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System for and method of testing a microelectronic device using a dual probe technique

  • US 6,791,344 B2
  • Filed: 12/28/2000
  • Issued: 09/14/2004
  • Est. Priority Date: 12/28/2000
  • Status: Expired due to Fees
First Claim
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1. A system for testing a DUT having a plurality of probe pads, comprising:

  • a. a forcing probe for contacting and applying an electrical signal to a first portion of a first one of the plurality of probe pads;

    b. a sensing probe for contacting a second portion of said first one of the plurality of probe pads spaced from said first portion and sensing said electrical signal after said electrical signal has passed from said first portion to said second portion via said first one of said plurality of probe pads; and

    c. a feedback system operatively configured for adjusting the magnitude of said electrical signal applied by said forcing probe as a function of said electrical signal sensed at said sensing probe so as to achieve a desired value of said electrical signal at said second portion.

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