Method and apparatus for tool and tip design for nanomachining and measurement

• US 6,787,768 B1
• Filed: 03/07/2002
• Issued: 09/07/2004
• Est. Priority Date: 03/08/2001
• Status: Active Grant

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: LoBianco, Robert T., Kley, Victor B.
• Primary Examiner(s): Lee, John R.
• Assistant Examiner(s): Hashmi, Zia R.
• Application Number:
  US10/093,947
• Time in Patent Office: 915 Days
• Field of Search: 250/306, 250/492.2, 318/592, 318/685, 318/696, 310/317, 324/762, 216/2, 216/62, 216/83
• US Class Current: 850/59
• CPC Class Codes: G01Q 70/10 Shape or taper
• CPC Class Codes: Y10S 977/873 Tip holder
• CPC Class Codes: Y10S 977/878 Shape/taper

Abstract

A single-body structure is presented for use as a tool tip for making modifications and/or collecting measurements on a target object. The single-body structure comprises a first end portion, a second end portion opposite the first portion, and a mid portion between the first and second end portions, wherein a central axis can be defined extending from the first end portion to the second end portion, and wherein the single-body structure has a maximum linear dimension of approximately 50 microns or less. The single-body structure may be comprised of diamond. One of the first and second end portions may have a larger cross sectional area, in a plane perpendicular to the central axis, than does the other of the first and second end portions. One of the first and second end portions may have a larger cross sectional diameter, in at least one direction perpendicular to the central axis, than does the other of the first and second end portions.

Claims

1. A single-body structure used as a tool tip for making modifications and/or collecting measurements on a target object, said single-body structure comprising:

a first end portion;

a second end portion opposite said first portion; and

a mid portion between said first and second end portions,

wherein a central axis can be defined extending from said first end portion to said second end portion, and

wherein said single-body structure has a maximum linear dimension of approximately 50 microns or less.

2. The single-body structure of claim 1, wherein said single-body structure has a maximum linear dimension of approximately 25 microns or less.

3. The single-body structure of claim 1, wherein said single-body structure has a maximum linear dimension of approximately 10 microns or less.

4. The single-body structure of claim 1, wherein said single-body structure has a maximum linear dimension of approximately 1 micron or less.

5. The single-body structure of claim 1, wherein said single-body structure has a maximum linear dimension of approximately 100 nanometers or less.

6. The single-body structure of claim 1, wherein said single-body structure has a maximum linear dimension of approximately 10 nanometers or less.

7. The single-body structure of claim 1, wherein said single-body structure is used for making modifications on said target object.

8. The single-body structure of claim 1, wherein said single-body structure is used for collecting measurements on said target object.

9. The single-body structure of claim 1, wherein said single-body structure is used for making modifications or collecting measurements on said target object.

10. The single-body structure of claim 1, wherein said single-body structure is used for both making modifications and collecting measurements on said target object.

11. The single-body structure of claim 1, wherein said modifications include removal of material from said target object.

12. The single-body structure of claim 1, wherein said measurements include at least one surface dimension measurement of said target object.

13. The single-body structure of claim 1, wherein said measurements include at least one scanning probe microscope (SPM) measurement of said target object.

14. The single-body structure of claim 1, wherein one of said first and second end portions has a larger cross sectional area, in a plane perpendicular to said central axis, than does the other of said first and second end portions.

15. The single-body structure of claim 1, wherein one of said first and second end portions has a larger cross sectional diameter, in at least one direction perpendicular to said central axis, than does the other of said first and second end portions.

16. The single-body structure of claim 1, wherein at least one of said first and second end portions includes an end surface.

17. The single-body structure of claim 16, wherein said end surface is perpendicular to said central axis.

18. The single-body structure of claim 16, wherein said end surface forms a non-perpendicular angle with said central axis.

19. The single-body structure of claim 16, wherein said end surface is substantially flat.

20. The single-body structure of claim 16, wherein said end surface is curved.

21. The single-body structure of claim 16, wherein said end surface is convex.

22. The single-body structure of claim 16, wherein said end surface is concave.

23. The single-body structure of claim 16, wherein said end surface includes a point.

24. The single-body structure of claim 23, wherein said pointed end surface has a conical shape.

25. The single-body structure of claim 23, wherein said pointed end surface is defined by intersection of a plurality of substantially flat surfaces.

26. The single-body structure of claim 1, wherein said mid portion includes at least one side surface.

27. The single-body structure of claim 26, wherein said at least one side surface is parallel to said central axis.

28. The single-body structure of claim 26, wherein said at least one side surface forms an angle with said central axis.

29. The single-body structure of claim 26, wherein said at least one side surface is substantially flat.

30. The single-body structure of claim 26, wherein said at least one side surface is curved.

31. The single-body structure of claim 26, wherein said at least one side surface is convex.

32. The single-body structure of claim 26, wherein said at least one side surface is concave.

33. The single-body structure of claim 1, wherein said mid portion includes at least one side edge defined by intersection of two adjacent surfaces.

34. The single-body structure of claim 33, wherein said side edge is parallel to said central axis.

35. The single-body structure of claim 33, wherein said side edge forms a side edge angle with said central axis.

36. The single-body structure of claim 33, wherein said side edge is substantially linear.

37. The single-body structure of claim 33, wherein said side edge is curved.

38. The single-body structure of claim 1, wherein said single-body structure contains at least one cross section having a polygonal shape.

39. The single-body structure of claim 38, wherein said polygonal shape is selected from the group consisting of triangle, quadrilateral, pentagon, hexagon, heptagon, octagon, nonagon, and decagon.

40. The single-body structure of claim 39, wherein said quadrilateral is selected from the group consisting of square, rectangle, parallelogram, and trapezoid.

41. The single-body structure of claim 1, wherein said single-body structure contains at least one cross section having a curved, closed shape.

42. The single-body structure of claim 41, wherein said curved, closed shape is selected from the group consisting of circle and oval.

43. The single-body structure of claim 1, wherein said single-body structure contains at least one cross section having a combinational, closed shape comprising at least one substantially linear line and at least one curved line.

44. The single-body structure of claim 1, wherein said single-body structure contains at least one cross section having a closed shape including at least one concave portion.

45. The single-body structure of claim 1, wherein said single-body structure contains at least one cross section having a closed shape including at least one convex portion.

46. The single-body structure of claim 1, wherein said single-body structure contains at least one cross section having an interior border defining an opening within said at least one cross section.

47. The single-body structure of claim 1, wherein said single-body structure contains at least one cross section having a gear shape.

48. The single-body structure of claim 1, wherein said single-body structure contains at least one cross section having a closed shape that is asymmetrical.

49. A single-body structure as in any one of claims 38-48, wherein said at least one cross section is taken from a plane perpendicular to said central axis.

50. A single-body structure as in any one of claims 38-48, wherein said at least one cross section is taken from a plane parallel to said central axis.

51. The single-body structure of claim 1, wherein said single-body structure comprises diamond.

52. The single-body structure of claim 1, wherein said single-body structure comprises a material selected from the group consisting of carbon nitride, cubic boron nitride, boron carbide, silicon nitride, silicon carbide, tungsten carbide, and titanium nitride.

53. The single-body structure of claim 1, wherein said single-body structure comprises a material selected from the group consisting of silicon, germanium, gallium arsenide, tungsten, titanium, and copper.

54. The single-body structure of claim 1, wherein said mid portion contains at least one edge forming an angle of approximately 87 degrees from a plane perpendicular to said central axis.

55. A single-body structure used as a tool tip for making modifications and/or collecting measurements on a target object, said single-body structure comprising:

a connecting end portion first end portion capable of being connected to a tool used to move said single-body structure relative to said target object;

a non-connecting end portion opposite said connecting end portion; and

a mid portion between said connecting and non-connecting end portions,

wherein a central axis can be defined extending from said connecting end portion to said non-connecting end portion, and

wherein said single-body structure has a maximum linear dimension of approximately 50 microns or less.

56. The single-body structure of claim 55, wherein said single-body structure has a first and a second cross sectional area, each in a separate plane perpendicular to said central axis, said first cross sectional area being smaller than said second cross sectional area and closer to said connecting end portion than said second cross sectional area.

57. The single-body structure of claim 55, wherein said single-body structure has a first and a second cross sectional diameter, each in a separate plane perpendicular to said central axis, said first cross sectional diameter area being smaller than said second cross sectional diameter and closer to said connecting end portion than said second cross sectional diameter.

58. The single-body structure of claim 55, wherein at least one of said first and second end portions includes an end surface.

59. The single-body structure of claim 58, wherein said end surface forms a non-perpendicular angle with said central axis.

60. The single-body structure of claim 58, wherein said end surface includes a point.

61. The single-body structure of claim 60, wherein said pointed end surface is defined by intersection of a plurality of substantially flat surfaces.

62. The single-body structure of claim 55, wherein said mid portion includes at least one side surface.

63. The single-body structure of claim 62, wherein said at least one side surface forms an angle with said central axis.

64. The single-body structure of claim 55, wherein said mid portion includes at least one side edge defined by intersection of two adjacent surfaces.

65. The single-body structure of claim 64, wherein said side edge forms a side edge angle with said central axis.

66. The single-body structure of claim 55, wherein said single-body structure contains at least one cross section having a polygonal shape.

67. The single-body structure of claim 55, wherein said single-body structure contains at least one cross section having a curved, closed shape.

68. The single-body structure of claim 55, wherein said single-body structure contains at least one cross section having a combinational, closed shape comprising at least one substantially linear line and at least one curved line.

69. The single-body structure of claim 55, wherein said single-body structure comprises diamond.

70. The single-body structure of claim 55, wherein said single-body structure comprises a material selected from the group consisting of carbon nitride, cubic boron nitride, boron carbide, silicon nitride, silicon carbide, tungsten carbide, and titanium nitride.

71. The single-body structure of claim 55, wherein said single-body structure comprises a material selected from the group consisting of silicon, germanium, gallium arsenide, tungsten, titanium, and copper.

72. A tool piece used as a tool tip for making modifications and/or collecting measurements on a target object, said tool piece comprising;

a proximate end;

a distal end; and

a shaped structure formed on said distal end, said shaped structure having a maximum linear dimension of approximately 50 microns or less,

wherein said tool piece has a maximum linear dimension of approximately 200 microns or less.