Onboard multiphase electronic lapping guide design for MR heads
First Claim
1. An onboard electronic lapping guide for lapping a magneto-resistive head having a magneto-resistive sensor element disposed for electrical communication with a pair of sensor electrical leads, said lapping guide comprising:
- an electronic lapping guide resistive element disposed for electrical communication with said electrical leads and spaced from said sensor element in a lapping direction;
said resistive element having a predetermined height in a lapping direction; and
said resistive element being adapted to produce an electrical resistance in the presence of a lapping current that increases as said resistive element height is reduced during lapping.
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Abstract
An onboard electronic lapping guide for lapping a magneto-resistive head having a magneto-resistive sensor element disposed for electrical communication with a pair of sensor electrical leads. The lapping guide includes an electronic lapping guide resistive element disposed for electrical communication with the sensor electrical leads. The resistive element has a predetermined height in a lapping direction and is adapted to produce an electrical resistance in the presence of a lapping current that increases as said resistive element height is reduced during lapping. A lapping method and a method of forming the onboard electronic lapping guide are also disclosed.
42 Citations
30 Claims
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1. An onboard electronic lapping guide for lapping a magneto-resistive head having a magneto-resistive sensor element disposed for electrical communication with a pair of sensor electrical leads, said lapping guide comprising:
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an electronic lapping guide resistive element disposed for electrical communication with said electrical leads and spaced from said sensor element in a lapping direction;
said resistive element having a predetermined height in a lapping direction; and
said resistive element being adapted to produce an electrical resistance in the presence of a lapping current that increases as said resistive element height is reduced during lapping. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of lapping a magneto-resistive head having a magneto-resistive sensor element disposed for electrical communication with a pair of sensor electrical leads, comprising:
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forming an electronic lapping guide resistive element disposed for electrical communication with said electrical leads and spaced from said sensor element in a lapping direction;
said resistive element having a predetermined height in a lapping direction;
said resistive element being adapted to produce an electrical resistance in the presence of a lapping current that increases as said resistive element height is reduced during lapping;
passing a lapping current through said resistive element;
lapping said head while monitoring changes in said electrical resistance. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
a lapping rate is calculated while lapping said resistive element; and
said lapping rate is used to lap said sensor element.
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13. A method in accordance with claim 12 wherein there are two resistive elements providing a coarse lapping guide and a fine lapping guide, and wherein said lapping rate is determined from lapping said fine lapping guide.
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14. A method in accordance with claim 13 wherein said coarse lapping guide has a greater width and height than said fine lapping guide.
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15. A method in accordance with claim 13 wherein said coarse lapping guide is separated from said fine lapping guide by a gap and wherein said method includes a lapping clean up phase to remove smeared material after lapping said coarse lapping guide and before lapping said fine lapping guide.
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16. A method in accordance with claim 13 wherein said fine lapping guide has a height corresponding to a height of said sensor element.
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17. A method in accordance with claim 13 wherein said fine lapping guide has a width corresponding to a track width of said sensor element.
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18. A method in accordance with claim 17 wherein said sensor electrical leads are shaped to define said width of said fine lapping guide and said track width of said sensor element, and to further define a width of said coarse lapping guide that is larger than said fine lapping guide width and said sensor element track width.
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19. A method in accordance with claim 11 wherein said resistive element and said sensor element comprise identical thin film layers.
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20. A method in accordance with claim 13 wherein said fine lapping guide, said coarse lapping guide and said sensor element comprise identical thin film layers.
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21. A method of forming a magnetoresistive sensor with an onboard electronic lapping guide, comprising;
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forming a plurality of sensor layers on a substrate;
photolithographically etching said sensor layers using a track width defining mask to create a pair of etched pockets;
forming a pair of sensor electrical leads in said etched pockets, said electrical leads being spaced from each other to define a sensor track width;
photolithographically etching said sensor layers to define a sensor element using a stripe height defining mask to remove sensor material outside said mask;
said stripe height defining mask further defining a lapping guide resistive element extending between said electrical leads and spaced from said sensor element in a lapping direction;
said resistive element having a predetermined height in a lapping direction; and
said resistive element being adapted to produce an electrical resistance in the presence of a lapping current that increases as said resistive element height is reduced during lapping. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification