Micromechanical component

• US 6,782,749 B2
• Filed: 12/27/2002
• Issued: 08/31/2004
• Est. Priority Date: 03/16/2000
• Status: Expired due to Fees

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Pinter, Stefan
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US10/239,327
• Publication Number:
  US 20030101818A1
• Time in Patent Office: 613 Days
• Field of Search: 735/143.8, 735/143.6, 735/143.2
• US Class Current: 73/514.38
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

The invention creates a micromechanical component, in particular an acceleration sensor, having a flexible spring device (F1, F2, F3) for the spring mounting of a mass (3) over a substrate (4), the flexible spring device (F1, F2, F3) being on the one hand connected with the mass (3) and being on the other hand anchored in the substrate (4). The flexible spring device (F1, F2, F3) has at least one flexible spring element (F2, F3) whose movability in relation to the substrate (4) is capable of being modified in order to modify the effective spring constant of the flexible spring device (F1, F2, F3).

Claims

1. A micromechanical component, comprising:

a substrate;

a mass; and

a flexible spring device for a spring mounting of the mass over the substrate, the flexible spring device being connected on the one hand with the mass and on the other hand being anchored in the substrate, wherein;

the flexible spring device includes at least one flexible spring element having a movability in relation to the substrate that is capable of being modified in order to modify an effective spring constant of the flexible spring device, and

the effective spring constant is modifiable as a function of a current.

2. The micromechanical component as recited in claim 1, wherein:

the micromechanical component includes an acceleration sensor.

18. The micromechanical component as recited in claim 1, further comprising:

a first connecting web; and

a first isolatable anchoring structure provided at the first connecting web for an isolatable anchoring of the first connecting web in relation to the substrate.

19. The micromechanical component as recited in claim 18, wherein the mass is connected with a first spring element of the flexible spring device, and the first spring element is connected with an end of a second spring element of the flexible spring device.

20. The micromechanical component as recited in claim 1, further comprising:

a first connecting web; and

a first controllable anchoring structure.

21. The micromechanical component as recited in claim 20, wherein the mass is connected with a first spring element of the flexible spring device, and is connected with an end of a second spring element of the flexible spring device.

22. The micromechanical component as recited in claim 21, wherein the first controllable anchoring structure is provided at the first connecting web for a controllable anchoring of the first connecting web in relation to the substrate.

23. The micromechanical component as recited in claim 20, wherein the first controllable anchoring structure is provided at the first connecting web for a controllable anchoring of the first connecting web in relation to the substrate.

3. A micromechanical component, comprising:

a substrate;

a mass;

a flexible spring device for a spring mounting of the mass over the substrate, the flexible spring device being connected on the one hand with the mass and on the other hand being anchored in the substrate, wherein the flexible spring device includes at least one flexible spring element having a movability in relation to the substrate that is capable of being modified in order to modify an effective spring constant of the flexible spring device;

a first connecting web; and

a first isolatable anchoring structure provided at the first connecting web for an isolatable anchoring of the first connecting web in relation to the substrate, wherein the mass is connected with a first spring element of the flexible spring device that is capable of being moved in relation to the substrate, and the first spring element is connected, via the first connecting web, with an end of a second spring element of the flexible spring device.

4. The micromechanical component as recited in claim 3, wherein:

the first isolatable anchoring structure includes at least one first isolation region that is capable of being isolated through an application of an electrical current.

5. The micromechanical component as recited in claim 3, wherein:

the first isolatable anchoring structure includes two first isolation regions that are provided at two opposite sides of the first connecting web.

6. The micromechanical component as recited in claim 4, further comprising:

a second connecting web; and

a second isolatable anchoring structure provided at the second connecting web for the isolatable anchoring of the second connecting web in relation to the substrate, wherein;

the second spring element is connected, via the second connecting web, with an end of a third spring element of the flexible spring device.

7. The micromechanical component as recited in claim 6, wherein:

the second isolatable anchoring structure includes at least one second isolation region that is capable of being isolated through an application of an electrical current.

8. The micromechanical component as recited in claim 6, wherein:

the second isolatable anchoring structure includes two second isolation regions that are provided at two opposite sides of the second connecting web.

9. The micromechanical component as recited in claim 7, wherein:

at least one of the at least one first isolation region and the at least one second isolation region includes a first current line that is connected with a respective one of the first isolatable anchoring structure and the second isolatable anchoring structure, and

a second current line is connected with the flexible spring device.

10. The micromechanical component as recited in claim 7, wherein:

the at least one first isolation region and the at least one second isolation region include different first current lines, so that the at least one first isolation region and the at least one second isolation region are capable of being selectively isolated.

11. The micromechanical component as recited in claim 7, wherein:

the at least one first isolation region and the at least one second isolation region have the same first current line and have different cross-sections, so that the at least one first isolation region and the at least one second isolation region are capable of being selectively isolated.

12. A micromechanical component, comprising:

a substrate;

a mass;

a flexible spring device for a spring mounting of the mass over the substrate, the flexible spring device being connected on the one hand with the mass and on the other hand being anchored in the substrate, wherein the flexible spring device includes at least one flexible spring element having a movability in relation to the substrate that is capable of being modified in order to modify an effective spring constant of the flexible spring device;

a first connecting web; and

a first controllable anchoring structure, wherein;

the mass is connected with a first spring element of the flexible spring device that is capable of being moved in relation to the substrate, and is connected, via the first connecting web, with an end of a second spring element of the flexible spring device, and

the first controllable anchoring structure is provided at the first connecting web for a controllable anchoring of the first connecting web in relation to the substrate.

13. The micromechanical component as recited in claim 12, wherein:

the first controllable anchoring structure includes at least one first isolation region that is capable of being controlled by a generator device for one of a magnetic field and an electrical field.

14. The micromechanical component as recited in claim 13, wherein:

the first controllable anchoring structure includes two first isolation regions that are provided at two opposite sides of the first connecting web.

15. The micromechanical component as recited in claim 14, further comprising:

a second connecting web; and

a second controllable anchoring structure, wherein;

the second spring element is connected, via the second connecting web, with an end of a third spring element of the flexible spring device, and the second controllable anchoring structure is provided at the second connecting web for a controllable anchoring of the second connecting web in relation to the substrate.

16. The micromechanical component as recited in claim 15, wherein:

the second controllable anchoring structure includes at least one second isolation region that is capable of being controlled through a generator device for one of a magnetic field and an electrical field.

17. The micromechanical component as recited in claim 15, wherein:

the second controllable anchoring structure includes two second isolation regions that are provided at two opposite sides of the second connecting web.