® environment. The software is particularly applicable to analyzing production data in semiconductor quality control. The user customizes the analytical tools by selecting production parameters from a dialog box, and creates flowcharts on the computer display representing the sequence of production variables and production functions previously selected. The software is set up with a macro recording function to remember the production keystrokes previously selected. The analytical sequence represented by the flowchart is automatically executed whenever it is selected by the user, or this sequence can be preprogrammed to run at specified intervals in the future. Thus, the user can automatically generate reports of production data on a regular basis to a particular output device, such as a printer, server, or computer screen, or alert an operator by e-mail or paging systems.

Claims

1. A software method for analyzing production data on a computer, comprising the steps of:

selecting one or more production variables from dialog boxes;

selecting one or more production functions from said dialog boxes;

recording said one or more production variables and said one or more production functions in a macro to allow for repeated use;

displaying a first graphical analytic representation of said one or more production variables and said one or more production functions in a display window;

executing said first graphical analytic representation;

changing one or more of said production functions or variables to modify said first graphical analytic representation;

redisplaying said modified graphical analytic representation as a new graphical analytic representation; and

reexecuting said new graphical analytical representation.

2. The software method of analyzing production data of claim 1, wherein:

said step of selecting one or more production variables selects said production variables from a group consisting of lot number, layer number, and dates of production; and

said step of selecting one or more production functions selects said production functions from a group consisting of number, mean, and standard deviation of defects.

3. The software method of analyzing production data of claim 2, further comprising:

alerting an inspector upon detecting that analytical results exceed a predetermined value.

4. The software method of analyzing production data of claim 3, wherein:

said step of selecting one or more production variables selects a set of dates from a calendar display.

5. The software method of analyzing production data of claim 4, wherein:

said step of displaying a first graphical analytical representation displays a flowchart of said production variables and production functions.

6. A software method for creating executable flowcharts on a computer, comprising the steps of:

selecting one or more production variables from dialog boxes in a user-defined sequence;

selecting one or more production functions from said dialog boxes in said user-defined sequence;

recording said user-defined sequence of said production variables and said production functions by using a macro;

displaying said user-defined sequence as a series of linked analytical steps in a flowchart;

automatically executing said series of linked analytical steps by selecting said flowchart;

changing said user-defined sequence;

redisplaying said changed user-defined sequence as a new flowchart;

reexecuting said new flowchart,

specifying that said series of linked analytical steps are to be performed at one or more predetermined future dates; and

publishing automated reports at said one or more predetermined future dates at one or more locations.

7. The software method of claim 6, wherein:

said locations include a printer station, a web server or a computer screen.

8. A software system for analyzing production data of semiconductor wafers on a computer, comprising:

dialog boxes for selecting one or more production variables and one or more production functions;

said production variables being selected from a group consisting of wafer lot number, layer number, and dates of production;

said production functions being selected from a group consisting of number of defects and standard deviation of defects;

a macro for recording said one or more production variables and said one or more production functions;

a first analytical graphic in a display window for representing said one or more production variables and said one or more production functions to establish patterns of production defects in said semiconductor wafers, said macro being modifiable into a new macro, and

a second analytical graphic in said display window for representing said one or more production variables and said one or more production functions of said new macro.

9. The software system of claim 8, wherein:

said first and second analytical graphics are color-coded.

10. The software system of claim 9, wherein:

said dialog boxes include at least one drop down list box having

a vertical scroll bar with a scroll arrow in a scroll box; and

a rectangle with a scrollable columnar list of a plurality of text strings representing said production variables and said production functions.

11. The software system of claim 10, wherein:

said production variables are a set of dates selected from a calendar display.

12. A software system for creating executable flowcharts for analyzing production data of semiconductor wafers, comprising:

dialog boxes for selecting one or more production variables and one or more production functions in a user-defined sequence; and

a flowchart, which represents a series of linked analytical steps of said user-defined sequence, which is displayed in a window and which when selected is executed to provide analytical data of semiconductor wafer production quality;

said user-defined sequence being modifiable into a new flowchart, said new flowchart being redisplayed and reexecuted.

13. The software system of claim 12, wherein:

said user-defined sequence is a macro recording of said production variables and production functions to allow for automatic re-execution of said software system.

14. The software system of claim 13, wherein:

said series of linked analytical steps are performed at one or more predetermined future dates and published as automated reports at one or more locations including a printer station, a web server, or a computer screen.

15. A software method for analyzing production data of semiconductor wafers, comprising the steps of:

selecting one or more production variables from a first dialog box;

selecting one or more production functions from a second dialog box; and

displaying an analytic representation of said one or more production variables and said one or more production functions in a display window, said analytical representation being in the form of a flowchart of established patterns of production defects in said semiconductor wafers;

changing one or more of said production functions or variables to modify said analytic representation; and

redisplaying said modified analytic representation as a new analytic representation.

16. A software system for analyzing production data on a computer, comprising:

means for selecting one or more production variables and one or more production functions;

means for macro recording said production variables and production functions to allow for automatic re-execution;

flowchart means for representing said production variables and production functions; and

means for executing said flowchart means to produce a graphical representation of said production variables and production functions;

said macro recording being modifiable into a new flowchart means, said new flowchart means being reexecuted.