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Anchors for micro-electro-mechanical systems (MEMS) devices

  • US 6,788,175 B1
  • Filed: 10/04/2001
  • Issued: 09/07/2004
  • Est. Priority Date: 10/04/2001
  • Status: Expired due to Term
First Claim
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1. A MEMS anchor system for securing a base of a MEMS device to a substrate, comprising:

  • a plurality of anchors securing the base of the MEMS device to the substrate, each anchor comprising a plurality of anchor legs, each anchor leg being attached at one end to the base of the MEMS device and attached at another end to the substrate, the plurality of anchor legs comprising a first number of anchor legs oriented along a first direction and a second number of anchor legs oriented along a second direction, the first number of anchor legs are stronger and longer than the second number of anchor legs.

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