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Surface micromachined optical system with reinforced mirror microstructure

  • US 6,778,305 B2
  • Filed: 04/08/2003
  • Issued: 08/17/2004
  • Est. Priority Date: 04/23/2001
  • Status: Expired due to Term
First Claim
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1. A surface micromachined optical system that comprises:

  • a first substrate;

    a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and

    a first actuator associated with said first mirror microstructure, wherein said first mirror microstructure comprises;

    a first structural layer that is disposed in spaced relation to said first substrate;

    a second structural layer that is disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate;

    a first fixed, structural interconnection between said first and second structural layers;

    a third structural layer that is disposed in spaced relation to said second structural layer, wherein said second structural layer is disposed between said first and third structural layers; and

    a second fixed, structural interconnection between said second and third structural layers, wherein an entirety of said first mirror microstructure moves in response to said first actuator.

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