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Pressure sensor with foresighted maintenance control and monitoring for diaphragm fracture and to a method for monitoring for diaphragm fracture

  • US 6,776,046 B2
  • Filed: 07/11/2002
  • Issued: 08/17/2004
  • Est. Priority Date: 07/11/2001
  • Status: Active Grant
First Claim
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1. A pressure-measuring device, comprising:

  • a housing having a passage defining a first opening and a second opening;

    a metal diaphragm exposed to a measuring medium and situated to close off said first opening;

    a deformation body situated to close off said second opening;

    transmission liquid situated between said metal diaphragm and said deformation body for communicating pressure at said metal diaphragm to said deformation body;

    a capacitive pressure sensor situated in said housing which produces a measuring signal based upon a deflection of said deformation; and

    means for monitoring a material property of said transmission liquid, said means for monitoring being means for monitoring the relative dielectric constant ε

    r of said transmission liquid and being adapted to produce a signal indicating fracture of said metal diaphragm if said material property changes beyond a tolerance value.

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