Active control of electron temperature in an electrostatically shielded radio frequency plasma source
First Claim
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1. A method for generating a plasma having a selected electron temperature, comprising:
- generating electrical power having components operatina on at least two different frequencies;
deriving electromagnetic energy at the at least two different frequencies from the generated electrical power and inductively coupling the derived electromagnetic energy into a region containing an ionizable gas to ionize the gas and create a plasma composed of the resulting ions; and
selecting a power level for the electrical power component at each frequency in order to cause the plasma to have the selected electron temperature.
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Abstract
A method and apparatus for generating a plasma having a selected electron temperature, by: generating electrical power having components at at least two different frequencies; deriving electromagnetic energy at the at least two different frequencies from the generated electrical power and inductively coupling the derived electromagnetic energy into a region containing an ionizable gas to ionize the gas and create a plasma composed of the resulting ions; and selecting a power level for the electrical power component at each frequency in order to cause the plasma to have the selected electron temperature.
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Citations
9 Claims
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1. A method for generating a plasma having a selected electron temperature, comprising:
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generating electrical power having components operatina on at least two different frequencies;
deriving electromagnetic energy at the at least two different frequencies from the generated electrical power and inductively coupling the derived electromagnetic energy into a region containing an ionizable gas to ionize the gas and create a plasma composed of the resulting ions; and
selecting a power level for the electrical power component at each frequency in order to cause the plasma to have the selected electron temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
determining power level values for the electrical power component at each frequency in order to cause the plasma to have a selected electron temperature for each of a plurality of different values of total electrical power generated and pressure in the region; and
storing data representing the determined power level values and associated values of total electrical power generated and pressure in the region; and
wherein said step of selecting is performed by using the stored data to select power level values for existing values of total electrical power generated and pressure in the region.
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Specification