Systems and methods for overcoming stiction
First Claim
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1. An electro-mechanical system, the system comprising:
- a mechanical stop;
a structural plate disposed relative to the mechanical stop, wherein a side of the structural plate contacts the mechanical stop; and
an actuator, wherein application of a DC voltage to the actuator causes the mechanical stop to move relative to the structural plate from a static position to a displaced position, and wherein removal of the DC voltage causes a movement of the mechanical stop from the displaced position to the static position, and wherein the movement is sufficient to overcome stiction forces between the structural plate and the mechanical stop.
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Abstract
A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.
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Citations
7 Claims
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1. An electro-mechanical system, the system comprising:
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a mechanical stop;
a structural plate disposed relative to the mechanical stop, wherein a side of the structural plate contacts the mechanical stop; and
an actuator, wherein application of a DC voltage to the actuator causes the mechanical stop to move relative to the structural plate from a static position to a displaced position, and wherein removal of the DC voltage causes a movement of the mechanical stop from the displaced position to the static position, and wherein the movement is sufficient to overcome stiction forces between the structural plate and the mechanical stop. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification