Surface micromachined optical system with reinforced mirror microstructure

• US 6,791,730 B2
• Filed: 04/08/2003
• Issued: 09/14/2004
• Est. Priority Date: 04/23/2001
• Status: Expired due to Term

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: MEMX, Inc. (Lumentum Holdings Inc.)
• Inventors: Sniegowski, Jeffry J., Rodgers, M. Steven
• Primary Examiner(s): Juba, Jr., John
• Application Number:
  US10/409,416
• Publication Number:
  US 20030210446A1
• Time in Patent Office: 525 Days
• Field of Search: 359/223, 359/224, 359/225, 359/290, 359/291, 359/295, 359/846, 359/848, 359/849
• US Class Current: 359/223.1
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/007 For controlling stiffness, e.g. ribs
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B

Abstract

Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Claims

1. A surface micromachined optical system that comprises:

a first substrate;

a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and

a first actuator associated with said first mirror microstructure, wherein said first mirror microstructure comprises;

a first structural layer disposed in spaced relation to said first substrate;

a second structural layer disposed in spaced relation to said first structural layer;

wherein said first structural layer is disposed between said second structural layer and said first substrate; and

a reinforcing assembly that extends between and interconnects said first and second structural layers to maintain said first and second structural layers in a fixed position relative to each other across substantially the entire extent of said first and second structural layers, wherein said second structural layer comprises an upper surface, wherein a radius of curvature of said upper surface of said second structural layer is at least about 1 meter.

2. A system, as claimed in claim 1, wherein:

said first and second structural layers are at least substantially vertically aligned.

3. A system, as claimed in claim 1, wherein:

a first center of said first structural layer is vertically aligned with a second center of said second structural layer.

4. A system, as claimed in claim 1, wherein:

said first and second structural layers are polysilicon, and wherein said first substrate is silicon.

5. A system, as claimed in claim 1, wherein:

said second structural layer comprises a plurality of etch release holes that extend through an entire thickness of said second structural layer.

6. A system, as claimed in claim 1, wherein:

said second structural layers is devoid of any etch release holes that extend through an entire thickness of said second structural layer.

7. A system, as claimed in claim 1, wherein:

said second structural layer further comprises a lower surface that is disposed opposite said upper surface and that projects toward said first structural layer, and wherein said upper surface comprises an optically reflective surface of said second structural layer.

8. A system, as claimed in claim 7, wherein:

a minimum surface area of said optically reflective surface is about 2,000 μ

m².

9. A system, as claimed in claim 1, wherein:

said second structural layer further comprises a lower surface that is disposed opposite said upper surface and that projects toward said first structural layer, and wherein said first mirror microstructure further comprises a first optically reflective layer that is deposited on said upper surface of said second structural layer.

10. A system, as claimed in claim 9, wherein:

said first optically reflective layer comprises a material selected from the group consisting of gold, silver, and aluminum.

11. A systems as claimed in claim 9, wherein:

a minimum surface area of said optically reflective layer is about 2,000 μ

m².

12. A system, as claimed in claim 1, wherein:

said reinforcing assembly comprises a plurality of first columns extending between and fixedly interconnecting said first and second structural layers.

13. A system, as claimed in claim 12, wherein:

said plurality of first columns are disposed at least substantially perpendicular to each of said first and second structural layers.

14. A system, as claimed in claim 12, wherein:

said plurality of first columns are at least substantially uniformly distributed across at least substantially an entirety of said second structural layer.

15. A system, as claimed in claim 12, wherein:

said plurality of first columns are equally spaced.

16. A system, as claimed in claim 12, wherein:

said mirror microstructure comprises a center that extends through said first and second structural layers, wherein individual members of a first pair of said plurality of first columns are disposed at a different radial distance from said center.

17. A system, as claimed in claim 1, wherein:

said reinforcing assembly comprises a plurality of at least generally laterally extending rails that are disposed between and fixedly interconnect said first and second structural layers.

18. A system, as claimed in claim 17, wherein:

said plurality of rails are disposed in non-intersecting relation.

19. A system, as claimed in claim 17, wherein:

said plurality of rails are disposed in at least substantially parallel relation.

20. A system, as claimed in claim 17, wherein:

said plurality of rails extend at least toward a first point.

21. A system, as claimed in claim 20, wherein:

at least one of said plurality of rails extends closer to said first point that at least one other of said plurality of rails.

22. A system, as claimed in claim 20, wherein:

each of said plurality of rails terminate at least substantially equidistantly from said first point.

23. A system, as claimed in claim 20, wherein:

at least two of said plurality of rails intersect at said first point.

24. A system, as claimed in claim 17, wherein:

a first pair of said plurality of rails extend at least toward a first point, and wherein a second pair of said plurality of rails extend at least toward a second point that is spaced from said first point.

25. A system, as claimed in claim 17, wherein:

a first group of said plurality of rails are disposed in a different orientation than a second group of said plurality of rails.

26. A system, as claimed in claim 17, wherein:

said plurality of rails are axially extending.

27. A system, as claimed in claim 17, wherein:

said plurality of rails are other than linear.

28. A system, as claimed in claim 17, wherein:

said mirror microstructure comprises a center that extends through said first and second structural layers, wherein a first rail of said plurality rails is disposed at a different radial distance from said center than a second rail of said plurality of rails.

29. A system, as claimed in claim 17, wherein:

said plurality of rails extend at least generally sinusoidally in at least substantially parallel relation with said first substrate.

30. A system, as claimed in claim 17, wherein:

at least two of said plurality of rails intersect.

31. A system, as claimed in claim 17, wherein:

each of said plurality of rails are at least generally axially extending; and

a first portion of said plurality of rails are disposed in a first orientation in a lateral dimension while a second portion of said plurality of rails are disposed in a second orientation in said lateral dimension that is different than said first orientation.

32. A system, as claimed in claim 31, wherein:

said first and second orientations are disposed about 90 degrees relative to each other.

33. A system, as claimed in claim 1, wherein:

said reinforcing assembly comprises a plurality of first rails extending between and fixedly interconnecting said first and second structural layers;

said reinforcing assembly further comprises a plurality of second rails extending between and fixedly interconnecting said first and second structural layers, wherein said plurality of first and second rails intersect.

34. A system, as claimed in claim 33, wherein:

said plurality of first rails are at least generally perpendicular to said plurality of second rails.

35. A system, as claimed in claim 1, wherein:

said reinforcing assembly comprises a grid.

36. A system, as claimed in claim 35, wherein:

said grid comprises a plurality of closed cells.

37. A system, as claimed in claim 1, wherein:

said radius of curvature of said upper surface of said second structural layer is at least about 2 meters.

38. A system, as claimed in claim 1, wherein:

said radius of curvature is about 14 meters.

39. A system, as claimed in claim 1, wherein:

said reinforcing assembly comprises a first structural member that extends between and fixedly interconnects said first and second structural layers, wherein said first structural member is positioned relative to a center of said second structural layer in a lateral dimension such that a reinforcement ratio is no more than about 0.5, wherein said reinforcement ratio is a ratio of a first distance to a second distance, wherein said first distance is a distance from said center to a portion of said first structural member that is disposed closest to said center, and wherein said second distance is a diameter of said second structural layer.

40. A system, as claimed in claim 1, wherein:

said reinforcing assembly comprises a first structural member, wherein a width of said first structural member is less than twice a thickness of said second structural layer.

41. A system, as claimed in claim 1, wherein:

a maximum thickness of each of said first and second structural layers is about 10 μ

m.

42. A system, as claimed in claim 1, wherein:

a maximum thickness of each of said first and second structural layers is about 6 μ

m.