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Integrated circuit device characterization

  • US 6,789,236 B2
  • Filed: 03/14/2002
  • Issued: 09/07/2004
  • Est. Priority Date: 03/07/2001
  • Status: Expired due to Fees
First Claim
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1. An apparatus comprising:

  • an impedance analyzer to measure one or more electrical characteristics of an integrated circuit device at one or more relatively lower frequencies;

    a network analyzer to measure one or more parameters of the integrated circuit device at one or more frequencies higher than the one or more relatively lower frequencies; and

    a data processing system to calculate one or more parameters of the integrated circuit device based on the measured one or more electrical characteristics and to characterize the integrated circuit device based on the calculated one or more parameters and the measured one or more parameters.

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