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Micro-electro-mechanical mirror devices having a high linear mirror fill factor

  • US 6,778,728 B2
  • Filed: 02/28/2002
  • Issued: 08/17/2004
  • Est. Priority Date: 08/10/2001
  • Status: Expired due to Term
First Claim
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1. An array of movable MEMS mirror devices having a high linear mirror fill factor, comprising:

  • a base structure; and

    a plurality of selectively movable mirror structures, each being pivotally supported by a flexure connected to said base structure, and each mirror structure having a reflective surface portion, the reflective surface portions of the mirror structures being arranged in close proximity to each other and in generally linear alignment forming a row structure, with the flexures supporting adjacent mirror structures being staggered on opposite sides of said row structure.

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