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Scratch protection for direct contact sensors

  • US 6,780,726 B2
  • Filed: 10/03/2001
  • Issued: 08/24/2004
  • Est. Priority Date: 07/26/1999
  • Status: Expired due to Term
First Claim
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1. A method of forming a scratch resistant integrated ciruit structure, comprising:

  • forming an active region;

    forming a dielectric overlying the active region; and

    forming a capacitive-electrode over the dielectric proximate to a sensing surface on which an object is selectively placed to be sensed, the capacitive electrode forming a capacitor with the object when the object is placed on the sensing surface, wherein the capacitive electrode and each conductive region between the capacitive electrode and the active region are formed of a conductive material having a hardness greater than a hardness of aluminum.

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