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Resource consumption calculator

  • US 6,782,343 B2
  • Filed: 06/27/2001
  • Issued: 08/24/2004
  • Est. Priority Date: 02/28/2001
  • Status: Active Grant
First Claim
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1. A system for monitoring consumption of utilities by semiconductor fabrication processes, comprising:

  • at least one semiconductor process tool comprising a plurality of process-control devices for controlling process conditions within the process tool;

    at least one tool controller communicating with the plurality of process-control devices according to a process recipe for treating workpieces within the process tool; and

    computer software residing in a memory of said tool controller, the computer software configured to collect data reflecting resource consumption from the plurality of devices and to compile and store said data, wherein the computer software is configured to collect data reflecting resource consumption from the plurality of devices at a high frequency and to sum the data at a low frequency.

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