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Switching type dual wafer stage

  • US 6,785,005 B2
  • Filed: 09/21/2001
  • Issued: 08/31/2004
  • Est. Priority Date: 09/21/2001
  • Status: Expired due to Fees
First Claim
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1. A dual wafer stage assembly, comprising:

  • a base;

    a first stage movable in a plane on said base to a series of first positions;

    a second stage movable in said plane on said base to a series of second positions, where said first positions and said second positions are coextensive;

    a plurality of interferometers mounted on said base with a corresponding plurality of moveable mirrors mounted on said first stage and said second stage wherein said interferometers, said first and said second stages, and said moveable mirrors are configured and dimensioned to allow for continuous determination of a position of each said stage at any position even where said first stage eclipses said second stage with respect to at least one of said plurality of interferometers.

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