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Micro-actuator with interdigitated combs perpendicular to a base

  • US 6,781,279 B2
  • Filed: 06/05/2001
  • Issued: 08/24/2004
  • Est. Priority Date: 08/18/2000
  • Status: Expired due to Fees
First Claim
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1. A micro-actuator comprising:

  • a base plate on which a predetermined pattern of signal lines is formed;

    a plurality of fixed comb-type electrodes that are arranged on the base plate and extend in a direction perpendicular to the base plate;

    a stage capable of a see-saw motion that is arranged at a predetermined height from the top of the base plate;

    a plurality of driving comb-type electrodes which are formed parallel to each other on the bottom of the stage and whose ends extend between the fixed comb-type electrodes;

    a torsion bar with a predetermined length and thickness that is arranged at both ends of the stage forming one body with the stage in order to enable the see-saw motion of the stage, wherein the thickness of the torsion bar is less than the plurality of driving comb-type electrodes in a direction parallel to the plurality of driving comb-type electrodes;

    a first frame layer connected to both ends of the torsion bar;

    a second frame layer that is positioned below the first frame layer, thus forming a layered structure with the first frame layer; and

    a metal eutectic bonding layer formed between the first and second frame layers to bond them together, wherein the fixed comb-type electrodes are formed on an electrode base that is arranged on the base plate, and the electrode base, the fixed comb-type electrodes and the second frame layer are formed of the same material.

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