Gettering agent and method to prevent corrosion in a fluid switch

• US 6,787,720 B1
• Filed: 07/31/2003
• Issued: 09/07/2004
• Est. Priority Date: 07/31/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Primary Examiner(s): Friedhofer, Michael A.
• Application Number:
  US10/632,022
• Time in Patent Office: 404 Days
• Field of Search: 200/182, 200/187-189, 200/209-219, 200/233-236, 310/328, 310/331, 310/348, 310/363, 335/4, 335/47, 335/78, 385/19
• US Class Current: 200/182
• CPC Class Codes: H01H 1/645 containing getter material for explosion inhibiting in explosion-proofcases H01H9/046; for vacuum switches H01H33/6683
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]

Abstract

Fluid-based switch and methods for reducing oxides and corrosion products within the switch are disclosed. In one method, oxides are reduced by depositing a gettering agent within the cavity, depositing a switching fluid on a first substrate, and mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states.

Claims

1. A method, comprising:

depositing a switching fluid with a surface area on a first substrate;

depositing a gettering agent on the first substrate; and

mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states.

2. The method of claim 1, wherein the gettering agent comprises a heater.

3. The method of claim 1, wherein the switching fluid comprises mercury.

4. The method of claim 3, wherein the gettering agent comprises aluminum, magnesium or titanium.

5. The switch of claim 1, wherein the switch is a liquid metal switch.

6. The switch of claim 1, wherein the switching fluid comprises mercury.

7. The switch of claim 6, wherein the gettering agent comprises aluminum, magnesium or titanium.

8. The switch of claim 7, wherein the gettering agent comprises a heater.

9. A switch comprising:

first and second mated substrates defining therebetween at, least portions of a number of cavities;

a plurality of electrodes exposed within one or more of the cavities;

a switching fluid, held within a first one of the cavities, that serves to open and close at least a pair of the plurality of electrodes in response to forces that are applied to the switching fluid;

a gettering agent exposed within one or more of the cavities;

an actuating fluid, held within one or more of the cavities, that applies the forces to said switching fluid.

10. The switch of claim 9, wherein the gettering agent may be activated with a heater.

11. The switch of claim 9, wherein the switching fluid comprises mercury.

12. The switch of claim 11, wherein the gettering agent comprises aluminum, magnesium or titanium.

13. A switch comprising:

first and second mated substrates defining therebetween at least portions of a number of cavities;

a plurality of wettable pads exposed within one or more of the cavities;

a switching fluid, wettable to said pads and held within one or more of the cavities, that serves to open and block light paths through one or more of the cavities in response to forces that are applied to the switching fluid;

a gettering agent deposited within one or more of the cavities; and

an actuating fluid, held within one or more of the cavities, that applies the forces to said switching fluid.

14. The switch according to claim 13, wherein a heater activates the gettering agent.

15. The switch according to claim 14, wherein the switching fluid comprises mercury.

16. The switch according to claim 15, wherein the gettering agent comprises aluminum, magnesium or titanium.