Method of using control models for data compression
First Claim
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1. A method comprising:
- collecting processing data representative of a process;
applying a control model to model the collected processing data; and
applying the control model to compress the collected processing data.
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Abstract
A method is provided for compressing data. The method comprises collecting processing data representative of a process. The method further comprises modeling the collected processing data using a control model. The method also comprises applying the control model to compress the collected processing data.
25 Citations
48 Claims
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1. A method comprising:
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collecting processing data representative of a process;
applying a control model to model the collected processing data; and
applying the control model to compress the collected processing data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
scaling at least a portion of the collected processing data to generate mean values and mean scaled values for the collected processing data;
calculating Scores from the mean scaled values for the collected processing data using at most first, second, third and fourth Principal Components derived from a Principal Components Analysis (PCA) control model using archived data sets; and
saving the Scores and the mean values.
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5. The method of claim 4, wherein building the Principal Components Analysis (PCA) control model further comprises saving Loadings corresponding to at most first, second, third and fourth Principal Components derived from a plurality of processing data representative of previous processes.
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6. The method of claim 5, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using an eigenanalysis method.
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7. The method of claim 5, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using a singular value decomposition method.
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8. The method of claim 5, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using a power method.
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9. The method of claim 4 further comprising:
reconstructing the data representative of the process using the Scores and the mean values.
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10. The method of claim 4, wherein scaling the at least the portion of the collected processing data to generate the mean values and the mean scaled values for the collected processing data comprises generating the mean values and the mean scaled values for the collected processing data from the Principal Components Analysis (PCA) control model built using a plurality of processing data representative of previous processes.
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11. A computer readable, program storage device encoded with instructions that, when executed by a computer, perform a method, the method comprising:
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collecting processing data representative of a process;
applying a control model to model the collected processing data; and
applying the control model to compress the collected processing data. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
scaling at least a portion of the collected processing data to generate mean values and mean scaled values for the collected processing data;
calculating Scores from the mean scaled values for the collected processing data using at most first, second, third and fourth Principal Components derived from a Principal Components Analysis (PCA) control model using archived data sets; and
saving the Scores and the mean values.
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15. The computer readable, program storage device of claim 14, wherein building the Principal Components Analysis (PCA) control model further comprises saving Loadings corresponding to at most first, second, third and fourth Principal Components derived from a plurality of processing data representative of previous processes.
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16. The computer readable, program storage device of claim 15, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using an eigenanalysis method.
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17. The computer readable, program storage device of claim 15, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using a singular value decomposition method.
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18. The computer readable, program storage device of claim 15, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using a power method.
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19. The computer readable, program storage device of claim 14 further comprising:
reconstructing the data representative of the process using the Scores and the mean values.
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20. The computer readable, program storage device of claim 14, wherein scaling the at least the portion of the collected processing data to generate the mean values and the mean scaled values for the collected processing data comprises generating the mean values and the mean scaled values for the collected processing data from the Principal Components Analysis (PCA) control model built using a plurality of processing data representative of previous processes.
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21. A computer programmed to perform a method, the method comprising:
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collecting processing data representative of a process;
applying a control model to model the collected processing data; and
applying the control model to compress the collected processing data. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
scaling at least a portion of the collected processing data to generate mean values and mean scaled values for the collected processing data;
calculating Scores from the mean scaled values for the collected processing data using at most first, second, third and fourth Principal Components derived from a Principal Components Analysis (PCA) control model using archived data sets; and
saving the Scores and the mean values.
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25. The computer of claim 24, wherein building the Principal Components Analysis (PCA) control model further comprises saving Loadings corresponding to at most first, second, third and fourth Principal Components derived from a plurality of processing data representative of previous processes.
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26. The computer of claim 25, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using an eigenanalysis method.
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27. The computer of claim 25, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using a singular value decomposition method.
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28. The computer of claim 25, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using a power method.
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29. The computer of claim 24 further comprising:
reconstructing the data representative of the process using the Scores and the mean values.
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30. The computer of claim 24, wherein scaling the at least the portion of the collected processing data to generate the mean values and the mean scaled values for the collected processing data comprises generating the mean values and the mean scaled values for the collected processing data from the Principal Components Analysis (PCA) control model built using a plurality of processing data representative of previous processes.
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31. A method comprising:
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collecting processing data (xi,yi), where i=1, 2, . . . , M, representative of a process;
applying a control model to model the collected processing data said control model having at most N+1 parameters, wherein 2M is greater than N+1; and
applying the control model to compress the collected processing data to have a data compression ratio of at least about 2M;
(N+1).- View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40)
scaling at least a portion of the collected processing data to generate mean values and mean scaled values for the collected processing data;
calculating Scores from the mean scaled values for the collected processing data using at most first, second, third and fourth Principal Components derived from a Principal Components Analysis (PCA) control model using archived data sets; and
saving the Scores and the mean values.
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35. The method of claim 34, wherein building the Principal Components Analysis (PCA) control model further comprises saving Loadings corresponding to at most first, second, third and fourth Principal Components derived from a plurality of processing data representative of previous processes.
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36. The method of claim 35, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using an eigenanalysis method.
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37. The method of claim 35, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using a singular value decomposition method.
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38. The method of claim 35, wherein saving Loadings corresponding to at most the first, second, third and fourth Principal Components comprises using a power method.
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39. The method of claim 34 further comprising:
reconstructing the processing data representative of the process using the Scores and the mean values.
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40. The method of claim 34, wherein scaling the at least the portion of the collected processing data to generate the mean values and the mean scaled values for the collected processing data comprises generating the mean values and the mean scaled values for the collected processing data from the Principal Components Analysis (PCA) control model built using a plurality of processing data representative of previous processes.
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41. A system, comprising:
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a processing tool to process a semiconductor wafer;
a controller comprising a control model to acquire and model processing data relating to said processing of said semiconductor wafer, said control model to compress said modeled processing data. - View Dependent Claims (42, 43, 44)
means for scaling at least a portion of the collected processing data to generate mean values and mean scaled values for the collected processing data;
means for calculating Scores from the mean scaled values for the collected processing data using at most first, second, third and fourth Principal Components derived from a Principal Components Analysis (PCA) control model using archived data sets; and
means for saving the Scores and the mean values.
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44. The system of claim 43, wherein said means for scaling the at least the portion of the collected processing data to generate the mean values and the mean scaled values for the collected processing data further comprises means for generating the mean values and the mean scaled values for the collected processing data from said Principal Components Analysis (PCA) control model built using a plurality of processing data representative of previous processes.
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45. An apparatus, comprising:
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a controller comprising a control model to acquire and model processing data relating to a process performed on a semiconductor wafer, said control model to compress said processing data. - View Dependent Claims (46, 47, 48)
means for scaling at least a portion of the collected processing data to generate mean values and mean scaled values for the collected processing data;
means for calculating Scores from the mean scaled values for the collected processing data using at most first, second, third and fourth Principal Components derived from a Principal Components Analysis (PCA) control model using archived data sets; and
means for saving the Scores and the mean values.
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48. The apparatus of claim 46, wherein said means for scaling the at least the portion of the collected processing data to generate the mean values and the mean scaled values for the collected processing data further comprises means for generating the mean values and the mean scaled values for the collected processing data from said Principal Components Analysis (PCA) control model built using a plurality of processing data representative of previous processes.
Specification