Latching micro magnetic relay packages and methods of packaging
First Claim
1. A sealed package including a MEMS device comprising:
- a supporting substrate with a surface;
at least one contact for the MEMS device on the surface of the supporting substrate with an external connection to the contact and a cantilever on the surface of the supporting substrate, the cantilever being positioned to come into electrical engagement with the contact in one orientation;
a substrate metal seal ring fixed on the surface of the supporting substrate circumferentially around the contact and the cantilever, the substrate metal seal ring comprising an adhesion portion including at least one metal layer selected to adhere to the substrate and a sealing portion including at least one metal layer selected as a junction material;
a cap member with a cavity and a continuous edge circumferentially around the cavity, the cavity being designed to receive the cantilever and contact therein with the continuous edge in mating engagement with the metal seal ring on the surface of the supporting substrate;
a cap metal seal ring fixed on the continuous edge of the cap member, the cap metal seal ring comprising an adhesion portion including at least one metal layer selected to adhere to the cap member and a sealing portion including at least one metal layer selected as a junction material; and
the junction material of the cap metal seal ring on the continuous edge of the cap member sealingly engaged with the junction material of the substrate metal seal ring on the surface of the supporting substrate.
2 Assignments
0 Petitions
Accused Products
Abstract
A method of forming a hermetically sealed MEMS package includes a step of providing a supporting GaAs substrate with at least one contact for the MEMS device on the surface of the supporting substrate and forming a cantilever on the surface of the supporting substrate positioned to come into electrical engagement with the contact in one orientation. A metal seal ring is fixed to the surface of the supporting substrate circumferentially around the contact and the cantilever. A cavity is etched in a silicon chip to form a cap member. A metal seal ring is fixed to the cap member around the cavity. The package is hermetically sealed by reflowing a solder alloy, positioned between the two seal rings, in an inert environment without the use of flux.
175 Citations
8 Claims
-
1. A sealed package including a MEMS device comprising:
-
a supporting substrate with a surface;
at least one contact for the MEMS device on the surface of the supporting substrate with an external connection to the contact and a cantilever on the surface of the supporting substrate, the cantilever being positioned to come into electrical engagement with the contact in one orientation;
a substrate metal seal ring fixed on the surface of the supporting substrate circumferentially around the contact and the cantilever, the substrate metal seal ring comprising an adhesion portion including at least one metal layer selected to adhere to the substrate and a sealing portion including at least one metal layer selected as a junction material;
a cap member with a cavity and a continuous edge circumferentially around the cavity, the cavity being designed to receive the cantilever and contact therein with the continuous edge in mating engagement with the metal seal ring on the surface of the supporting substrate;
a cap metal seal ring fixed on the continuous edge of the cap member, the cap metal seal ring comprising an adhesion portion including at least one metal layer selected to adhere to the cap member and a sealing portion including at least one metal layer selected as a junction material; and
the junction material of the cap metal seal ring on the continuous edge of the cap member sealingly engaged with the junction material of the substrate metal seal ring on the surface of the supporting substrate. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A package with a MEMS device hermetically sealed in the package comprising:
-
a supporting GaAs substrate with a surface;
at least one contact for the MESS device on the surface of the supporting substrate with an external connection to the contact;
a cantilever on the surface of the supporting substrate, the cantilever being positioned to move into electrical engagement with the contact in a first orientation and out of electrical engagement with the contact in a second orientation in response to activation of the MEMS device;
a substrate metal seal ring fixed on the surface of the supporting substrate circumferentially around the contact and the cantilever, the substrate metal seal ring including an adhesion portion adhered to the surf ace of the supporting substrate and a sealing portion adhered to the adhesion portion;
a silicon chip forming a cap member and defining a cavity with a continuous edge circumferentially around the cavity, the cavity being designed to receive the cantilever and contact therein;
a cap member metal seal ring fixed on the continuous edge of the cap member, the cap member metal seal ring including an adhesion portion adhered to the surface of the continuous edge of the cap member and a sealing portion adhered to the adhesion portion;
a permanent magnet affixed to the cap member;
a solder alloy sealingly engaging the sealing portion of the cap member metal seal ring on the continuous edge of the cap member to the sealing portion of the substrate metal seal ring on the surface of the supporting substrate; and
a permaloy magnetic flux concentrator affixed to the supporting substrate in a position to cooperate with the permanent magnet to hold the cantilever in either of the first and second orientations. - View Dependent Claims (8)
-
Specification