Capacitive sensing scheme for digital control state detection in optical switches

• US 6,788,520 B1
• Filed: 11/28/2000
• Issued: 09/07/2004
• Est. Priority Date: 04/10/2000
• Status: Expired due to Term

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Kiang, Meng-Hsiung, Behin, Behrang, Daneman, Michael J., Lau, Kam-Yin, Beerling, Timothy E.
• Primary Examiner(s): Toatley, Jr., Gregory J.
• Assistant Examiner(s): KITOV, ZEEV V
• Application Number:
  US09/724,948
• Time in Patent Office: 1,379 Days
• Field of Search: 361/207, 324/658, 385/18
• US Class Current: 361/207
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/359 of the position of the moving element itself during switching, i.e. without monitoring the switched beams

Abstract

Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the “on” or “off” position. Embodiments of the invention have application in devices switches that employ mirrors that move between an “on” or “off” position, wherein they reflect light from an input fiber into an output fiber in the “on” position, and allow the light to pass in the “off” position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the “on” or “off” position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more position in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.

Claims

1. A microelectromechanical device, comprising

a. a rotating element including a first electrode;

b. a vertical stop disposed proximate the rotating element;

c. a second electrode;

d. means, coupled to the first and second electrodes for measuring a capacitance between them; and

e. means coupled to the capacitance sensing means for determining from the capacitance a digital control state of device.

2. The device of claim 1 further comprising means for determining a deviation from a desired control state.

3. The device of claim 1 wherein the element has two control states.

4. The device of claim 1, further comprising means for rotating the rotatable element.

5. The device of claim 1 wherein the element is a MEMS mirror.

6. A microelectromechanical system (MEMS) apparatus, comprising

a. an element configured to rotate between a first control state and a second control state;

b. a vertical stop disposed proximate the element;

c. one or more electrodes disposed proximate the element, wherein a capacitance between the element and the one or more electrodes has a first value when the element is in the first control state and the capacitance has a second value when the element is in the second control state;

d. means, for measuring a value of the capacitance between the element and the at least one of the one or more electrodes; and

e. means coupled to the capacitance sensing means for determining a control state of the element from the value of the capacitance.

7. The device of claim 6 wherein the first and second angular positions are substantially 90°

apart.

8. The device of claim 6 further comprising means for actuating the element.

9. The device of claim 6 further comprising means for electrostatically clamping the element in at least one of the first and second positions.

10. The device of claim 9, wherein the clamping means comprises a clamping voltage source electrically coupled to one or more of the one or more electrodes.

11. The device of claim 6, further comprising a substrate, wherein the element connected to the substrate by a hinge.

12. The device of claim 11, wherein the one or more electrodes includes an electrode disposed on the substrate proximate the element.

13. The device of claim 11, wherein the substrate includes a vertical stop disposed proximate the element.

14. The device of claim 13, wherein the one or more electrodes includes an electrode attached to the vertical stop.

15. The device of claim 6, wherein the element is a MEMS mirror.

16. A method for sensing the control state of a microelectromechanical device, comprising:

measuring a value of a capacitance between a rotatable element and one or more of a first and second electrode disposed proximate the rotatable element to determine whether the rotatable element is in a first control state, a second control state, or neither the first nor second control state,

wherein the rotatable element is in a vertical position proximate a vertical stop when the rotatable element is in the first or second control state.

17. The method of claim 16, further comprising applying an electrostatic clamping voltage to one or more of the first and second electrodes.

18. The method of claim 17, wherein the clamping voltage is a DC voltage and c) includes superimposing an AC signal on the clamping voltage.

19. The method of claim 17, wherein the clamping voltage and a sensing signal are alternately applied in time.

20. The method of claim 16 further comprising determining the presence of a fault in the microelectromechanical device from the value of the capacitance.

21. The method of claim 16 further comprising using the value of the capacitance to time the actuation of the element.

22. An optical communications system, comprising:

a) one or more input optical fibers;

b) one or more output optical fibers;

c) a microelectromechanical system (MEMS) optical switch including;

ii) one or more MEMS mirrors configured to rotate between a first angular position and a second angular position;

ii) b. a vertical stop disposed proximate one or more of the MEMS mirrors;

iii) one or more electrodes disposed proximate each of the one or more mirrors, wherein a capacitance between the mirrors and the electrodes has a first value when the mirrors are in a first control state and the capacitance has a second value when the element is in a second control state;

iv) means, for measuring a value the capacitance between at least one of the one or more mirrors and the at least one of the one or more electrodes; and

v) means coupled to the capacitance sensing means for determining a control state of the element from the value of the capacitance.