Non-volatile memory device having floating trap type memory cell and method of forming the same
First Claim
1. A non-volatile semiconductor memory device comprising:
- a cell gate pattern in a cell array region, a high-voltage-type gate pattern in a peripheral high-voltage region, and a low-voltage-type gate pattern in a peripheral low-voltage region on a semiconductor substrate, wherein the high-voltage-type gate pattern includes a high-voltage gate insulating layer, a first conductive layer, a triple layer, and a second conductive layer, the triple layer including a tunneling insulating layer, a charge storage layer, and a blocking insulating layer, wherein the cell gate pattern includes the triple layer and the second conductive layer, and wherein the low-voltage-type gate pattern includes a low-voltage gate insulating layer, the first conductive layer, the triple layer, and the second conductive layer.
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Abstract
A non-volatile memory device includes a cell region having a memory gate pattern with a charge storage layer, and a peripheral region having a high-voltage-type gate pattern, a low-voltage-type gate pattern, and a resistor pattern. To fabricate the above memory device, a device isolation layer is formed in a substrate. Gate insulating layers having difference thickness are formed in low-and high-voltage regions of the peripheral region, respectively. A first conductive layer is formed over substantially the entire surface of a gate insulating layer in the peripheral region. A triple layer including a tunneling insulating layer, a charge storage layer, and a blocking insulating layer and a second conductive layer are sequentially formed over substantially the entire surface of the substrate including the first conductive layer.
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Citations
27 Claims
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1. A non-volatile semiconductor memory device comprising:
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a cell gate pattern in a cell array region, a high-voltage-type gate pattern in a peripheral high-voltage region, and a low-voltage-type gate pattern in a peripheral low-voltage region on a semiconductor substrate, wherein the high-voltage-type gate pattern includes a high-voltage gate insulating layer, a first conductive layer, a triple layer, and a second conductive layer, the triple layer including a tunneling insulating layer, a charge storage layer, and a blocking insulating layer, wherein the cell gate pattern includes the triple layer and the second conductive layer, and wherein the low-voltage-type gate pattern includes a low-voltage gate insulating layer, the first conductive layer, the triple layer, and the second conductive layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
wherein the resistor pattern includes at least the first conductive layer formed on an insulating layer for electrical isolation from the substrate. -
3. The device as claimed in claim 2, wherein the insulating layer is a trench-type device isolation layer or the high-voltage gate insulating layer.
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4. The device as claimed in claim 2, further comprising a contact plug formed over the resistor pattern wherein, the resistor pattern has a contact region including the high voltage gate insulating layer and the first conductive layer and a line region including the high-voltage gate insulating layer, the first conductive layer, the triple layer, and the second conductive layer, and
wherein the contact plug formed over the resistor pattern is isolated from the second conductive layer in the contact region. -
5. The device as claimed in claim 1, wherein the cell gate pattern, the high-voltage-type gate pattern, and the low-voltage-type gate pattern have an insulating spacer on their sidewalls.
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6. The device as claimed in claim 1, wherein the second conductive layer is a dual layer comprising a lower layer of polysilicon and an upper layer of metal silicide.
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7. The device as claimed in claim 1, further comprising a butting contact concurrently connected to the first and second conductive layers in the respective low-and high-voltage-type gate patterns.
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8. The device as claimed in claim 1, wherein a top surface elevation of the triple layer is lower than a top surface elevation of a trench-type device isolation layer formed at the substrate in the cell array region, and
wherein a bottom surface elevation of the triple layer is higher than a top surface elevation of the trench-type device isolation layer in the peripheral high-and low-voltage regions. -
9. The device as claimed in claim 1, wherein the second conductive layer comprises a lower conductive layer and an upper conductive layer.
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10. The device as claimed in claim 9, wherein the lower conductive layer is a polysilicon layer, and the upper conductive layer is a dual layer comprising a lower layer of polysilicon and an upper layer of metal silicide.
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11. The device as claimed in claim 9, wherein a top surface elevation of the lower conductive layer is lower than a top surface elevation of a device isolation layer in a cell array region and in peripheral high-and low-voltage regions.
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12. A non-volatile memory device comprising a cell gate pattern of a cell array region, a high-voltage-type gate pattern of a peripheral high-voltage region, and a low-voltage-type gate pattern of a peripheral low-voltage region on a semiconductor substrate,
wherein the high-voltage-type gate pattern includes a high-voltage gate insulating layer, a first conductive layer, and a high-conductivity layer, wherein the cell gate pattern for a memory component includes a triple layer, a second conductive layer, and the high-conductivity layer, the triple layer including a tunneling insulating layer, a charge storage layer, and a blocking insulating layer, and wherein the low-voltage-type gate pattern includes a low-voltage gate insulating layer, the first conductive layer, and the high-conductivity layer.
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26. A non-volatile memory device comprising a cell gate pattern of a cell array region, a high-voltage-type gate pattern of a peripheral high-voltage region, and a low-voltage-type gate pattern and a line-type resistor pattern of a peripheral low-voltage region,
wherein the high-voltage type gate pattern includes a high-voltage gate insulating layer, the conductive layer, a triple layer, a polysilicon layer, and a metal silicide layer, the triple layer including a tunneling insulating layer, a charge storage layer, and a blocking insulating layer, wherein the cell gate pattern for a memory component includes the triple layer, the polysilicon layer, and the metal silicide layer, wherein the low-voltage-type gate pattern includes a low-voltage gate insulating layer, a conductive layer, the triple layer, the polysilicon layer, and the metal silicide layer, wherein the resistor pattern has a line region and a contact region, the line region including the high-voltage gate insulating layer, the conductive layer, the triple layer, the polysilicon layer, and the metal silicide layer, and the contact region including the high-voltage gate insulating layer, and the conductive layer, wherein in the cell array region, a top surface elevation of the triple layer is lower than a top surface elevation of a trench-type device isolation layer formed over the substrate, and wherein in the peripheral high-and low-voltage regions, a bottom surface elevation of the triple layer is higher than a top surface elevation of the trench-type device isolation layer, the device further comprising: -
an insulating spacer formed on sidewalls of the cell gate pattern, the high-voltage-type gate pattern, the low-voltage-type gate pattern, and the resistor pattern;
a butting contact concurrently connected to the conductive layer, the polysilicon layer, and the metal silicide layer in the contact region of the respective low-voltage-type gate pattern and high-voltage-type gate pattern;
a first contact plug formed on the metal silicide layer of the cell gate pattern; and
a second contact plug formed on the conductive layer of the contact region of the resist pattern, wherein the metal silicide layer and the polysilicon layer of the line regions is isolated from the contact plug.
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27. A non-volatile memory device comprising a cell gate pattern in a cell array region, a high-voltage-type gate pattern in a peripheral high voltage region, and a low-voltage-type gate pattern and a line type resistor pattern in a peripheral low voltage region,
wherein the high-voltage-type gate pattern includes a high voltage gate insulating layer, a first conductive layer, a triple layer, a polysilicon layer, a metal silicide layer, the triple layer including a tunneling insulating layer, a charge storage layer, and a blocking insulating layer, wherein the cell gate pattern includes the triple layer, a second conductive layer, the polysilicon layer, and the metal silicide layer, wherein the low-voltage-type gate pattern includes a low voltage gate insulating layer, a conductive layer, the triple layer, the polysilicon layer, and the metal silicide layer, wherein the resistor pattern has a line region and a contact region, the line region including the high-voltage gate insulating layer, the first conductive layer, the triple layer the second conductive layer, the polysilicon layer, and the metal silicide layer, and the contact region including the high-voltage gate insulating layer, and the first conductive layer, wherein in the cell gate pattern region, a top surface elevation of the triple layer is lower than a top surface elevation of a trench-type device isolation layer formed over the substrate, and wherein in the high-and low-voltage-type gate pattern regions, a top surface elevation of the trench-type device isolation layer is higher than a top surface elevation of the second conductive layer and is lower than a top surface elevation of the polysilicon layer, the device further comprising: -
an insulating spacer formed on sidewalls of the gate pattern for a memory component, the high-voltage-type gate pattern, the low-voltage-type gate pattern, and the resistor pattern;
a butting contact plug concurrently connected to the first conductive layer, the second conductive layer, the metal silicide layer, and the polysilicon layer by removal of the metal silicide layer, the polysilicon layer, the second conductive layer, and the triple layer in a part of the contact region in the respective low-and high-voltage-type gate patterns;
a first contact plug connected to the metal silicide layer of the gate pattern for a memory component; and
another contact plug formed in the contact region of the resistor pattern, the another contact plug not being in contact with the metal silicide layer, the polysilicon layer, and the second conductive layer.
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Specification