Pendulum valve assembly

• US 6,776,394 B2
• Filed: 12/30/2002
• Issued: 08/17/2004
• Est. Priority Date: 12/30/2002
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Lucas, Paul D.
• Primary Examiner(s): Bastianelli, John
• Application Number:
  US10/334,088
• Publication Number:
  US 20040124392A1
• Time in Patent Office: 596 Days
• Field of Search: 251/301, 251/259, 251/257, 251/203, 251/204, 251/129.11, 251/228
• US Class Current: 251/259
• CPC Class Codes: F16K 3/10 with special arrangements for separating the sealing faces or for pressing them together
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A valve assembly including a housing having an opening defined by a valve seat, a valve body movable within the housing between a completely opened position disengaged from the valve seat and a completely closed position engaging the valve seat, and a sleeve movable longitudinally along, and rotatably about, a longitudinal axis. The sleeve is connected to the valve body so that the valve body can rotate and move longitudinally with the sleeve. One of the housing and the sleeve includes a cam surface, and the other of the housing and the sleeve includes a cam follower received by the cam surface. A rotatable shaft is in threaded engagement with the sleeve so that rotation of the shaft causes at least one of rotation and longitudinal movement of the sleeve against the cam follower.

Claims

1. A valve assembly comprising:

a housing including an interior space and an opening through which fluid can enter and exit the interior space;

a valve body movable within the interior space of the housing between a completely opened position allowing fluid flow through the opening and a completely closed position preventing fluid flow through the opening;

a sleeve movable longitudinally along, and rotatably about, a longitudinal axis, and wherein the sleeve is connected to the valve body so that the valve body can rotate with the sleeve about the longitudinal axis between the completely open position and an intermediate position where the valve body is substantially aligned with the opening but spaced longitudinally from the opening, and so that the valve body can move longitudinally with the sleeve between the intermediate position and the completely closed position, and wherein one of the housing and the sleeve includes a cam surface and the other of the housing and the sleeve includes a cam follower received by the cam surface for moving along and being guided by the cam surface; and

a shaft extending along, and rotatable about the longitudinal axis of the sleeve, wherein the shaft is in screw-threaded engagement with the sleeve so that rotation of the shaft causes at least one of rotation and longitudinal movement of the sleeve against the cam follower.

2. A valve assembly according to claim 1, wherein the cam sleeve is provided with internal threads and the shaft is provided with external threads.

3. A valve assembly according to claim 1, the cam follower is secured to the housing in a position fixed with respect to the movable sleeve, and the cam surface is provided in an outer side surface of the sleeve.

4. A valve assembly according to claim 3, wherein the cam surface includes a first portion, a second portion, and a transitional portion connecting the first and the second portions.

5. A valve assembly according to claim 4, wherein the first portion of the cam surface extends laterally with respect to the longitudinal axis.

6. A valve assembly according to claim 4, wherein the second portion of the cam surface extends longitudinally with respect to the longitudinal axis.

7. A valve assembly according to claim 1, further including a motor coupled to the shaft for rotating the shaft.

8. A valve assembly according to claim 7, wherein the motor is coupled to the shaft through a gear mechanism.

9. A valve assembly according to claim 8, wherein the motor includes a drive shaft, and the gear mechanism includes a gear fixed to the motor drive shaft and a gear fixed to the shaft.

10. A valve assembly according to claim 1, wherein the valve body comprises a disk.

11. A valve assembly according to claim 10, wherein the disk has an O-ring for sealing engagement with the interior of the housing around the opening.

12. A valve assembly according to claim 1, wherein the housing further includes a valve seat disposed in the interior space of the housing around an edge of the opening for receiving the valve body in the completely closed position.

13. A valve assembly according to claim 1, further comprising spring loaded pistons arranged to bias the valve body longitudinally against the first opening when the valve body is substantially moved to the fully closed position.

14. A valve assembly according to claim 1, further comprising a second opening in the housing and a second valve body movable within the housing between a completely opened position allowing fluid to pass through the second opening and a completely closed position wherein fluid can not pass through the second opening.

15. A valve assembly according to claim 14, further comprising an annular cover movable between a covered position wherein the cover protects a valve seat of the second opening and an uncovered position wherein the cover is spaced from the second opening so the second valve body can engage the valve seat of the second opening.

16. A system used to perform thin film coating processes, including the valve assembly of claim 1, and further comprising a vacuum pump connected to a process chamber through the valve assembly.

17. A valve assembly according to claim 1, wherein the cam sleeve is connected to the valve body through a pivot arm.

18. A valve assembly according to claim 17, wherein the pivot arm extends normal to the axis of the sleeve.

19. A valve assembly according to claim 1, wherein the opening is oriented such that an axis of the opening extends parallel with the axis of the cam sleeve.

20. A valve assembly according to claim 1, wherein the cam sleeve is provided with internal threads and the shaft is provided with external threads and the external threads are in direct contact with the internal threads.

21. A valve assembly according to claim 1, wherein the shaft is longitudinally fixed.

22. A valve assembly according to claim 1, wherein the cam surface is generally L-shaped.

23. A valve assembly according to claim 4, wherein the transitional portion of the cam surface extends longitudinally and laterally with respect to the longitudinal axis of the sleeve.

24. A valve assembly according to claim 4, wherein the transitional portion of the cam surface is curved.