Systems and methods for improved metrology using combined optical and electrical measurements
First Claim
1. A method of evaluating a sample comprising the steps of:
- measuring the electrical characteristics of the sample at a predetermined region thereof in a non-contact manner and generating first output signals corresponding thereto;
measuring the composition characteristics at said region of the sample in a non-contact manner and generating second output signals responsive thereto; and
evaluating said region of the sample based on a combination of the measured electrical and composition characteristics represented by the first and second output signals.
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Abstract
A combination metrology tool is disclosed for analyzing samples, and in particular semiconductor samples. The device includes a first measurement module for determining electrical characteristics of the sample. In general, such a measurement module will monitor voltage or capacitance characteristics to derive information such as carrier lifetimes, diffusion lengths and surface doping. The device also includes a second measurement module for determining compositional characteristics such as layer thickness, index of refraction and extinction coefficient. The second measurement module will include a light source for generating a probe beam which interacts with the sample. A detection system is provided for monitoring either the change in magnitude or polarization state of the probe beam. The output signals from both measurement modules are combined by a processor to more accurately evaluate the sample.
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Citations
17 Claims
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1. A method of evaluating a sample comprising the steps of:
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measuring the electrical characteristics of the sample at a predetermined region thereof in a non-contact manner and generating first output signals corresponding thereto;
measuring the composition characteristics at said region of the sample in a non-contact manner and generating second output signals responsive thereto; and
evaluating said region of the sample based on a combination of the measured electrical and composition characteristics represented by the first and second output signals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
directing a probe beam of light to reflect off said region of the sample; and
measuring either the change in magnitude or polarization state of the probe beam induced by the interaction with the sample in order to generate said second output signals.
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9. A method as recited in claims 1 wherein said step of measuring the composition characteristics of the sample includes the steps of:
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directing a probe beam of light to reflect off said region of the sample; and
measuring either the change in magnitude or polarization state of the probe beam induced by the interaction with the sample in order to generate said second output signals.
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10. An apparatus for evaluating a semiconductor sample, comprising:
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a first measurement module for performing non-contact electrical measurements of either the voltage or capacitance of the sample in a predetermined region thereof and generating first output signals responsive thereto;
a second measurement module for performing non-contact optical measurements of the sample, said module including at least one light source for generating a probe beam directed to reflect off the sample in said predetermined region thereof, said second measurement module further including a detector for monitoring either the change in magnitude or polarization state of the probe beam induced by the sample and generating second output signals responsive thereto; and
a processor for evaluating the sample based upon a combination of the electrical and optical measurements represented by said first and second output signals. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A method of evaluating a parameter of a sample comprising the steps of:
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measuring an electrical characteristic of the sample in a non-contact manner, the electrical characteristic capable of being used with a plurality of material aspects of the sample to determine a value of the parameter being evaluated;
measuring an optical characteristic of the sample in a non-contact manner, the optical characteristic capable of being used to accurately determine one of said plurality of material aspects; and
determining the value of said parameter formulaically using said accurately determined one of said plurality of material aspects with said electrical characteristic.
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17. A method of evaluating a parameter of a sample comprising the steps of:
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measuring an optical characteristic of the sample in a non-contact manner, the optical characteristic capable of being used with a plurality of material aspects of the sample to determine a value of the parameter being evaluated;
measuring an electrical characteristic of the sample in a non-contact manner, the electrical characteristic capable of being used to accurately determine one of said plurality of material aspects; and
determining the value of said parameter formulaically using said accurately determined one of said plurality of material aspects with said optical characteristic.
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Specification