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Systems and methods for controlling temperatures of process tools

  • US 6,783,080 B2
  • Filed: 05/16/2003
  • Issued: 08/31/2004
  • Est. Priority Date: 05/16/2002
  • Status: Expired due to Term
First Claim
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1. A method for adaptively controlling the operation of a temperature control system having both heating and cooling capabilities and different operational modes to adjust the temperature of a thermal transfer fluid supplied to a process tool, the system receiving a cooling medium of inconstant temperatures and monitoring the adjusted temperature, the method comprising the steps of:

  • establishing separate but dual proportional, integral and derivative (PID) control algorithms for the heating and cooling capabilities;

    loading in initial PID values for the operational mode that is chosen;

    operating the system in accordance with the algorithm to adjust the temperature toward a target value;

    monitoring the adjusted temperatures and its variations with time;

    increasing the integral values of both PID algorithms if the adjusted temperature oscillates and loading different bias values into the PID calculation in response to temperature variations in the cooling medium.

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