Method and apparatus for self-assembly of functional blocks on a substrate facilitated by electrode pairs

• US 6,780,696 B1
• Filed: 09/17/2001
• Issued: 08/24/2004
• Est. Priority Date: 09/12/2000
• Status: Expired due to Term

• Current Assignee: RUIZHANG TECHNOLOGY LIMITED COMPANY
• Original Assignee: Alien Technology Corporation
• Inventors: Schatz, Kenneth David
• Primary Examiner(s): Nelms, David
• Assistant Examiner(s): TRAN, MAI HUONG C
• Application Number:
  US09/953,639
• Time in Patent Office: 1,072 Days
• Field of Search: 428/209, 257/688, 257/690, 257/702, 257/724, 257/725, 257/781
• US Class Current: 438/216
• CPC Class Codes: H01L 2224/83894 Direct bonding, i.e. joining surfaces by means of intermolecular attracting interactions at their interfaces, e.g. covalent bonds, van der Waals forces
• CPC Class Codes: H01L 2224/95085 being a liquid, e.g. for fluidic self-assembly
• CPC Class Codes: H01L 2224/95122 by applying vibration
• CPC Class Codes: H01L 2224/95136 involving guiding structures, e.g. shape matching, spacers or supporting members
• CPC Class Codes: H01L 2224/95144 Magnetic alignment, i.e. using permanent magnetic parts in the semiconductor or solid-state body
• CPC Class Codes: H01L 2224/95145 Electrostatic alignment, i.e. polarity alignment with Coulomb charges
• CPC Class Codes: H01L 24/95 at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
• CPC Class Codes: H01L 25/50 Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00 H01L21/50 takes precedence
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/01005 Boron [B]
• CPC Class Codes: H01L 2924/01013 Aluminum [Al]
• CPC Class Codes: H01L 2924/01015 Phosphorus [P]
• CPC Class Codes: H01L 2924/01019 Potassium [K]
• CPC Class Codes: H01L 2924/01023 Vanadium [V]
• CPC Class Codes: H01L 2924/01027 Cobalt [Co]
• CPC Class Codes: H01L 2924/01033 Arsenic [As]
• CPC Class Codes: H01L 2924/01039 Yttrium [Y]
• CPC Class Codes: H01L 2924/01078 Platinum [Pt]
• CPC Class Codes: H01L 2924/09701 Low temperature co-fired ceramic [LTCC]
• CPC Class Codes: H01L 2924/10158 at the passive surface
• CPC Class Codes: H01L 2924/12041 : LED
• CPC Class Codes: H01L 2924/12042 : LASER
• CPC Class Codes: H01L 2924/12044 : OLED
• CPC Class Codes: H01L 2924/14 : Integrated circuits
• CPC Class Codes: H01L 2924/15153 : the die mounting substrate comprising a recess for hosting the device
• CPC Class Codes: H01L 2924/15165 : Monolayer substrate
• CPC Class Codes: H01L 2924/15787 : Ceramics, e.g. crystalline carbides, nitrides or oxides
• CPC Class Codes: H01L 2924/19041 : being a capacitor
• CPC Class Codes: H01L 2924/30105 : Capacitance
• CPC Class Codes: Y10T 428/24917 : including metal layer

Abstract

Methods for fabricating an assembly having functional blocks coupling to a substrate. The method includes providing the substrate with receptor sites wherein each of the receptor sites is designed to couple to one of the functional blocks. Electrodes are coupled to the substrate. The electrodes cover the receptor sites such that portions of the receptor sites are coated with the electrodes. Applying a voltage source to the electrodes using a first electrical circuit such that each electrode has a voltage different from another electrode. The electrodes form an electric field. The functional blocks having electronic devices and being in a slurry solution are dispensed over the substrate. Each functional block is fabricated out of materials having a high dielectric constant such that said functional blocks are attracted to the higher field strength regions and are guided to the receptor sites.

Claims

1. A method for fabricating an assembly having functional blocks coupling to a substrate including:

providing a substrate with a receptor sites wherein said receptor sites is designed to couple to a functional blocks;

coupling a pair of electrodes to said substrate, each of said pair of electrodes covers at least a portion of said receptor sites;

applying a voltage source to said pair of electrodes using a first electrical circuit, each electrode to have a voltage different from the other electrode, said pair of electrodes forming an electric field; and

dispensing a functional blocks in a slurry solution over said substrate said functional blocks includes an electronic device and is fabricated out of materials having a high dielectric constant capable of causing said functional blocks to be attracted to said electric field wherein said pair of electrodes and said applying a voltage source guide said functional block to said receptor site.

2. A method as in claim 1 further including:

dispensing said functional blocks in a direction of gravity.

3. A method as in claim 1 further including:

creating a fluid flow to said slurry to facilitate said dispensing.

4. A method as in claim 1 further including:

applying a pressure field to said slurry to facilitate said dispensing.

5. A method as in claim 1 further including:

applying a vibration to facilitate said dispensing.

6. A method as in claim 1 further including:

tilting said substrate at a predetermined angle to gravity to facilitate said dispensing.

7. A method as in claim 6 wherein said parallel guiding track forms a convenient pattern such that said parallel guiding track covers all of said receptor site.

8. A method as in claim 1 wherein said receptor sites is recessed and designed to mate with said functional blocks.

9. A method as in claim 1 wherein said pair of electrodes form a parallel guiding track around said receptor site.

10. A method as in claim 1 wherein said pair of electrodes form a non-parallel guiding track around said receptor site.

11. A method as in claim 1 wherein said pair of electrodes forms a curvy guiding track around said receptor site.

12. A method as in claim 1 wherein said pair of electrodes terminates at a predetermined distance from said receptor site.

13. A method as in claim 1 wherein said pair of electrodes form a funnel shape guiding track having a pre-alignment section, said pre-alignment section has a shape and orientation substantially similar to said receptor sites and said functional blocks to properly pre-align said functional blocks over said receptor site.

14. A method as in claim 13 wherein said receptor site is recessed and designed to mate with said functional blocks.

15. A method as in claim 13 wherein said applying of said voltage source to said pair of clamping electrodes uses a second electrical circuit that is different from said first electrical circuit.

16. A method as in claim 1 wherein said slurry solution has a dielectric constant lower than said high dielectric constant of said functional block.

17. A method as in claim 1 further including:

coupling a pair of clamping electrodes at each of said receptor sites; and

applying said voltage source to said pair of clamping electrodes such that each electrode has said opposite polarity to the other, said pair or clamping electrodes forming said electric field clamping each said functional blocks to each of said receptor site.

18. A method as in claim 1 further including:

coating the periphery of said functional blocks with materials have a low dielectric constant to cause said functional blocks to be guided toward said receptor sites.

19. A method as in claim 1 wherein said coupling of said pair of electrodes to said substrate is such that said pair of electrodes has a guiding axis that is in the same direction with gravity.

20. A method as in claim 1 wherein said coupling of said pair of electrodes to said substrate is such that said pair of electrodes has a guiding axis that is in the same direction with gravity at a predetermined angle to gravity.

21. A method as in claim 1 wherein said coupling of said pair of electrodes to said substrate is such that said pair of electrodes has a guiding axis that is perpendicular to gravity and wherein any one of a fluid flow, a pressure field, and a vibrational force, is used to facilitate said dispensing of said functional block.

22. A method for fabricating an assembly having functional blocks coupling to a substrate including:

providing a substrate having a receptor site wherein said receptor site is designed to couple to a functional block;

coupling strips of electrodes to said substrate, a slot separating one of said strips of electrodes from another;

applying a voltage source to said strips of electrodes using an electrical circuit to create an electric field in said slot; and

dispensing said functional blocks in over said substrate, said strips of electrodes guiding said functional block to said receptor site, each of said functional block includes an electronic device and is repelled from said electric field.

23. A method as in claim 22 wherein said functional block has a low dielectric constant region, said has low dielectric constant region causing said functional block to be repelled from said electric field.

24. A method as in claim 22 wherein a slurry solution is used for said dispensing.

25. A method for fabricating an assembly having functional blocks coupling to a substrate including:

providing a substrate having a receptor site on a first surface of said substrate wherein said receptor site is designed to couple to a functional block;

positioning said substrate relative to a pair of electrodes, said pair of electrodes is positioned such that said receptor site is affected by a an electric field from said pair of electrodes;

applying a voltage source to said pair of electrodes using an electrical circuit to cause each electrodes to have an opposite polarity from each other, said pair of electrodes forming an electric field; and

dispensing said functional block in a slurry solution over said first surface wherein said functional block includes an electronic device and is attracted to higher field regions of said electric field and are guided to said receptor site.

26. A method as in claim 25 wherein said functional block is fabricated out of a material having a high dielectric constant.

27. A method as in claim 25 further including:

coupling said pair of electrodes to said second surface.

28. A method for fabricating an assembly having functional blocks coupling to a substrate including:

providing a substrate with a receptor site wherein said receptor site is designed to couple to a functional block;

coupling a pair of electrodes to said receptor site;

applying a voltage source to said pair of electrodes sing an electrical circuit to cause each electrode to have an opposite polarity from each other, and that said pair of electrodes forms an electric field;

providing said functional block wherein each said functional block being made out of a high dielectric material, has a top surface, a bottom surface and side surface; and

dispensing said functional block in a slurry solution having an intermediate dielectric constant over said substrate wherein said top surface and said side surfaces are coated with a low dielectric constant material to cause said top surface and said side surfaces to be repelled from higher field strength regions of said electric field and said bottom surface is attracted to said higher field strength regions facilitating proper couplings of said functional block to said receptor site.

29. A method as in claim 28 wherein a predetermined distance separates each of said pair of electrodes from each other.

30. A method as in claim 29 wherein said receptor site is recessed and designed to mate with said functional block.

31. A method for fabricating an assembly having functional blocks coupling to a substrate including:

providing a substrate with receptor site located on a first surface of said substrate wherein said receptor site is designed to couple to a functional block;

providing a fixture having a pair of electrodes affixed thereupon;

positioning said substrate over said fixture with a second surface of said substrate being in contact with said fixture;

applying a voltage source to said pair of electrodes using an electrical circuit, each electrode has an opposite polarity to the other and that said pair of electrodes forms an electric field in said receptor site;

wherein said electric field penetrates said substrate and affects said functional block;

providing said functional block made out of a high dielectric constant material, has a top surface, a bottom surface, and side surface, wherein said top surface and said side surfaces are coated with a low dielectric constant material, said top surface and said side surfaces are repelled from higher field strength regions of said electric field and said bottom surface is attracted to said higher field strength regions facilitating proper couplings of said functional blocks to said receptor sites.

32. A method as in claim 31 further including dispensing said functional block in a slurry solution having an intermediate dielectric constant over said substrate.

33. A method as in claim 31 wherein said bottom surface of said functional block is further coated with another high dielectric material when said functional block is subjected to treatments that cover said function block with low dielectric constant materials.

34. A method as in claim 31 wherein said bottom surface of said functional block is further partially coated with another high dielectric material when said functional block is subjected to treatments that cover said functional block with low dielectric constant materials.

35. A method for fabricating an assembly having functional blocks coupling to a substrate including:

providing a substrate with a receptor site located on a first surface of said substrate wherein said receptor site is designed to couple to a functional block;

coupling a first electrode plate to said first surface, said first electrode plate does not completely cover said receptor site;

coupling a second electrode plate to a second surface of said substrate wherein said first electrode plate connects to said second electrode plate;

applying a voltage source to said first electrode plate and said second electrode plate, an electric field is generated in each of said receptor sites in a regions not covered by said first electrode plate;

providing a functional block being made out of a high dielectric constant material, has a top surface, a bottom surface, and said surfaces; and

dispensing said functional block in a slurry solution having an intermediate dielectric constant over said substrate wherein said top surface and said side surfaces are coated with a low dielectric constant material, said top surface and said side surfaces are repelled from higher field strength regions of said electric field and said bottom surface is attracted to said higher field strength regions facilitating proper couplings of said functional block to said receptor site.

36. A method as in claim 35 wherein said top surface and said bottom surface are coated with a low dielectric constant material such that said side surfaces, retaining said high dielectric constant, are attracted to said electric field and that said top surface and said bottom surface are repelled from said electric field facilitating said proper couplings.

37. A method for fabricating an assembly having functional blocks coupling to a substrate including:

providing a substrate with a receptor site wherein said receptor site is designed to couple to a functional block;

coupling a pair of high magnetic permeability strips to said substrate, said high magnetic pair of permeability strips covering said receptor site and providing a predetermined distance between each member of said pair of high magnetic permeability strips;

applying a magnetic field to a volume of space containing said pair or high magnetic permeability strips, a region of high magnetic field gradient is produced between each of said pair of high magnetic permeability strips; and

dispensing said functional block in a slurry solution over said substrate, said functional block, being made out of a material having a low magnetic permeability property, includes an electronic device, a top surface, a bottom surface, and side surfaces wherein said bottom surface is coupled to a high magnetic permeability layer, and said bottom surface is attracted to said region of high magnetic field gradient facilitating proper coupling of said functional block to said receptor site.

38. A method as in claim 37 wherein said slurry solution is a ferrofluid having an intermediate values of magnetic permeability property.

39. A method as in claim 37 wherein said receptor site is recessed and designed to mate with said functional block.

40. A method as in claim 37 wherein said magnetic field is an external source of magnetic field.

41. A method as in claim 37 wherein is permanent magnetic is used for said applying of said magnetic field.

42. A method as in claim 37 wherein an energized electrode magnet and a power supply are used for said applying of said magnetic field.

43. A method for fabricating an assembly having functional blocks coupling to a substrate including:

providing a substrate with a receptor site on a first surface of said substrate wherein said receptor site is designed to couple to a functional block;

positioning said substrate relative to a pair of high magnetic permeability strips wherein said pair of high magnetic permeability strips is not permanently coupled to said second surface;

applying a magnetic field source to a volume of space containing said pair of high magnetic permeability strips, a region of high magnetic field gradient is produced between each of said pair of high magnetic permeability strips; and

dispensing said functional block in a slurry solution over said first surface, said functional block, being made out of materials having a low magnetic permeability property, includes an electronic device, a top surface, a bottom surface, and side surfaces, said bottom surface is coupled to a magnetic permeability layer, and said bottom surface is attracted to said regions of high magnetic field gradient facilitating proper coupling of said functional block to said receptor site.

44. A method as in claim 43 wherein said receptor site is recessed and designed to mate with said functional block.

45. A method as in claim 43 wherein said magnetic field source is an external source of magnetic field.

46. A method as in claim 43 wherein a permanent magnet is used for said applying.

47. A method as in claim 43 wherein an energized electrode magnet and a power supply are used for said applying.