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Amplification of MEMS motion

  • US 6,781,744 B1
  • Filed: 06/11/2003
  • Issued: 08/24/2004
  • Est. Priority Date: 06/11/2003
  • Status: Expired due to Term
First Claim
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1. A MEMS device, comprising:

  • first and second movable plates, each supported on and positioned offset from a substrate, wherein;

    the second plate is supported by a spring attached between the second plate and a stationary post supported on the substrate;

    each of the first and second plates is adapted to move with respect to the substrate, wherein the first plate is adapted to move in response to a voltage applied between an electrode and the first plate; and

    the first and second plates are mechanically coupled together such that motion of the first plate with respect to the substrate produces motion of the second plate with respect to the substrate and with respect to the first plate.

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