×

Method for capacitively coupling electronic devices

  • US 6,790,704 B2
  • Filed: 07/17/2001
  • Issued: 09/14/2004
  • Est. Priority Date: 12/29/1997
  • Status: Expired due to Term
First Claim
Patent Images

1. A method comprising:

  • depositing a dielectric material of a first thickness on at least one of a first set of electrically conductive pads on a first semiconductor substrate and a second set of electrically conductive pads on a second semiconductor substrate; and

    attaching said first semiconductor substrate to said second semiconductor substrate to substantially align said first and second sets of pads parallel to one another, wherein said dielectric material is disposed in direct contact between said first and second sets of electrically conductive pads to form a capacitor; and

    retaining both the first and second semiconductor substrates after attaching said first semiconductor substrate to said second semiconductor substrate, wherein attaching said first semiconductor substrate to said second semiconductor substrate includes heating said first and second semiconductor substrates to bond said first and second dielectric films, wherein a microprocessor comprises one of said first and second semiconductor substrates.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×