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Exposure apparatus and illumination apparatus

  • US 6,781,672 B2
  • Filed: 08/20/2002
  • Issued: 08/24/2004
  • Est. Priority Date: 03/08/1999
  • Status: Expired due to Fees
First Claim
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1. An exposure system comprising:

  • a master apparatus having a light source, a first exposure unit disposed in a first chamber including a first optical system through which a first illumination light directed to first and second objects passes to expose the second object with the first illumination light via the first object, a first light transmitter having a first optical path that optically connects the light source and the first optical system, and a first amplifier having an optical unit provided in the first optical path and disposed in the first chamber to amplify a light from the light source, the first illumination light being derived from the amplified light;

    a splitter provided in the first optical path; and

    at least one slave apparatus having a second exposure unit disposed in a second chamber, including a second optical system through which a second illumination light directed to first and second objects passes to expose the second object with the second illumination light via the first object, a second light transmitter having a second optical path that optically connects the splitter and the second optical system, and a second amplifier provided in the second light path to amplify the light from the light source, the second illumination light being derived from the amplified light, and the at least one slave apparatus being removable from the master apparatus.

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