Plasma processing container internal member and production method thereof

• US 6,783,863 B2
• Filed: 08/03/2001
• Issued: 08/31/2004
• Est. Priority Date: 12/10/1999
• Status: Expired due to Term

• Current Assignee: TOCALO Co., Ltd., Tokyo Electron Limited
• Original Assignee: TOCALO Co., Ltd., Tokyo Electron Limited
• Inventors: Takeuchi, Junichi, Mitsuhashi, Kouji, Nagayama, Nobuyuki, Harada, Yoshio, Hamaguchi, Tatsuya
• Primary Examiner(s): Jones, Deborah
• Assistant Examiner(s): SAVAGE, JASON L
• Application Number:
  US09/890,251
• Publication Number:
  US 20020177001A1
• Time in Patent Office: 1,124 Days
• Field of Search: 428/469, 428/701, 428/610, 428/613, 428/623, 428/633, 428/472.2, 428/620
• US Class Current: 428/469
• CPC Class Codes: B01J 19/02 Apparatus characterised by being constructed of material selected for its chemically-resistant properties
• CPC Class Codes: B01J 2219/0218 of ceramic
• CPC Class Codes: B01J 2219/0236 Metal based
• CPC Class Codes: B01J 2219/024 Metal oxides
• CPC Class Codes: B01J 2219/0263 Ceramic
• CPC Class Codes: B01J 2219/0286 Steel
• CPC Class Codes: B01J 2219/0894 Processes carried out in the presence of a plasma
• CPC Class Codes: C09D 1/00 Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
• CPC Class Codes: C23C 4/00 Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge build-up welding B23K, e.g. B23K5/18, B23K9/04
• CPC Class Codes: C23C 4/02 Pretreatment of the material to be coated, e.g. for coating on selected surface areas
• CPC Class Codes: C23C 4/11 Oxides
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings
• CPC Class Codes: Y10T 428/12458 having composition, density, or hardness gradient
• CPC Class Codes: Y10T 428/12479 Porous [e.g., foamed, spongy, cracked, etc.]
• CPC Class Codes: Y10T 428/12549 Adjacent to each other
• CPC Class Codes: Y10T 428/12618 Plural oxides
• CPC Class Codes: Y10T 428/24999 Inorganic

Abstract

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al₂O₃ film formed on the undercoat as a middle layer and Y₂O₃ sprayed coating formed on the middle layer as a top coat.

Claims

1. An internal member for a plasma treating vessel comprising a substrate and a Y₂O₃ sprayed coating covered on a surface thereof.

2. An internal member for a plasma treating vessel according to claim 1, wherein a film having a strong resistance to halogen gas corrosion is provided as an undercoat between the substrate and the Y₂O₃ film.

3. An internal member for a plasma treating vessel according to claim 1, wherein an Al₂O₃ film is provided between the substrate and the Y₂O₃ film.

4. An internal member for a plasma treating vessel according to claim 1, wherein the Y₂O₃ has a purity of not less than 95%.

5. An internal member for a plasma treating vessel according to claim 1, wherein the Y₂O₃ has a purity of not less than 98%.

6. An internal member for a plasma treating vessel according to claim 1, wherein the Y₂O₃ sprayed coating consists essentially of Y₂O₃.

7. An internal member for a plasma treating vessel according to claim 1, wherein the Y₂O₃ sprayed coating consists of Y₂O₃.

8. An internal member for a plasma treating vessel according to claim 1, wherein the Y₂O₃ sprayed coating is a coating having a porosity of 0.5-10% and a thickness of 50-2000 μ

m.

9. An internal member for a plasma treating vessel comprising a substrate, a metal coating formed on a surface thereof as an undercoat, and a Y₂O₃ sprayed coating formed on the undercoat as a top coat.

10. An internal member for a plasma treating vessel according to claim 9, wherein the metal coating as the undercoat is a coating of one or more metals or alloys selected from Ni and an alloy thereof, W and an alloy thereof, Mo and an alloy thereof and Ti and an alloy thereof and having a thickness of 50-500 μ

m.

11. An internal member for a plasma treating vessel according to claim 9, wherein the Y₂O₃ sprayed coating is a coating having a porosity of 0.5-10% and a thickness of 50-2000 μ

m.

12. An internal member for a plasma treating vessel according to claim 9, wherein the Y₂O₃ has a purity of not less than 95%.

13. An internal member for a plasma treating vessel according to claim 9, wherein the Y₂O₃ has a purity of not less than 98%.

14. An internal member for a plasma treating vessel according to claim 9, wherein the Y₂O₃ sprayed coating consists essentially of Y₂O₃.

15. An internal member for a plasma treating vessel according to claim 9, wherein the Y₂O₃ sprayed coating consists of Y₂O₃.

16. An internal member for a plasma treating vessel comprising a substrate, a metal coating formed on a surface thereof as an undercoat, a middle layer formed on the undercoat and a Y₂O₃ sprayed coating formed on the middle layer as a top coat.

17. An internal member for a plasma treating vessel according to claim 16, wherein the metal coating as the undercoat is a coating of one or more metals or alloys selected from Ni and an alloy thereof, W and an alloy thereof, Mo and an alloy thereof and Ti and an alloy thereof and having a thickness of 50-500 μ

m.

18. An internal member for a plasma treating vessel according to claim 16, wherein the middle layer is a layer of Al₂O₃ or a mixture of Al₂O₃ and Y₂O₃.

19. An internal member for a plasma treating vessel according to claim 18, wherein the middle layer is formed by a layer having a gradient concentration such that a concentration of Al₂O₃ is high at a side of the undercoat and a concentration of Y₂O₃ is high at a side of the top coat.

20. An internal member for a plasma treating vessel according to claim 16, wherein the Y₂O₃ sprayed coating is a coating having a porosity of 0.5-10% and a thickness of 50-2000 μ

m.

21. An internal member for a plasma treating vessel according to claim 16, wherein the Y₂O₃ has a purity of not less than 95%.

22. An internal member for a plasma treating vessel according to claim 16, wherein the Y₂O₃ has a purity of not less than 98%.

23. An internal member for a plasma treating vessel according to claim 16, wherein the Y₂O₃ sprayed coating consists essentially of Y₂O₃.

24. An internal member for a plasma treating vessel according to claim 16, wherein the Y₂O₃ sprayed coating consists of Y₂O₃.

25. A method of producing an internal member for a plasma treating vessel, which comprises Y₂O₃ on a surface of a substrate through a spraying proccess to form a Y₂O₃ sprayed coating.

26. A method of producing an internal member for a plasma treating vessel according to claim 25, wherein the Y₂O₃ in the sprayed coating has a purity of not less than 95%.

27. A method of producing an internal member for a plasma treating vessel according to claim 25, wherein the Y₂O₃ in the sprayed coating has a purity of not less than 98%.

28. A method of producing an internal member for a plasma treating vessel according to claim 25, wherein the Y₂O₃ sprayed coating consists essentially of Y₂O₃.

29. A method of producing an internal member for a plasma treating vessel according to claim 25, wherein the Y₂O₃ sprayed coating consists of Y₂O₃.

30. A method of producing an internal member for a plasma treating vessel, which comprises applying at least one surface treating process selected from CVD process, PVD process and thermal spraying process to a surface of a substrate to form a composite layer composed of a layer of a metal of Ni, W, Mo or Ti or an alloy thereof as an undercoat and Y₂O₃ as a top coat.

31. A method of producing an internal member for a plasma treating vessel according to claim 30, wherein the Y₂O₃ has a purity of not less than 95%.

32. A method of producing an internal member for a plasma treating vessel according to claim 30, wherein the Y₂O₃ has a purity of not less than 98%.

33. A method of producing an internal member for a plasma treating vessel according to claim 30, wherein the Y₂O₃ consists essentially of Y₂O₃.

34. A method of producing an internal member for a plasma treating vessel according to claim 30, wherein the Y₂O₃ consists of Y₂O₃.

35. A method of producing an internal member for a plasma treating vessel, which comprises applying at least one surface treating process selected from CVD process, PVD process and thermal spraying process to a surface of a substrate to form a composite layer composed of a layer of a metal of Ni, W, Mo or Ti or an alloy thereof as an undercoat, Al₂O₃ or a mixture of Al₂O₃ and Y₂O₃ as a middle layer and Y₂O₃ as a top coat.

36. A method of producing an internal member for a plasma treating vessel according to claim 35, wherein the Y₂O₃ in the top coat has a purity of not less than 95%.

37. A method of producing an internal member for a plasma treating vessel according to claim 35, wherein the Y₂O₃ in the top coat has a purity of not less than 98%.

38. A method of producing an internal member for a plasma treating vessel according to claim 35, wherein the Y₂O₃ in the top coat consists essentially of Y₂O₃.

39. A method of producing an internal member for a plasma treating vessel according to claim 35, wherein the Y₂O₃ in the top coat consists of Y₂O₃.