Micro-actuator with interdigitated combs perpendicular to a base
First Claim
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1. A micro-actuator comprising:
- a base plate on which a predetermined pattern of signal lines is formed;
a plurality of fixed comb-type electrodes that are arranged on the base plate and extend in a direction perpendicular to the base plate;
a stage capable of a see-saw motion that is arranged at a predetermined height from the top of the base plate;
a plurality of driving comb-type electrodes which are formed parallel to each other on the bottom of the stage and whose ends extend between the fixed comb-type electrodes;
a torsion bar with a predetermined length and thickness that is arranged at both ends of the stage forming one body with the stage in order to enable the see-saw motion of the stage, wherein the thickness of the torsion bar is less than the plurality of driving comb-type electrodes in a direction parallel to the plurality of driving comb-type electrodes;
a first frame layer connected to both ends of the torsion bar;
a second frame layer that is positioned below the first frame layer, thus forming a layered structure with the first frame layer; and
a metal eutectic bonding layer formed between the first and second frame layers to bond them together, wherein the fixed comb-type electrodes are formed on an electrode base that is arranged on the base plate, and the electrode base, the fixed comb-type electrodes and the second frame layer are formed of the same material.
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Abstract
A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers.
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Citations
7 Claims
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1. A micro-actuator comprising:
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a base plate on which a predetermined pattern of signal lines is formed;
a plurality of fixed comb-type electrodes that are arranged on the base plate and extend in a direction perpendicular to the base plate;
a stage capable of a see-saw motion that is arranged at a predetermined height from the top of the base plate;
a plurality of driving comb-type electrodes which are formed parallel to each other on the bottom of the stage and whose ends extend between the fixed comb-type electrodes;
a torsion bar with a predetermined length and thickness that is arranged at both ends of the stage forming one body with the stage in order to enable the see-saw motion of the stage, wherein the thickness of the torsion bar is less than the plurality of driving comb-type electrodes in a direction parallel to the plurality of driving comb-type electrodes;
a first frame layer connected to both ends of the torsion bar;
a second frame layer that is positioned below the first frame layer, thus forming a layered structure with the first frame layer; and
a metal eutectic bonding layer formed between the first and second frame layers to bond them together, wherein the fixed comb-type electrodes are formed on an electrode base that is arranged on the base plate, and the electrode base, the fixed comb-type electrodes and the second frame layer are formed of the same material. - View Dependent Claims (3, 4)
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5. A micro-actuator comprising:
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a base plate on which a predetermined pattern of signal lines is formed;
a plurality of fixed comb-type electrodes that are arranged on the base plate and extend in a direction perpendicular to the base plate;
a stage capable of a see-saw motion that is arranged at a predetermined height from the top of the base plate;
a plurality of driving comb-type electrodes which are formed parallel to each other on the bottom of the stage and whose ends extend between the fixed comb-type electrodes;
a torsion bar with a predetermined length and thickness that is arranged at both ends of the stage forming one body with the stage in order to enable the see-saw motion of the stage, wherein the thickness of the torsion bar is less than the plurality of driving comb-type electrodes in a direction parallel to the plurality of driving comb-type electrodes;
a first frame layer connected to both ends of the torsion bar;
a second frame layer that is positioned below the first frame layer, thus forming a layered structure with the first frame layer; and
a metal eutectic bonding layer formed between the first and second frame layers to bond them together, wherein the first frame layer, the torsion bar, the stage, and the driving comb-type electrodes form one body, the fixed comb-type electrodes are formed on an electrode base that is arranged on the base plate, and the electrode base, the fixed comb-type electrodes and the second frame layer are formed of the same material. - View Dependent Claims (2)
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6. A micro-actuator comprising:
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a base plate on which a predetermined pattern of signal lines is formed;
a plurality of fixed comb-type electrodes that are arranged on the base plate and extend in a direction perpendicular to the base plate;
a stage capable of a see-saw motion that is arranged at a predetermined height from the top of the base plate;
a plurality of driving comb-type electrodes which are formed parallel to each other on the bottom of the stage and whose ends extend between the fixed comb-type electrodes;
a torsion bar with a predetermined length and thickness that is arranged at both ends of the stage forming one body with the stage in order to enable the see-saw motion of the stage, wherein the thickness of the torsion bar is less than the plurality of driving comb-type electrodes in a direction parallel to the plurality of driving comb-type electrodes;
a first frame layer connected to both ends of the torsion bar;
a second frame layer that is positioned below the first frame layer, thus forming a layered structure with the first frame layer; and
a metal eutectic bonding layer formed between the first and second frame layers to bond them together, wherein the first frame layer has a shape of a rectangular border that surrounds the stage. a separate region of a predetermined width is located between the first frame layer and the stage, the torsion bar crosses the separate region, the fixed comb-type electrodes are formed on an electrode base that is arranged on the base plate, and the electrode base, the fixed comb-type electrodes and the second frame layer are formed of the same material. - View Dependent Claims (7)
a base plate on which a predetermined pattern of signal lines is formed;
a plurality of fixed comb-type electrodes that are arranged on the base plate and extend in a direction perpendicular to the base plate;
a stage capable of a see-saw motion that is arranged at a predetermined height from the top of the base plate;
a plurality of driving comb-type electrodes which are formed parallel to each other on the bottom of the stage and whose ends extend between the fixed comb-type electrodes;
a torsion bar with a predetermined length and thickness that is arranged at both ends of the stage forming one body with the stage in order to enable the see-saw motion of the stage, wherein the thickness of the torsion bar is less than the plurality of driving comb-type electrodes in a direction parallel to the plurality of driving comb-type electrodes;
a first frame layer connected to both ends of the torsion bar;
a second frame layer that is positioned below the first frame layer, thus forming a layered structure with the first frame layer; and
a metal eutectic bonding layer formed between the first and second frame layers to bond them together, wherein the first frame layer has a shape of a rectangular border that surrounds the stage, a separate region of a predetermined width having a shape of rectangular border is prepared between the first frame layer and the stage. the torsion bar crosses the separate region. the fixed comb-type electrodes are formed on an electrode base that is arranged on the base plate, and the electrode base, the fixed comb-type electrodes and the second frame layer are formed of the same material. 8.The micro-actuator of claim 6, wherein the front ends of the driving comb-type electrodes and the first frame layer are on a common plane.
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Specification