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Composite device and manufacturing method therefor

  • US 6,787,199 B2
  • Filed: 04/16/2003
  • Issued: 09/07/2004
  • Est. Priority Date: 11/24/2000
  • Status: Expired due to Fees
First Claim
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1. A method for manufacturing a composite device;

  • wherein a mixture film comprising a photocatalytic material and boron oxide as main components is deposited on a surface of a base by;

    placing a crucible containing a raw material for a photocatalytic material and a crucible containing boron oxide under a vacuum atmosphere in which a small amount of oxygen is introduced;

    simultaneously evaporating the raw material for the photocatalytic material and boron oxide in these crucibles to allow clusters of the materials to be emitted from the nozzles of the crucibles, respectively;

    oxidizing the cluster of the emitted raw material for the photocatalytic material with said introduced oxygen to form a cluster of the photocatalytic material;

    ionizing the clusters of the photocatalytic material and of boron oxide; and

    accelerating the ionized clusters in an electric field to collide with the surface of the base, thereby forming a mixture film.

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