Amplification of MEMS motion
First Claim
1. A MEMS device, comprising:
- first and second movable plates, each supported on and positioned offset from a substrate, wherein;
the second plate is supported by a spring attached between the second plate and a stationary post supported on the substrate;
each of the first and second plates is adapted to move with respect to the substrate, wherein the first plate is adapted to move in response to a voltage applied between an electrode and the first plate; and
the first and second plates are mechanically coupled together such that motion of the first plate with respect to the substrate produces motion of the second plate with respect to the substrate and with respect to the first plate.
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Abstract
A MEMS device having a movable mirror and a movable actuator plate mechanically coupled together such that a relatively small displacement of the plate results in mirror rotation by a relatively large angle. In a representative embodiment, the mirror and actuator plate are supported on a substrate. The actuator plate moves in response to a voltage difference applied between the plate and an electrode located on the substrate beneath that plate. One or more springs attached to the plate provide a counteracting restoring force when they are stretched from their rest positions by the plate motion. A spring attached between the actuator plate and the mirror transfers the motion of the actuator plate to the mirror such that, when the actuator plate moves toward the substrate, the mirror moves away from the substrate. A representative MEMS device of the invention configured with a mirror that is about 100 μm in length is capable of producing the mirror rotation angle of about 15 degrees using an actuator voltage of only about 50 V.
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Citations
20 Claims
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1. A MEMS device, comprising:
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first and second movable plates, each supported on and positioned offset from a substrate, wherein;
the second plate is supported by a spring attached between the second plate and a stationary post supported on the substrate;
each of the first and second plates is adapted to move with respect to the substrate, wherein the first plate is adapted to move in response to a voltage applied between an electrode and the first plate; and
the first and second plates are mechanically coupled together such that motion of the first plate with respect to the substrate produces motion of the second plate with respect to the substrate and with respect to the first plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
a rotation axis of the second plate defines first and second portions of the second plate, said portions including opposite ends of the second plate with respect to the rotation axis;
the first plate is movably connected to the first portion; and
motion of the first plate toward the substrate produces motion of the second portion in a direction away from the substrate.
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4. The device of claim 3, wherein length of the second portion is greater than length of the first portion.
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5. The device of claim 2, wherein:
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the first plate is adapted to rotate with respect to the substrate; and
rotation of the first plate by a first angle produces rotation of the second plate by a second angle whose magnitude is greater than the magnitude of the first angle.
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6. The device of claim 5, wherein, when the first plate rotates in one direction, the second plate rotates in the opposite direction.
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7. The device of claim 1, wherein:
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a first end of the first plate is movably connected to the second plate;
a second end of the first plate is connected to the substrate;
the connection between the first plate and the substrate is a flexible connection; and
displacement of the first end of the first plate corresponds to displacement of the first plate relative to the substrate.
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8. The device of claim 1, wherein:
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a first end of the first plate is movably connected to the second plate;
a second end of the first plate is connected to the substrate;
the connection between the first plate and the substrate is a rigid connection; and
displacement of the first end of the first plate corresponds to bending of the first plate.
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9. The device of claim 1, wherein:
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the second plate has a reflective surface; and
the device is configured as an optical cross-connect.
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10. The device of claim 1, wherein the device is part of an array of MEMS devices supported on the substrate.
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11. A MEMS device, comprising:
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first and second plates, each supported on and positioned offset from a substrate, wherein;
the second plate is rotatably connected to the substrate, wherein the rotatable connection defines a rotation axis of the second plate, the rotation axis defining first and second portions of the second plate, said portions including opposite ends of the second plate with respect to the rotation axis;
a first end of the first plate is movably connected to the first portion of the second plate;
a second end of the first plate is connected to the substrate; and
the connection between the first plate and the substrate is a flexible connection and displacement of the first end of the first plate corresponds to displacement of the first plate relative to the substrate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
the first plate is adapted to rotate with respect to the substrate; and
rotation of the first plate by a first angle produces rotation of the second plate by a second angle whose magnitude is greater than the magnitude of the first angle.
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20. A MEMS device, comprising:
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first and second plates, each supported on and positioned offset from a substrate, wherein;
the second plate is rotatably connected to the substrate, wherein the rotatable connection defines a rotation axis of the second plate, the rotation axis defining first and second portions of the second plate, said portions including opposite ends of the second plate with respect to the rotation axis;
a first end of the first plate is movably connected to the first portion of the second plate;
a second end of the first plate is connected to the substrate; and
the connection between the first plate and the substrate is a rigid connection and displacement of the first end of the first plate corresponds to bending of the first plate.
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Specification