Process for forming barrier/seed structures for integrated circuits

• US 6,790,773 B1
• Filed: 08/28/2002
• Issued: 09/14/2004
• Est. Priority Date: 08/28/2002
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Powell, Ronald A., Drewery, John S.
• Primary Examiner(s): NGUYEN, THANH T
• Application Number:
  US10/232,445
• Time in Patent Office: 748 Days
• Field of Search: 438/68, 438/678, 438/672-675, 438/656, 438/627-629, 438/633, 438/637-641, 438/642-644, 438/648, 438/650, 438/686-688
• US Class Current: 438/643
• CPC Class Codes: H01L 21/76843 formed in openings in a dielectric
• CPC Class Codes: H01L 21/76873 for electroplating
• CPC Class Codes: H01L 21/76877 Filling of holes, grooves or trenches, e.g. vias, with conductive material
• CPC Class Codes: H01L 2221/1089 Stacks of seed layers

Abstract

A process and structure are provided that allows electroplating to fill sub-micron, high aspect ratio features using a non-conformal conductive layer between the dielectric layer and the platability layer. The conductive layer is a relatively thick layer overlying the planar surface of the wafer and the bottom of the features to be filled. Little or no material of the conductive layer is formed on the feature sidewalls. The thick conductive layer on the field provides adequate conductivity for uniform electroplating, while the absence of significant conductive material on the sidewalls decreases the aspect ratio of the feature and makes void-free filling easier to accomplish with electroplating. Further, the absence of significant material on the sidewalls allows a thicker barrier layer to be formed for higher reliability.

Claims

1. A method of processing a semiconductor wafer, comprising:

providing a dielectric layer;

etching a feature within the dielectric layer, wherein the feature comprises a sidewall and a bottom surface;

depositing a non-conformal conductive layer over the dielectric layer and the bottom surface of the feature, wherein the conductive layer on the sidewall is less then 10% of the thickness of the conductive layer over the dielectric layer;

depositing a single conformal barrier and platability layer over the non-conformal conductive layer, and electroplating a conductive material to fill the feature.

2. The method of claim 1, wherein the conductive material is copper.

3. The method of claim 1, wherein the feature comprises a via.

4. The method of claim 1, wherein depositing the conformal layer is by CVD.

5. The method of claim 1, wherein the conductive layer is selected from the group consisting of Cu, W, Co, Ru, Mo, Pt, and Pd.

6. The method of claim 1, wherein the conductive layer is between 8 nm and 25 nm over the planar surface of the dielectric layer.

7. The method of claim 1, wherein the single conformal barrier and platability layer comprises tungsten or Ru.

8. The method of claim 1, wherein the electroplating is a bottom-up fill.

9. The method of claim 1, wherein the conductive layer has a resistivity below approximately 15 μ

Ω

cm.

10. The method of claim 9, wherein the conductive layer is cobalt or tungsten.

11. The method of claim 10, wherein the conductive layer has a thickness between approximately 10 nm and 25 nm.

12. The method of claim 1, further comprising depositing a seed layer over the single conformal barrier and platability layer prior to the electroplating.

13. The method of claim 1, wherein the barrier and platability layer is a tungsten layer.

14. The method of claim 13, wherein tungsten layer is approximately 2 to 15 nm thick and deposited by PNL.

15. The method of claim 13 wherein the tungsten layer is approximately 5 to 15 nm thick and deposited by CVD.

16. The method of claim 1, wherein the barrier and platability layer is a Ru layer deposited by ALD or CVD.

17. The method of claim 16, wherein the Ru layer is approximately 2 to 15 nm thick.

18. The method of claim 1, wherein the barrier and platability layer is in physical contact with the sidewall of the feature.