Systems and methods for improved metrology using combined optical and electrical measurements

• US 6,791,310 B2
• Filed: 07/26/2002
• Issued: 09/14/2004
• Est. Priority Date: 03/15/1999
• Status: Expired due to Term

• Current Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Original Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Inventors: Smith, Walter Lee
• Primary Examiner(s): Nguyen, Vinh P.
• Application Number:
  US10/205,868
• Publication Number:
  US 20020186036A1
• Time in Patent Office: 781 Days
• Field of Search: 324/158.1, 324/750-765, 324/500-501, 438/14-18
• US Class Current: 324/754.05
• CPC Class Codes: G01N 21/21 Polarisation-affecting properties G01N21/19 takes precedence

Abstract

A combination metrology tool is disclosed for analyzing samples, and in particular semiconductor samples. The device includes a first measurement module for determining electrical characteristics of the sample. In general, such a measurement module will monitor voltage or capacitance characteristics to derive information such as carrier lifetimes, diffusion lengths and surface doping. The device also includes a second measurement module for determining compositional characteristics such as layer thickness, index of refraction and extinction coefficient. The second measurement module will include a light source for generating a probe beam which interacts with the sample. A detection system is provided for monitoring either the change in magnitude or polarization state of the probe beam. The output signals from both measurement modules are combined by a processor to more accurately evaluate the sample.

Claims

1. A method of evaluating a sample comprising the steps of:

measuring the electrical characteristics of the sample at a predetermined region thereof in a non-contact manner and generating first output signals corresponding thereto;

measuring the composition characteristics at said region of the sample in a non-contact manner and generating second output signals responsive thereto; and

evaluating said region of the sample based on a combination of the measured electrical and composition characteristics represented by the first and second output signals.

2. A method as recited in claim 1 wherein said step of evaluating the sample includes using one of the first or second output signals to characterize one parameter of the sample and wherein the other of the first and second output signals are used to further characterize the sample wherein said one parameter is treated as a known parameter.

3. A method as recited in claim 1 wherein said step of evaluating the sample includes using the first and second output signals in a fitting algorithm to evaluate both the electrical and the composition characteristics of the sample.

4. A method as recited in claim 1 wherein said step of measuring electrical characteristic includes using a technique selected from the group consisting of oxide surface potential, surface photovoltage, contact potential difference, Kelvin probe and corona charge measurements.

5. A method as recited in claim 4, wherein said electrical characteristics include at least one selected from the group consisting of minority carrier diffusion length, minority carrier lifetime, metal concentration, surface recombination velocity, minority carrier recovery time, surface barrier voltage, oxide voltage, surface space charge, dielectric capacitance, electrical oxide thickness, and surface doping.

6. A method as recited in claim 1 wherein said composition characteristics include at least one selected from the group consisting of layer thickness, index of refraction and extinction coefficient.

7. A method as recited in claim 1 wherein said step of measuring the electrical characteristics of the sample includes measuring the voltage or capacitance of the sample.

8. A method as recited in claims 7 wherein said step of measuring the composition characteristics of the sample includes the steps of:

directing a probe beam of light to reflect off said region of the sample; and

measuring either the change in magnitude or polarization state of the probe beam induced by the interaction with the sample in order to generate said second output signals.

9. A method as recited in claims 1 wherein said step of measuring the composition characteristics of the sample includes the steps of:

directing a probe beam of light to reflect off said region of the sample; and

measuring either the change in magnitude or polarization state of the probe beam induced by the interaction with the sample in order to generate said second output signals.

10. An apparatus for evaluating a semiconductor sample, comprising:

a first measurement module for performing non-contact electrical measurements of either the voltage or capacitance of the sample in a predetermined region thereof and generating first output signals responsive thereto;

a second measurement module for performing non-contact optical measurements of the sample, said module including at least one light source for generating a probe beam directed to reflect off the sample in said predetermined region thereof, said second measurement module further including a detector for monitoring either the change in magnitude or polarization state of the probe beam induced by the sample and generating second output signals responsive thereto; and

a processor for evaluating the sample based upon a combination of the electrical and optical measurements represented by said first and second output signals.

11. An apparatus as recited in claim 10 wherein the processor evaluates the sample using one of the first or second output signals to characterize one parameter of the sample and wherein the other of the first and second output signals are used to further characterize the sample wherein said one parameter is treated as a known parameter.

12. An apparatus as recited in claim 10 wherein the processor evaluates the sample using the first and second output signals in a fitting algorithm to evaluate both the electrical and the composition characteristics of the sample.

13. An apparatus as recited in claim 10 wherein said first measurement module operates using a technique selected from the group consisting of oxide surface potential, surface photovoltage, contact potential difference, Kelvin probe and corona charge measurements.

14. An apparatus as recited in claim 13 wherein the measurements made by the first measurement module are used to evaluate at least one parameter selected from the group consisting of minority carrier diffusion length, minority carrier lifetime, metal concentration, surface recombination velocity, minority carrier recovery time, surface barrier voltage, oxide voltage, surface space charge, dielectric capacitance, electrical oxide thickness and surface doping.

15. An apparatus as recited in claim 10 wherein the measurements made by the second measurement module are used to evaluate at least one parameter selected from the group consisting of layer thickness, index of refraction and extinction coefficient.

16. A method of evaluating a parameter of a sample comprising the steps of:

measuring an electrical characteristic of the sample in a non-contact manner, the electrical characteristic capable of being used with a plurality of material aspects of the sample to determine a value of the parameter being evaluated;

measuring an optical characteristic of the sample in a non-contact manner, the optical characteristic capable of being used to accurately determine one of said plurality of material aspects; and

determining the value of said parameter formulaically using said accurately determined one of said plurality of material aspects with said electrical characteristic.

17. A method of evaluating a parameter of a sample comprising the steps of:

measuring an optical characteristic of the sample in a non-contact manner, the optical characteristic capable of being used with a plurality of material aspects of the sample to determine a value of the parameter being evaluated;

measuring an electrical characteristic of the sample in a non-contact manner, the electrical characteristic capable of being used to accurately determine one of said plurality of material aspects; and

determining the value of said parameter formulaically using said accurately determined one of said plurality of material aspects with said optical characteristic.