Anchors for micro-electro-mechanical systems (MEMS) devices

• US 6,788,175 B1
• Filed: 10/04/2001
• Issued: 09/07/2004
• Est. Priority Date: 10/04/2001
• Status: Expired due to Term

• Current Assignee: Resonant Inc. (Murata Manufacturing Co Limited)
• Original Assignee: Superconductor Technologies Inc. (Clearday, Inc.)
• Inventors: Prophet, Eric M.
• Primary Examiner(s): DONOVAN, LINCOLN D
• Application Number:
  US09/972,033
• Time in Patent Office: 1,069 Days
• Field of Search: 335/78-86, 200/181, 257/414-427, 257/532, 381/233, 333/262
• US Class Current: 335/78
• CPC Class Codes: B81B 2203/0307 Anchors
• CPC Class Codes: B81B 3/0078 Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

The present invention provides an anchor system for securing a MEMS device to a substrate comprising multiple anchors. A MEMS structure, built in accordance with the one embodiment of the invention, comprises a flexible beam suspended over a substrate and a base attached to each end of the beam. Each base is supported above the substrate by multiple anchors attached to the surface of the substrate. Each anchor further comprises anchor legs along its sides that support the base off of the substrate. In one embodiment, the anchors of each base are located away from the interface between the beam and the base. In another embodiment, the lengths of the anchor legs of the anchors are made longer along a direction of good side-wall step coverage than along a direction of poor side-wall step coverage.

Claims

1. A MEMS anchor system for securing a base of a MEMS device to a substrate, comprising:

a plurality of anchors securing the base of the MEMS device to the substrate, each anchor comprising a plurality of anchor legs, each anchor leg being attached at one end to the base of the MEMS device and attached at another end to the substrate, the plurality of anchor legs comprising a first number of anchor legs oriented along a first direction and a second number of anchor legs oriented along a second direction, the first number of anchor legs are stronger and longer than the second number of anchor legs.

2. The MEMS anchor system of claim 1, wherein the first number of anchor legs orientated along the first direction have lengths that are at least twice the lengths of the second number of anchor legs orientated along the second direction.

3. The MEMS anchor system of claim 1, wherein the plurality of anchors are arranged in at least two rows, each row comprising at least two anchors.

4. The MEMS anchor system of claim 3, wherein each row comprises at least four anchors.

5. The MEMS anchor system of claim 1, wherein the plurality of anchors comprises at least eight anchors.

6. A MEMS apparatus, comprising:

a beam;

a base attached to one end of the beam;

a substrate; and

a plurality of anchors securing the base to the substrate, each anchor comprising a plurality of anchor legs, each anchor leg being attached at one end to the base of the MEMS device and attached at another end to the substrate, the plurality of anchor legs comprising a first number of anchor legs oriented along a first direction and a second number of anchor legs oriented along a second direction, the first number of anchor legs are stronger and longer than the second number of anchor legs.

7. The MEMS apparatus of claim 6, wherein the plurality of anchors is located away from the end of the beam attached to the base.

8. The MEMS apparatus of claim 6, wherein the width of the base is greater than the width of the beam.

9. The MEMS anchor system of claim 6, wherein the first number of anchor legs orientated along the first direction have lengths that are at least twice the length of the second number of anchor legs orientated along the second direction.

10. The MEMS apparatus of claim 6, wherein the plurality of anchors are arranged in at least two rows, each row comprising at least two anchors.

11. The MEMS apparatus of claim 10, wherein each row comprises at least four anchors.

12. The MEMS apparatus of claim 6, wherein the plurality of anchors comprises at least eight anchors.

13. The MEMS apparatus of claim 6, further comprising a folded spring attaching the one end of the beam to the base.

14. The MEMS apparatus of claim 6, wherein the other end of the beam is free.

15. A MEMS apparatus, comprising:

a beam;

two bases, each base attached to one end of the beam;

a substrate; and

two sets of multiple anchors, each set of multiple anchors securing one of the two bases to the substrate, each anchor of the sets of multiple anchors comprising a plurality of anchor legs, wherein in a first set of multiple anchors, each anchor leg is attached at one end to a first base of the MEMS device and attached at another end to the substrate, and wherein in a second set of multiple anchors, each anchor leg is attached at one end to a second base of the MEMS device and attached at another end to the substrate, the plurality of anchor legs of the first and second sets of multiple anchors comprising a first number of anchor legs oriented along a first direction and a second number of anchor legs oriented along a second directions the first number of anchor legs are stronger and longer than the second number of anchor legs.

16. The MEMS apparatus of claim 15, wherein each set of multiple anchors is located away from the end of the beam attached to the respective base.

17. The MEMS apparatus of claim 15, wherein the width of each one of the bases is greater than the width of the beam.

18. The MEMS anchor system of claim 15, wherein the first number of anchor legs orientated along the first direction have lengths that are at least twice the length of the second number of anchor legs orientated along the second direction.

19. The MEMS apparatus of claim 15, wherein each set of multiple anchors is arranged in at least two rows of anchors, each row comprising at least two anchors.

20. The MEMS apparatus of claim 19, wherein each row comprises at least four anchors.

21. The MEMS apparatus of claim 15, wherein each set of multiple anchors comprises at least eight anchors.

22. The MEMS apparatus of claim 15, further comprising a folded spring attaching one end of the beam to one of the two bases.

23. A MEMS anchor system for securing a base of a MEMS device to a substrate, comprising:

a plurality of anchors securing the base of the MEMS device to the substrate, each anchor further comprising a plurality of anchor legs, each anchor leg being attached at one end to the base of the MEMS device and attached at another end to the substrate, wherein the plurality of anchor legs comprises a first number of anchor legs that are orientated along a first direction, a second number of anchor legs that are orientated along a second direction, and the first number of anchor legs are thicker and longer than the second number of anchor legs.

24. The MEMS anchor system of claim 23, wherein the first number of anchor legs are oriented parallel to the direction of the beam.

25. The MEMS anchor system of claim 23, wherein the first number of anchor legs are oriented perpendicular to the direction of the beam.