Digital micromirror device and method of driving digital micromirror device
First Claim
Patent Images
1. A digital micromirror device comprising:
- a first electrode and a second electrode;
a micromirror located over said first electrode and said second electrode;
a first switching element;
a second switching element; and
a SRAM electrically connected to the first and second switching elements and including transistors distinct from the first and second switching elements, wherein;
an output of said first switching element is connected to said first electrode;
an output of said second switching element is connected to said second electrode;
an input of said SRAM is connected to said first electrode;
an output of said SRAM is connected to said second electrode; and
the voltages of the input and the output of said SRAM mutually differ.
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Abstract
A spatial light modulation device capable of displaying a large number of gray scales is provided. The inventors of the present invention proposed a spatial light modulation device having: a first structure in which a switching transistor and an erasure transistor, each having its gate electrode connected to a different scanning line, are formed in each pixel, and whose switching is controlled separately; or a second structure in which two switching transistors, each having its gate electrode connected to a different scanning line, are formed in each pixel, and whose switching is controlled separately.
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Citations
49 Claims
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1. A digital micromirror device comprising:
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a first electrode and a second electrode;
a micromirror located over said first electrode and said second electrode;
a first switching element;
a second switching element; and
a SRAM electrically connected to the first and second switching elements and including transistors distinct from the first and second switching elements, wherein;
an output of said first switching element is connected to said first electrode;
an output of said second switching element is connected to said second electrode;
an input of said SRAM is connected to said first electrode;
an output of said SRAM is connected to said second electrode; and
the voltages of the input and the output of said SRAM mutually differ. - View Dependent Claims (40, 45)
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2. A digital micromirror device comprising:
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a micromirror;
a first electrode and a second electrode for changing the inclination of the micromirror;
a first switching element;
a second switching element; and
a SRAM electrically connected to the first and second switching elements and including transistors distinct from the first and second switching elements, wherein;
an output of said first switching element is connected to said first electrode;
an output of said second switching element is connected to said second electrode;
an input of said SRAM is connected to said first electrode;
an output of said SRAM is connected to said second electrode; and
voltages of the input and the output of said SRAM mutually differ. - View Dependent Claims (6, 10, 14, 18, 22, 25, 29, 41, 46)
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3. A digital micromirror device comprising:
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a micromirror;
a first electrode and a second electrode for changing the inclination of said micromirror;
a first switching element;
a second switching element; and
a SRAM electrically connected to the first and second switching elements and including transistors distinct from the first and second switching elements, wherein;
a second voltage is imparted to said second electrode by said SRAM when a first voltage is imparted to said first electrode by said first switching element;
said first voltage is imparted to said second electrode by said SRAM when said second voltage is imparted to said first electrode by said first switching element;
said first voltage is imparted to said first electrode by said SRAM when said second voltage is imparted to said second electrode by said second switching element;
a switching of said first switching element is controlled by a first signal; and
a switching of said second switching element is controlled by a second signal. - View Dependent Claims (7, 11, 15, 19, 23, 26, 30, 42, 47)
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4. A digital micromirror device comprising:
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a micromirror;
a first electrode and a second electrode for changing the inclination of said micromirror;
a first switching element for imparting a first voltage or a second voltage to said first electrode;
a second switching element for imparting said first voltage or said second voltage to said second electrode; and
a SRAM electrically connected to the first and second switching elements and including transistors distinct from the first and second switching elements, wherein the SRAM imparts said second voltage to one of said first electrode and said second electrode, when said first voltage is imparted to the other one of electrodes, and the SRAM imparts said first voltage to one of said first electrode and said second electrode, when said second voltage is imparted to the other one of said electrodes. - View Dependent Claims (8, 12, 16, 20, 24, 27, 31, 43, 48)
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5. A digital micromirror device comprising:
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a micromirror;
a first electrode and a second electrode for changing the inclination of said micromirror;
a first switching element for imparting a first voltage or a second voltage to said first electrode;
a second switching element for imparting said first voltage or said second voltage to said second electrode; and
a SRAM electrically connected to the first and second switching elements and including transistors distinct from the first and second switching elements, wherein the SRAM imparts said second voltage to one of said first electrode and said second electrode, when said first voltage is imparted to the other one of electrodes, and the SRAM imparts said first voltage to one of said first electrode and said second electrode, when said second voltage is imparted to the other one of the electrodes;
wherein;
a switching of said first switching element is controlled by a first signal, and a switching of said second switching element is controlled by a second signal. - View Dependent Claims (9, 13, 17, 21, 28, 44, 49)
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32. A method of driving a digital micromirror device having a plurality of pixels, each pixel including:
- a micromirror;
a first electrode and a second electrode for changing the inclination of said micromirror; and
a SRAM;
said method comprising the steps of;preparing n display periods and j non-display periods within one frame period in each of said plurality of pixels;
imparting a second voltage to said second electrode by said SRAM in each of n display periods if a first voltage of a digital signal of bits corresponding to each of n display periods is imparted to said first electrode of each of said plurality of pixels;
imparting said first voltage to said second electrode by said SRAM in each of n display periods if said second voltage of the digital signal of bits corresponding to each of n display periods is imparted to said first electrode of each of said plurality of pixels;
imparting said first voltage to said first electrode by said SRAM in each of j non-display periods if said second voltage is imparted to said second electrode of each of said plurality ofpixels;
preparing any one of said n display periods again, after all of said n display periods appear;
wherein a ratio of the lengths of said n display periods is expressed as 20;
21;
. . . ;
2(n−
1).- View Dependent Claims (36)
- a micromirror;
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33. A method of driving a digital micromirror device having a plurality of pixels, each pixel including:
- a micromirror;
a first electrode and a second electrode for changing the inclination of said micromirror;
a SRAM;
a first switching element; and
a second switching element;
said method comprising the steps of;preparing n display periods and j non-display periods within one frame period in each of said plurality of pixels;
imparting a second voltage to said second electrode by said SRAM in each of n display periods if a first voltage of a digital signal of bits corresponding of each of n display periods is imparted to said first electrode of each of said plurality of pixels, in accordance with said first switching element turning on;
imparting said first voltage to said second electrode by said SRAM in each of n display periods if said second voltage of the digital signal of bits corresponding to each of n display periods is imparted to said first electrode of each of said plurality of pixels, in accordance with said first switching element turning on;
imparting said first voltage to said first electrode by said SRAM in each of j non-display periods if said second voltage is imparted to said second electrode of each of said plurality of pixels, in accordance with said second switching element turning on;
preparing any one of said n display periods again, after all of said n display periods appear;
wherein a ratio of the lengths of said n display periods is expressed as 20;
21;
. . . ;
2(n−
1).- View Dependent Claims (37)
- a micromirror;
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34. A method of driving a digital micromirror device having a plurality of pixels, each pixel including:
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a micromirror;
a first electrode and a second electrode for changing the inclination of said micromirror; and
a SRAM for imparting a second voltage to one of said first electrode and said second electrode, when a first voltage is imparted to the other one of electrodes, and imparting said first voltage to one of said first electrode and said second electrode, when said second voltage isimparted to the other one of the electrodes;
said method comprising the steps of;
preparing n first display periods and j second display periods within one frame period in each of said plurality of pixels;
imparting said first voltage or said second voltage of a digital signal of bits corresponding to each of n first display periods to said first electrode of each of said plurality of pixels in each of n first display periods;
imparting said first voltage or said second voltage of a digital signal of bits corresponding to each of j second display periods to said second electrode of each of said plurality of pixels in each of j second display periods;
preparing one of said n first display periods and one of said j second display periods again, after all of said n first display periods and j second display periods appear;
wherein a ratio of the lengths of said n first display periods and the lengths of said j second display periods is expressed as 20;
21;
. . . ;
2(n−
1).- View Dependent Claims (38)
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35. A method of driving a digital micromirror device having a plurality of pixels, each pixel including:
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a micromirror;
a first electrode and a second electrode for changing the inclination of the micromirror;
a first switching element;
a second switching element; and
a SRAM for imparting a second voltage to one of said first electrode and said second electrode, when said first voltage is imparted to the other one of electrodes, imparting said first voltage to one of said first electrode and said second electrode, when said second voltage is imparted to the other one of the electrodes;
said method comprising the steps of;
preparing n first display periods and j second display periods within one frame period in each of said plurality of pixels;
imparting said first voltage or said second voltage of a digital signal of bits corresponding to each of n first display periods to said first electrode of each of said plurality of pixels in each of n first display periods, in accordance with said first switching element turning on;
imparting said first voltage or said second voltage of a digital signal of bits corresponding to each of j second display periods to said second electrode of each of said plurality of pixels in each of j second display periods, in accordance with said second switching element turning on;
preparing any one of said n first display periods and any one of said j second display periods again, after all of said n first display periods and j second display periods appear; and
wherein a ratio of the lengths of said n first display periods and the lengths of said j second display periods is expressed as 20;
21;
. . . ;
2(n−
1).- View Dependent Claims (39)
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Specification