Micro-electro-mechanical mirror devices having a high linear mirror fill factor
First Claim
Patent Images
1. An array of movable MEMS mirror devices having a high linear mirror fill factor, comprising:
- a base structure; and
a plurality of selectively movable mirror structures, each being pivotally supported by a flexure connected to said base structure, and each mirror structure having a reflective surface portion, the reflective surface portions of the mirror structures being arranged in close proximity to each other and in generally linear alignment forming a row structure, with the flexures supporting adjacent mirror structures being staggered on opposite sides of said row structure.
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Abstract
An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.
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Citations
134 Claims
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1. An array of movable MEMS mirror devices having a high linear mirror fill factor, comprising:
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a base structure; and
a plurality of selectively movable mirror structures, each being pivotally supported by a flexure connected to said base structure, and each mirror structure having a reflective surface portion, the reflective surface portions of the mirror structures being arranged in close proximity to each other and in generally linear alignment forming a row structure, with the flexures supporting adjacent mirror structures being staggered on opposite sides of said row structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An optical switch having movable MEMS mirror devices with a high linear mirror fill factor, comprising:
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a base structure;
a first mirror structure having a reflective surface portion, said first mirror structure pivotally supported by a first flexure connected to said base structure;
a second mirror structure having a reflective surface portion, said second mirror structure pivotally supported by a second flexure connected to said base structure;
the reflective surface portions of the first and second mirror structures being positioned in close proximity to each other, and said first and second flexures being on opposite sides of said reflective surface portions and generally in a plane of said reflective surface portions or a plane parallel thereto; and
means for selectively moving said first and second mirror structures about said first and second flexures, respectively. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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36. An array of MEMS mirror devices having a high linear mirror fill factor, comprising:
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a base structure; and
a plurality of selectively movable mirror structures each comprising a first portion having a reflective surface thereon and a second portion having an actuation coil thereon, each mirror structure being pivotally supported by a flexure positioned between said first and second portions, said flexure being connected to said base portion;
wherein the first portions of said mirror structures are generally linearly aligned forming a row structure and arranged in close proximity, and wherein the second portions and flexures for adjacent mirror structures are staggered on alternating sides of said row structure. - View Dependent Claims (37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52)
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53. An array of movable MEMS mirror devices comprising:
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a base structure; and
a plurality of selectively movable mirror structures, each being pivotally supported by a flexure connected to said base structure, and each having a reflective surface portion, wherein said reflective surface portions are generally linearly aligned and arranged in close proximity with a linear mirror fill factor of at least about 70%. - View Dependent Claims (54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65)
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66. An array of movable MEMS mirror devices, comprising:
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a base structure;
a plurality of selectively movable mirror structures, each including a reflective surface portion; and
means for pivotally supporting said mirror structures such that the reflective surface portions of the mirror structures are generally linearly aligned and positioned in sufficiently close proximity such that the array has a linear mirror fill factor of at least about 70%. - View Dependent Claims (67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77)
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78. A method of selectively switching optical signals between input and output optical fibers, comprising:
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providing an optical switch having an array of selectively movable MEMS mirror devices, each having a reflective surface portion, the reflective surface portions of the mirror devices being generally linearly aligned and arranged in close proximity to each other such that the array has a linear mirror fill factor of at least about 70%; and
selectively actuating mirror devices to deflect optical signals from input fibers to desired output fibers. - View Dependent Claims (79, 80, 81)
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82. An array of movable MEMS devices having a high linear mirror fill factor, comprising:
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a base structure; and
a plurality of selectively movable structures, each being pivotally supported by a flexure connected to said base structure, and each structure having an exposed surface portion, the exposed surface portions of the structures being arranged in close proximity to each other and in generally linear alignment forming a row structure, with the flexures supporting adjacent structures being staggered on opposite sides of said row structure. - View Dependent Claims (83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99)
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- 100. An array of movable MEMS mirror devices having a high linear mirror fill factor, comprising a plurality of selectively movable mirror structures, each mirror structure being pivotally supported by a flexure and having a reflective surface portion, the reflective surface portions of the mirror structures being arranged in close proximity to each other and in generally linear alignment forming a row structure, with the flexures supporting adjacent mirror structures being staggered on opposite sides of said row structure.
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117. A method of selectively switching optical signals between input and output optical fibers, comprising:
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providing an optical switch having an array of selectively movable MEMS mirror devices comprising a base structure and a plurality of selectively movable mirror structures, each mirror structure being pivotally supported by a flexure connected to said base structure, and each mirror structure having a reflective surface portion, the reflective surface portions of the mirror structures being arranged in close proximity to each other and in generally linear alignment forming a row structure, with the flexures supporting adjacent mirror structures being staggered on opposite sides of said row structure; and
selectively actuating mirror devices to deflect optical signals from input fibers to desired output fibers. - View Dependent Claims (118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133, 134)
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Specification