MEMS tunable filters
First Claim
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1. An integrated circuit tunable filter, comprising:
- a substrate;
an input line on the substrate;
an output line on the substrate;
a plurality of tuning stubs on the substrate; and
a plurality of resonators on the substrate, wherein at least one resonator is operatively coupled to the input line and at least one resonator is operatively coupled to the output line, and at least one MEMS switch connects and disconnects at least one of the plurality of resonators to at least one of the plurality of tuning stubs to adjust the center frequency of the tunable filter.
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Abstract
A method for the design of tunable filters is disclosed. MEMS switches are used to alter the resonant frequency of one or more resonators. By tuning the resonant frequency of the resonators, the filter'"'"'s characteristics also are tuned. Furthermore, MEMS switches are used to alter the input coupling, including direct input coupling and capacitive input coupling. Direct input coupling is altered by using the MEMS switches to select different input connection points. Capacitive input coupling is altered by using MEMS switches to add additional input capacitance to an input coupling capacitor.
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Citations
34 Claims
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1. An integrated circuit tunable filter, comprising:
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a substrate;
an input line on the substrate;
an output line on the substrate;
a plurality of tuning stubs on the substrate; and
a plurality of resonators on the substrate, wherein at least one resonator is operatively coupled to the input line and at least one resonator is operatively coupled to the output line, and at least one MEMS switch connects and disconnects at least one of the plurality of resonators to at least one of the plurality of tuning stubs to adjust the center frequency of the tunable filter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An integrated circuit tunable band-pass filter, comprising:
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a substrate;
an input line on the substrate;
an output line on the substrate;
a plurality of interdigitated stripline resonators on the substrate, wherein at least one interdigitated stripline resonator is connected to the input line and at least one interdigitated stripline resonator is connected to the output line; and
a plurality of switch-capacitor groups on the substrate, wherein each switch-capacitor group includes a capacitor connected in series to a micro electro mechanical system (MEMS) switch, and each MEMS switch connects or disconnect the respective capacitor from one of the plurality of interdigitated stripline resonators. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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24. An integrated circuit tunable band-stop filter, comprising:
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a substrate;
an input line on the substrate;
an output line on the substrate;
a transmission line on the substrate, wherein the transmission line is operatively coupled to the input line and the output line;
a plurality of switch-capacitor groups on the substrate, wherein each switch-capacitor group includes a capacitor connected in series to a micro electro mechanical system (MEMS) switch, and each MEMS switch connects or disconnects the respective capacitor from the transmission line; and
a plurality of transmission line resonators on the substrate, wherein each transmission line resonator is coupled to the transmission line through one of the plurality of switch-capacitor groups. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. An integrated circuit tunable filter, comprising:
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a substrate;
an input line on the substrate;
an output line on the substrate;
a plurality of resonators on the substrate; and
a plurality of micro electro mechanical system (MEMS) switches on the substrate, wherein at least one MEMS switch alters the resonant frequency of the resonators to change the filtering characteristics of the tunable filter.
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Specification